本研究使用有限差分法建立熱傳模型，計算晶圓切割過程中的熱傳問題，預測工件溫度分布情況，探討工件尺寸、進給速度、切割片速度與邊界冷卻條件對切割過程中工件的溫度分布的影響。熱傳的理論解析解，因假設工件為半無限體，所以其預測之溫度分布與數值模擬之誤差，隨厚度減少而變大。
數值模擬結果顯示當工件進給速度固定時，工件溫度與工件厚度呈現負相關，厚度2 mm以下之工件的後側材料在熱源遠離後仍維持高溫，使用切削液有助於降溫。熱輸入固定時，工件進給速度提高，工件溫度降低，工件材料的受熱影響的範圍減小。由實驗之經驗公式發現提高進給速度使切割力增大，進而增加產熱，使得工件溫度增高，而提高切割片速度則反之降低工件溫度。工件進給速度對切割力、溫度分布都有明顯的影響，為晶圓切割過程中最重要之操作參數。

In this study, a heat transfer model is established based on the finite difference method to solve heat transfer problems and to predict the temperature distribution of workpiece during the wafer dicing process. Effects of workpiece size, feed rate, blade speed, and boundary conditions on the temperature distribution of the workpiece are investigated. Based on the workpiece as the semi-infinite body, the classical solutions for the heat transfer analysis of this process can be obtained, but the error between the predicted temperature and numerical one increases with decreasing thickness of the wafer.
Numerical results show that for a constant feed rate, the temperature of the workpiece decreases with increasing thickness of the workpiece. The material at the trailing edge of workpiece remains high temperature for the thickness less than 2 mm when the heat source moves away. The use of the cutting fluid helps to reduce the temperature. For a constant heat flux, the temperature decreases with increasing feed rate with a smaller area of high temperature. From the empirical formula of the experiments, the dicing force increases along with the feed rate. Hence, the heat source increases along with the feed rate, so that the temperature increases. However, the blade speed has the opposite effect. Consequently, the feed rate is the dominant parameter on the wafer dicing process.

論文審定書 i
誌謝 ii
摘要 iii
Abstract iv
目錄 v
圖次 vii
表次 ix
符號說明 x
第一章 緒論 1
1.1 晶圓切割概述 1
1.2 文獻回顧 2
1.3 研究目的 9
1.4 論文架構 9
第二章 理論模型 10
2.1 二維模型 10
2.2 熱傳模型 11
2.3 邊界條件 12
2.4 數值方法 14
2.5 切割力模型 18
2.5.1 切屑生成分力 18
2.5.2 摩擦分力 19
第三章 結果與討論 28
3.1 熱傳模型驗證 28
3.2 工件材料對溫度分布的影響 30
3.3 工件進給速度對溫度分布的影響 31
3.4 工件厚度對溫度分布的影響 31
3.5 使用實驗參數進行溫度模擬 33
3.6 切割力模型驗證 35
第四章 結論與未來展望 63
4.1結論 63
4.2 未來展望 64
參考文獻 65

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