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博碩士論文 etd-0726105-121246 詳細資訊
Title page for etd-0726105-121246
論文名稱
Title
垂直蝕刻鏡面的光波導反射器之模擬設計與研製
Design and fabrication of optical waveguide reflectors with etched vertical mirror surfaces
系所名稱
Department
畢業學年期
Year, semester
語文別
Language
學位類別
Degree
頁數
Number of pages
68
研究生
Author
指導教授
Advisor
召集委員
Convenor
口試委員
Advisory Committee
口試日期
Date of Exam
2005-06-23
繳交日期
Date of Submission
2005-07-26
關鍵字
Keywords
光波導反射器、垂直鏡面
optical waveguide reflector, vertical mirror surface
統計
Statistics
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中文摘要
本論文主旨在藉著垂直蝕刻之鏡面來反射入射至多模干涉耦合器(Multi-Mode interference,MMI)的光模,以藉此來製作光波導反射器。我們利用垂直鏡面之設計,來使一入射至多模干涉耦合器的光模轉彎,並藉由調整多模干涉耦合器之長度,來達到我們要的分光比與最高功率輸出,經由上述之模擬設計,我們便可以用多模干涉耦合器來製作光波導反射器。
材料方面,我們使用1.52µm對稱型結構之砷化鋁鎵銦/砷化鎵銦(InGaAlAs/InGaAs)多重量子井結構的磊晶片。在元件設計方面,我們設計轉彎90°的
Abstract
The purpose of this paper is to fabricate optical waveguide reflectors to reflect the incident optical mode of multi-mode interference coupler by the etched vertical mirror surfaces. We used the design of etched vertical mirror surfaces to bend the incident optical mode, and changed the length of multi-mode interference coupler for the power splitting ratio. By the simulation and design, we could use the multi-mode interference coupler to fabricate optical waveguide reflectors.
A 1.52µm symmetric quantum well InGaAlAs/InGaAs epitaxial wafer is used to fabricate the devices. In the device design, we designed a optical waveguide reflector of two inputs and outputs with 90° angle. We fabricated a Fabry-Perot laser by two optical waveguide reflectors with 90° angle, a 1x2 multi-mode interference coupler and a ring cavity. In addition, we designed optical waveguide reflectors of one input and two inputs, and utilized them to fabricate a Fabry-Perot laser. We also utilized an optical waveguide reflector of one input or two inputs directly to fabricate Fabry-Perot lasers.
In fabrication process, firstly, we etched the waveguide to the depth of about 1.81µm by multi-step wet etching. In order to reduce bending loss, we made deep etching for the outside of curve waveguide. Then, we etched the mirror to the depth of about 6µm by multi-step wet etching to have a greater variation of refractive index to reflect the mode of optical waveguide reflectors. Finally, we used polyimide to flatten the sides of the ridge waveguides and evaporated metal pad over the polyimide.
目次 Table of Contents
目錄

第一章 簡介 1
1-1 前言 1
1-2 應用鏡面反射器製作半導體雷射之特點及其應用 1
1-3 論文架構 2
第二章 多模干涉耦合器之原理與模擬(Multi-Mode Interference) 3
2-1 MMI之原理 3
2-2 MMI之設計與模擬結果 7
第三章 元件與光罩設計 9
3-1 S型波導之簡介 9
3-2 環型共振腔之簡介 11
3-3 垂直鏡面反射器 11
3-3-1 簡介 11
3-3-2 1x1全反射器之模擬結果與比較 13
3-3-3 K=0.85之2x2反射器之模擬結果與比較 15
3-3-4 K=0.5之2x2反射器之模擬結果與比較 17
3-3-5 1x1漸變型全反射器之模擬結果與比較 19
3-3-6 2x2 90度轉彎反射器之模擬結果 22
3-4 光罩之設計 22
第四章 元件製程步驟及製程結果 26
4-1 磊晶片之資料 26
4-2 製程流程圖 29
4-3 製程示意圖 30
4-4 製程步驟及結果 36
第五章 結論 51
參考資料 52
附錄 量測系統架構示意圖 54


圖目錄

第二章 多模干涉耦合器之原理與模擬
圖2-1 模擬10
參考文獻 References
[1] R. van Roijen, E. C. M. Pennings, M. J. N. van Stalen ”Compact InP-Based Ring Lasers Employing Multimode Interference Couplers and Combiners”, Applied Physics Letters, Vol. 64, Issue 14, pp. 1753-1755, 1994.
[2] 王俊鎧,”環形共振腔半導體雷射之研製”,國立中山大學光電工
程研究所,2003年6月。
[3] 張百瑩,”環形共振腔半導體雷射與濾波器之研製”,國立中山大
學光電工程研究所,2004年6月。
[4] Lucas B. Soldano, Erik C. M. Penning, ”Optical Multi-mode Interference Devices Based on self-Imaging Principle and Applications” Journal of Lightwave Technology, Vol. 13, No. 4, pp. 615-627, 1995.
[5] M. Bachmann, P. A. Besse, and H. Melchior, ”Overlapping-image multimode interference coupler with a reduced number of self-images for uniform and nonuniform power splitting” Applied Optics, Vol. 34, No. 30, pp. 6898-6910, 1995.
[6] Meint K. Smit, Erik C. M. Pennings, Hans Blok, ”A Normalized Approach to the Design of Low-Loss Optical Waveguide Bends” Journal of Lightwave Technology, Vol. 11, No. 11, pp. 1737-1742, 1993.
[7]L. H. Splekman, Y. S. Oei, E. G. Metaal, F. H. Groen, P. Demeester, M. K. Smit, ’’Ultrasmall waveguide bends the corner mirrors of the future” IEE Optoelectron, Vol. 142, No. 1, pp. 61-65, 1995.
[8]Vijaya Subramaniam, Gregory N. DeBrabander, David H. Naghski and Joseph T. Boyd ”Measurement of Mode Field Profiles and Bending and Transition Losses in curved Optical Channel Waveguides” Jounal of Lightwave Technology, Vol. 15, NO. 6, pp. 990-997, 1997.
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