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博碩士論文 etd-0727107-160124 詳細資訊
Title page for etd-0727107-160124
論文名稱
Title
利用反射異向性光譜儀分析摩擦聚醯亞胺膜後之異向性
RAS measurements of anisotropy in rubbed polyimide thin film
系所名稱
Department
畢業學年期
Year, semester
語文別
Language
學位類別
Degree
頁數
Number of pages
71
研究生
Author
指導教授
Advisor
召集委員
Convenor
口試委員
Advisory Committee
口試日期
Date of Exam
2007-07-05
繳交日期
Date of Submission
2007-07-27
關鍵字
Keywords
表面能、預傾角、摩擦配向、聚醯亞胺、異向性
anisotropy, RAS, pretilt angle, rubbing strength, surface free energy, polyimide
統計
Statistics
本論文已被瀏覽 5869 次,被下載 3484
The thesis/dissertation has been browsed 5869 times, has been downloaded 3484 times.
中文摘要
摩擦配向在業界已經是個廣泛使用的配向技術,摩擦聚醯亞胺(Polyimide, PI)玻璃基板後所造成的表面異向性(anisotropy)對於液晶配向與灌注均有極大的影響。
分析摩擦後的PI玻璃基板的表面異向性是本篇論文所著重的課題。利用RAS與表面能對於不同摩擦強度進行加工的聚醯亞胺薄膜基板作量測,藉此了解其表面異向性與摩擦強度的關係,希望能夠界定配向的機制。
Reflection Anisotropy Spectroscopy (RAS)在半導體的應用已經行之有年,其在長晶方面的量測應用也十分廣泛。RAS是一種非接觸式,非破壞式的量測方法,能夠量測表面的兩維複數反射率差,其作用只在於表面的異向性結構,故對於表面異向性非常靈敏。
表面能的研究已經是相當成熟,而其強度與其表面原子鍵結強度有關,故利用表面能的分析對於異向性的研究也有很大的幫助。
預傾角對於配向也有很大的關係,基板表面的分子排列與摩擦後的異向性都會影響預傾角。利用預傾角量測系統量測預傾角,並與RAS訊號比較。
當摩擦基板越多次時,RAS訊號越強,而表面能的異向性也上升,在此次使用的PI所製作的液晶盒所量測得到的預傾角也些微上升。
Abstract
Rubbing alignment is widely used in display industry, Rubbing cause anisotropy in rubbed polyimide thin film influence the alignment of Liquid Crystal.
The major part of this article is to analyze surface optical anisotropy of rubbed polyimide thin film. RAS signals and surface free energies of rubbed polyimide thin film with different rubbing strength are measured, and relationship between anisotropy of surface and rubbing strength is discussed. The mechanism of alignment can be understood by this work.
Reflection Anisotropy Spectroscopy (RAS) has been used in Semiconductor as a tool to monitor crystal growth for many years. RAS is a non-contact and non-destructive measurement method. It only measures the difference of two orthogonal complex reflection signals and optical anisotropy of surface. It’s very sensitive to the anisotropy of surface. In the current studies, RAS has been used to detect surface anisotropy of rubbed polymer.
We measured the surface free energy of the rubbed polyimide thin films. It has been found that surface free energy is of anisotropy due to the application of mechanical rubbing to the polymer surface.
Pretilt angle influences the alignment of liquid crystals. The molecule orientation of PI surface and anisotropy of rubbed PI surface effect pretilt angle。Pretilt angles measured by pretilt angle measurement system compare with RAS signals.
RAS signals, anisotropy of surface free energies, and pretilt angles are increasing with increasing rubbing strength.
目次 Table of Contents
英文摘要 Ⅰ
中文摘要 Ⅲ
誌謝 Ⅶ
目錄 Ⅳ
圖目錄 Ⅷ
表目錄 Ⅸ
第一章、緒論 1
1-1液晶簡介 2
1-1-1簡述液晶 2
1-1-2 液晶種類與液晶相 2
1-2 液晶物理與光學特性 5
1-2-1 液晶分子指向秩序參量(Orientation Order Parameter) 5
1-2-2 介電常數(dielectric constant) 5
1-2-3 彈性係數(Elastic constant) 6
1-2-4 折射率(Refractive index) 7
1-3 定向摩擦配向 8
第二章、RAS實驗架構與原理探討 10
2-1 RAS實驗儀器 10
2-1-1 氙燈(Xe Lamp) 10
2-1-2 單色儀(Monochromator) 10
2-1-3 光彈調變器(Photoelastic Modulator,PEM) 10
2-1-4 光電偵測器(Photodetector) 11
2-1-5 SCU(Signal Conditioning Unit) 12
2-1-6 鎖相放大器(Lock-in Amplifier) 12
2-2 RAS實驗架構與建立 14
2-2-1 RAS實驗架構 14
2-2-2 RAS實驗建立 15
2-3 RAS原理探討 17
第三章、測量儀器理論與架構 21
3-1 表面能系統架構與原理探討 21
3-1-1 表面能系統架構 21
3-1-2 表面能原理探討 22
3-2 預傾角架構與原理探討 25
3-2-1預傾角量測系統架構 25
3-2-2預傾角原理探討 25
第四章、光學量測樣品製作流程與方法 29
4-1 PI配向膜製備 29
4-2製作不同摩擦強度之基板 30
4-3 液晶cell封裝與液晶灌注 31
4-4偏光顯微鏡 31
第五章、實驗結果與討論 33
5-1 RAS Signal 與摩擦強度的關係 36
5-2 Surface Free Energy 與摩擦強度的關係 42
5-3 預傾角量測結果 43
5-4 綜合比較 45
第六章、總結與未來工作 46
參考文獻 48
附錄 52
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