本論文主要是描述一種應用於一維光纖陣列的新式主動式對準技術，其優點在於結構簡單、適用於矽模組光電元件上、可單獨微調每根光纖與雷射位置上的相對誤差。此主動式對準技術主要依據Chen C. W.[20]使用電極接高電壓產生的電場靜電力，調整點膠透鏡形狀所延伸出新的對準方式。利用高電壓產生的靜電力，用以拉動所欲固定光纖與光纖陣列套管中的黏膠表面，再藉由黏膠和光纖表面接觸的附著力來帶動光纖移動調整光纖的位置。文中將會探討此方法微調光纖位移的能力與黏膠黏度、表面點膠體積、電壓的關係，並做黏膠固化後偏移量的補償，使光纖陣列上的每根光纖達到最佳耦光位置。利用電場靜電力吸引表面黏膠帶動光纖位移的調整方式，可以快速調整陣列上每根光纖與雷射間之相對誤差且重現性高，可微調的最小精度為0.5μm；固化後可控制調整完的光纖位移誤差在±0.4μm內，此一陣列光纖模組的主動式對準技術，可單獨調整每根光纖與雷射的相對誤差，並且固定方式採用黏膠可適用於矽模組光電元件上，再利用微機電相關的製程技術製作陣列模組便可以大量生產，降低成本具工業上應用之價值。

This paper presents a novel active-alignment technique to fabricate one-dimensional optical fiber array. The advantages of this technique are providing simple structure on silicon- based optoelctronic device and individually adjusting relative position error of fiber array and laser diode array. The way to adjust fiber displacement is applying electric force to pull the adhesive which used to fix fibers and microholders. Then the adhesive has adhesive force with fiber surface that bring fiber moving away from its original position. The method has to consider some issues including choosing the adhesive viscosity, controlling adhesive volume in the microholder, confirming adjusting precision of fiber displacement, compensating the fiber Offset after curing. So we can obtain the minimum adjusting precision 0.5μm and control the fiber traveling distance at ±0.4μm. The way to improve those issues of adjusting the fiber array to achieve the best coupling position is described in this paper.

目錄
謝誌................................................................................1
目錄................................................................................2
圖目錄............................................................................4
表目錄............................................................................7
摘要................................................................................8
英文摘要........................................................................9
第一章 序論 ................................................................10
1.1光纖陣列模組介紹................................................10
1.2對準技術介紹........................................................12
1.3主動與被動式對準的優缺點................................14
1.4研究動機................................................................15
1.5研究目的................................................................16
第二章 文獻回顧.........................................................17
2.1主動式對準技術....................................................17
2.1.1雷射銲接.............................................................17
2.1.2錫銲固定.............................................................19
2.1.3黏膠固定.............................................................20
2.2靜電力調整光纖位移的機制................................24
2.3用於矽模組上的黏膠比較....................................26
第三章研究方法..........................................................28
3.1分析光纖對準的架構與材料的選擇....................28
3.1.1光纖對準的架構與測試流程.............................28
3.1.2黏膠分析與點膠重現性控制.............................30
3.1.3測試微調光纖位移的能力.................................34
3.1.4角度容忍度探討.................................................37
3.2 設計陣列光纖對準的架構...................................38
第四章 實驗與結果.....................................................43
4.1實驗設備配置........................................................43
4.2實驗結果................................................................46
4.2.1量測電壓的變化與位移的關係.........................47
4.2.2固化後偏移量的量測與補償.............................55
第五章結論與未來發展..............................................62
5.1結論........................................................................62
5.2未來發展方向........................................................62
參考文獻......................................................................64
圖目錄
圖1.1 陣列光纖模組示意圖................................................12
圖1.2 被動式對準(單根光纖).............................................13
圖1.3 被動式對準(陣列光纖).............................................13
圖1.4 主動式對準(單根光纖).............................................14
圖1.5 主動式對準(陣列光纖).............................................14
圖2.1 Butterfly模組構裝圖.................................................18
圖2.2雷射銲點與雷射補銲.................................................18
圖2.3 陣列光纖結構與經過雷射銲鎚調整後的數據........19
圖2.4 DIP雷射模組示意圖與內部結構.............................20
圖2.5 雷射模組的剖面圖及耦合率量測結果....................20
圖2.6 調整架構及不同夾持距離電壓與位移關係圖........21
圖2.7 可主動調整的1×8光纖陣列.....................................22
圖2.8 光纖陣列與光波導對準架構....................................22
圖2.9 陣列模組的結構與耦合率量測圖............................22
圖2.10電吸引法製作微透鏡示意圖..................................24
圖2.11電吸引法微透鏡成形圖..........................................25
圖2.12 調整光纖位移示意圖.............................................25
圖3.1光纖套管外觀與相關尺寸.........................................29
圖3.2 光纖對準的架構........................................................30
圖3.3 (9)號UV膠加電壓前與加電壓後的測試結果.........31
圖3.4 電壓2000(volts)熱固膠固化前、後的關係圖.......32
圖3.5 電壓1500(volts)UV膠固化前、後關係圖..............32
圖3.6-1 定壓定時噴出的黏膠體積....................................34
圖3.6-2 殘留的黏膠體積....................................................34
圖3.7 控制表面點膠體積的示意圖....................................34
圖3.8 電壓與位移的關係圖................................................36
圖3.9 光纖彎曲示意圖........................................................38
圖3.10兩調整槽間電極正反面及尺寸示意圖..................40
圖3.11 設計的組件及組裝的流程.....................................41
圖4.1儀器設備配置（1）..................................................43
圖4.2儀器設備配置（2）..................................................44
圖4.3鏡頭取像比較圖.........................................................45
圖4.4 +X單方向電壓與X方向的位移關係圖.....................48
圖4.5 +Y單方向電壓與Y方向的位移關係圖.....................50
圖4.6 +X、+Y雙方向電壓與X方向的位移關係圖............51
圖4.7 +X、+Y雙方向電壓與Y方向的位移關係圖............53
圖4.8 比較測試架構與陣列上電壓與光纖位移關係圖....54
圖4.9 未加電壓時X、Y方向固化後偏移量.......................56
圖4.10 單軸加電壓X、Y方向固化後偏移量.....................57
圖4.11 雙軸加電壓X、Y方向固化後偏移量.....................58
圖4.12 光纖位移與電壓之關係圖.....................................59
圖4.13 固化後偏移量與電壓之關係圖.............................60
圖4.14 固化後位移與電壓之關係圖.................................60
圖5.1 光電轉換器內部結構................................................63
圖5.2 光能調節器內部結構................................................63
表目錄
表1.1 主動式對準與被動式對準的優缺點........................14
表2.1 三種常用於光電模組的固定技術比較....................23
表2.2 熱固膠與光固膠的特性比較....................................26
表3.1 黏膠黏度適用性比較................................................31
表3.2 測試電壓與位移的關係............................................35
表4.1 給予+X單方向電壓時X方向的位移量.....................47
表4.2 給予+Y單方向電壓時Y方向的位移量.....................49
表4.3 給予+X、+Y雙方向電壓時X方向的位移量............50
表4.4 給予+X、+Y雙方向電壓時Y方向的位移量............52
表4.5 未加電壓時X、Y方向固化後偏移量.......................55
表4.6 單軸加電壓X、Y方向的光纖位移、固化後位移及偏移量..56
表4.7 雙軸加電壓X、Y方向的光纖位移、固化後位移及偏移量..57

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