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博碩士論文 etd-0728109-191606 詳細資訊
Title page for etd-0728109-191606
論文名稱
Title
成長於矽(111)基板的GaN表面薄膜缺陷結構之電性特徵
Electronic characteristics of defects of GaN films grown on Si(111) substrate
系所名稱
Department
畢業學年期
Year, semester
語文別
Language
學位類別
Degree
頁數
Number of pages
41
研究生
Author
指導教授
Advisor
召集委員
Convenor
口試委員
Advisory Committee
口試日期
Date of Exam
2009-07-27
繳交日期
Date of Submission
2009-07-28
關鍵字
Keywords
缺陷、差排
dislocation, defect
統計
Statistics
本論文已被瀏覽 5629 次,被下載 4258
The thesis/dissertation has been browsed 5629 times, has been downloaded 4258 times.
中文摘要
利用STM,本研究工作探討,由於晶格不匹配導致在矽(111)上成長氮化鎵的薄膜之缺陷的相關形貌及電性產生,因而對表面的電性之影響。在本研究中,氮化鎵薄膜中的刃差排(Edge dislocation)和螺旋差排(Screw dislocation) 可以成功地從STM形貌圖上被觀察到。同時,利用STM發現在有缺陷的區域能隙比沒有缺陷區域的能隙小,區域能態密度(LOCAL DENSITY OF STATES) 也會因為缺陷的存在而有所改變。將缺陷視為一散射中心(scattering senter),從STM的電流對偏壓的微分(dI/dV) 與量測距離之關係,缺陷所能影響的特徵散射長度(characteristic scattering length)即可得。
Abstract
The electronic properties of the defects of the GaN/Si(111) system has been successfully measured by STM in the work. Different types of the dislocations in GaN films, such as edge dislocations and screw dislocations, have been observed. Defects induce the change of the band gap from 3.4 eV to 2.2 eV. The characteristic scattering length of the edge dislocation is around 25 nm.
目次 Table of Contents
致謝.....................................................i
中文摘要.................................................ii
英文摘要.................................................iii
目錄.....................................................iv
圖片索引.................................................v
第一章:緒論.............................................1
第二章:實驗原理.........................................3
2.1 量子穿隧效應.......................................3
2.2 區域能態密度(Local density of state,
LODS) .............4
2.3 掃描模式...........................................5
第三章:實驗儀器與步驟...................................10
3.1 儀器介紹...........................................10
3.2 超高真空系統.......................................11
3.3 STM掃描系統.......................................15
3.4 樣品製備...........................................19
第四章:實驗結果與討論...................................20
4.1 樣品資訊...........................................22
4.2 差排...............................................23
4.3 氮化鎵能隙 ........................................25
4.4 散射中心(scattering center)............................28
第五章:結論.............................................31
參考文獻.................................................32
參考文獻 References
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