類鑽碳 (diamond-like carbon - DLC)薄膜具有高硬度、低摩擦係數、抗化學腐蝕、高熱傳導性、高電阻及穿透特性等特性。在電子、光學、耐熱、耐磨耗與生醫材料等各界是一項重要的材料。此次研究於使用電沉積(electrodeposition)的方法來製程DLC薄膜，並致力研究低電位低濃度且大面積的方向，調配不同電壓、電解液、基板、間距和溫度等實驗參數，來探討不同因素下類鑽碳的特性與結構，以達到各種需求下的最佳化研究。
本文在ITO基板沉積類鑽碳薄膜，利用電化學沉積法在50V至250V的低壓下、以及低溫35℃至50℃下進行薄膜沉積，電解液為低濃度0.2%至3.2% 混合乙腈和去離子水的乙腈水溶液。改變不同的沉積參數包括工作電壓、沉積溫度以及電解液濃度，探討類鑽碳薄膜的特性與結構。
在成膜過程的研究上，利用沉積過程中的電流時間曲線觀察其成膜變化；在表面結構的研究上，使用SEM觀察不同條件下的表面形狀；在光學研究上，使用薄膜特性分析儀(N & K analyzer)進行穿透率、折射率以及光能隙的分析；最後利用傅立葉轉換紅外光譜儀(FTIR )和X光光電子能譜(XPS) ，探討不同實驗條件下薄膜內部的結構變化。
實驗結果顯示，隨著實驗條件電壓、濃度、溫度的增加，薄膜的成長速率也隨之增加，薄膜變得更厚且表面組成隨著實驗參數不同而變化，薄膜的表面產生淡黃棕色，使得折射率增加、穿透率下降、光能隙變小，C-H鍵含量減少而C-N鍵的含量增加。
總合以上的實驗結果，本文研究的類鑽碳薄膜發現比較適合在矽基板上作為太陽能電池抗反射層或保護層。薄膜中含有入少許氮原子，增加薄膜附著力以及薄膜的摩擦力等特性，可應用於機械工業方面以及太陽電池的空窗層。雖然只摻入少量的氮，限制了薄膜被應用的層面，然而未來類鑽碳薄膜在太陽能電池的應用上依舊擁有高度潛力。

Diamond-like carbon (DLC) film exhibits an extreme hardness, low friction coefficient, chemical stability, heat conductivity, high resistance, and high optical transparency. There properties lead to remarkable applications such as protective and anti-reflection coating, wear resistant overcoat and biocompatible coatings. In this study, Diamond-like carbon films were deposited by electrodepsoition technique, and the deposition parameters include DC potential, deposited temperature, the concentration of electrolyte were varied to study the characteristics, microstructure and the composition of DLC film. In addition, the optimizing deposition was revealed and discussed in detail.
The Diamond-like carbon film were deposited by electrodepsoition technique onto the ITO glass substrates, and the deposition conditions were preset in the range as the applied voltage from 50V and 250V, low deposition temperature within 35℃to 50℃ and a mixture of acetonitrile and deionized water with the concentrations of acetonitrile between 0.2% and 3.2%.
Scanning electron microscopy can make an insight into the surface morphology also to reveal the uniformity of the DLC films. For the I-t curves of DLC film growth, it can be used to study of the growth mechanism by correlation the surface morphology observed by Scanning electron microscopy (SEM). The transmission, refraction index and optical band gap of DLC film was measured by the N &K analyzer. Finally, the hydrogen content, composition and microstructure of DLC films were characterized by the FTIR and XPS analyze
In experimental work, the properties of DLC film obtained depends on a verity of growth parameters such as applied voltage, the concentration of electrolyte and deposition temperature. With the increase of the applied voltage, it increases with the growth rate of deposited films. That was also observed in the increase of concentration and temperature. As increase the film’s thickness, the film surface becomes to the light yellow brown color, and which also causes to increase the refractive index, decrease the transmission rate, reduce the optical band gap, and decrease the amount of C-H bond and the C-N bond increase simultaneously.
According to above results, DLC film deposited using the electrolyte of acetonitrile was more suitable used for coating on Si –based optoelectronic devices such as solar cell to be a protective layer and/or anti-reflection layer.
Additionally, for the nitrogen doing in DLC film, it can increase the adhesion and the friction of film to utilize for mechanic industry and to develop as the window layer of solar cells. Although there are few N-content incorporated in the DLC film, and that limits its applications. However, it still has a high potential used for solar cells and leads to advanced study in the future.

致謝 ................................................................................... Ⅰ
摘要 ................................................................................... Ⅱ
Abstract ............................................................................ Ⅲ
目錄 ................................................................................... Ⅳ
圖目錄 ............................................................................... Ⅶ
表目錄 ............................................................................ ⅩⅣ
第一章 緒論 ....................................................................... 1
1-1前言 .............................................................................. 1
1-2研究目的 ...................................................................... 2
1-3論文架構 ...................................................................... 3
第二章 理論基礎 ............................................................... 4
2-1 DLC文獻回顧 ............................................................. 4
2-1-1 DLC的由來 ............................................................. 4
2-1-2 DLC的成膜方法 ..................................................... 4
2-2 DLC的理論 ................................................................. 5
2-2-1 DLC的結構和種類 ................................................. 5
2-2-2 DLC的成長機制 ..................................................... 8
2-2-3 DLC的特性與應用 ............................................... 11
2-3 電化學理論與方法 ................................................... 12
2-3-1電化學起源 ............................................................ 12
2-3-2電化學理論 ............................................................ 13
2-3-3電化學沉積法(電沉積) .......................................... 14
第三章 實驗方法與儀器設備 ......................................... 16
3-1 實驗流程 ................................................................... 16
3-2實驗材料與儀器設備 ................................................ 17
3-2-1 實驗材料 ............................................................... 17
3-2-2 儀器設備 ............................................................... 17
3-3實驗操作步驟 ............................................................ 18
3-3-1 基板前置處理 ....................................................... 18
3-3-2實驗步驟 ................................................................ 19
3-4 量測儀器與其原理 ................................................... 23
3-4-1 掃描式電子顯微鏡 ............................................... 23
3-4-2 Ｘ光光電子能譜儀 ............................................... 24
3-4-3 傅立葉轉換紅外光譜儀 ....................................... 25
3-4-4 薄膜特性分析儀 ................................................... 26
第四章 結果與討論 ......................................................... 31
4-1 DLC薄膜的特性分析................................................ 31
4-1-1電壓之影響 ............................................................ 31
4-1-2溫度之影響 ............................................................ 34
4-1-3電解液濃度之影響 ................................................ 35
4-1-4活化能比較 ............................................................ 36
4-2表面結構分析 ............................................................ 38
4-2-1工作電壓之影響 .................................................... 38
4-2-2溫度之影響 ............................................................ 39
4-2-3濃度之影響 ............................................................ 39
4-3 光學特性分析 ........................................................... 40
4-3-1穿透率 .................................................................... 40
4-3-2折射率 .................................................................... 42
4-3-3光能隙 .................................................................... 43
4-3-4太陽能抗反射層應用 ............................................ 45
4-4薄膜成份分析 ............................................................ 47
4-4-1 FTIR分析 ............................................................... 47
4-4-2 XPS分析 ................................................................ 48
4-5化學機制探討 ............................................................ 49
第五章 總結 ..................................................................... 51
參考文獻 ........................................................................ 131

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