在本研究論文中，我們以水溶液法(ASD)在參鋁的氧化鋅(AZO)/玻璃基板上備製氧化鋅(ZnO)奈米針。在超過六小時的成長後，在氧化鋅奈米針的下方發現類薄膜層。為了研究最長氧化鋅奈米針的長度的光響應而不考慮類薄膜層的影響，我們選擇六小時來成長氧化鋅奈米針，所成長的高度大約為4 μm。在氧化鋅奈米針上使用銦-鋅的指插式所製成的陽極與陰極來製作氧化鋅奈米針紫外線感測器。在濺鍍AZO時間為300秒時可以得到較佳光響應，原因為它具有較大的表面積對體積比。我們得到電流比值為10.9、上升時間為280秒以及下降時間為870秒。經由氮氣、氧氣以及笑氣退火一小時在300 oC中可以改善其光響應，原因在於在氧化鋅奈米針內的Zn(OH)2轉換成氧化鋅。在退火氣體中，由於笑氣的氧原子高分解率可以填補氧空缺使其有最佳的表現。其電流比值為26.04、上升時間為50秒以及下降時間為70秒。

In this study, we prepare the zinc oxide nanotip with aqueous solution on Al doped ZnO/glass substrate. In excess of 6 hours growth, the film-liked layer is obtained in the bottom of ZnO nanotip. In order to study the photoresponse of maximum ZnO nanotip length without film-like layer, we choose 6 hours as the growth time of ZnO nanotip, which the height is almost the same of about 4 μm. For the fabrication of ZnO nanotip UV photodetector, In-Zn was use as anode and cathode electrodes in digitate type on the top of ZnO nanotip array. The photoresponse which use AZO buffer layer of 300 s is better than others due to the larger surface to volume ratio. We obtain that Ron/off is 10.9, rise time is 280 s, and decay time is 870 s. The thermal annealing at 300 °C in N2, O2, and N2O for 1 hr can improve the photoresponse, because the Zn(OH)2 in the ZnO nanotip gets converted into ZnO. Among annealing ambiences, the annealed ZnO nanotip in N2O show higher performance due to high decomposition of O atoms, which fills in the oxygen vacancy. We obtained that Ron/off is 26.04, rise time is 50 s, and decay time is 70 s at 300 oC in N2O.

Chapter 1 ...................................................................................................1
Introduction........................................................................................1
1.1 Properties ZnO One-dimensional Nano-structures........1
1.2 ZnO Film Ultraviolet Photodetectors ..............................2
1.3 ZnO Nanotip Ultraviolet Photodetector ..........................3
1.4 Growth Methods for ZnO Nanotip ..................................4
1.5 Advantages of Aqueous Solution Deposition (ASD) .......5
1.6 Motivation...........................................................................6
References ..................................................................................11
Chapter 2 .................................................................................................16
Experiments......................................................................................16
2.1 Glass Substrate Preparation ...........................................16
2.1.1 AZO RF Sputtering ......................................................16
2.2 ZnO Nanotip Growth Procedures by Aqueous Solution
Deposition...................................................................................17
2.3 Precursors of ASD-ZnO nanotip growth .......................18
2.4 Structure of ZnO Nanotip Ultraviolet Photodetector...19
2.5 Characterization...............................................................20
2.5.1 Physical properties of ZnO Nanotip.....................20
2.5.2 Chemical property of ZnO Nanotip .....................21
2.5.3 Optical Property of ZnO Nanotip ........................21
2.5.4 Electrical properties of ZnO Nanotip UV Photodetector.................................................................22
References ...................................................................................30
Chapter 3 .................................................................................................31
Results and Discussion.....................................................................31
3.1 Physical Properties of ZnO Nanotip ..............................31
3.1.1 Growth Rate of ZnO Nanotip in Deposition
Solution................................................................................31
3.1.2 Top View and Cross-section of ZnO Nanotip on
AZO/Glass...........................................................................31
3.2 XRD Analysis of ZnO Nanotip .......................................32
3.3 Chemical Properties of ZnO Nanotip ............................32
3.4 Optical Properties of ZnO Nanotip................................33
3.5 Electrical Properties of ZnO Nanotip Ultraviolet
Photodetector.............................................................................33
3.5.1 Photoresponse as a function of Sputtering-AZO
Time.....................................................................................34
3.4.2 Photoresponse as a Function of Thermal
Annealing ............................................................................35
References .........................................................................................62
Chapter 4 .................................................................................................63
Conclusions.......................................................................................63

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