本論文利用軟微影法製作可熱調控波長之分佈式回饋雷射。利用全像干涉法於光阻層上製作次微米等級之光柵結構，接著經由軟性材料聚二甲基矽氧烷(PDMS)複製，將週期360nm的光柵結構轉移至可光聚合薄膜上並形成波導批覆層。本實驗利用雷射染料摻雜向列型液晶做為分佈式回饋雷射中之主動波導層，並藉由溫度控制液晶折射率變化，進而達成調控雷射輸出波長之目的。實驗結果顯示，在逐步升溫的過程中，二階雷射波長由原本的625.1nm藍移至606.35nm。

This study demonstrates a thermally tunable distributed feedback (DFB) laser fabricated by soft lithography method. The sub-micronmeter grating was patterned onto photoresist layer by using the holographic method. In this study, the grating pattern with period of 360nm was transfer to cladding layer of the laser device via the soft stamp Polydimethylsiloxane (PDMS). The nematic liquid crystal (NLC) was adopted as a guiding layer and the refractive index can be tuned by thermal source. By increasing the temperature of the NLC guiding layer, the wavelength of the second order DFB laser was shifted from 625.1 nm to 606.35 nm.

論文審定書 i
致　　謝 ii
摘　　要 iii
Abstract iv
圖　　次 ix
表　　次 xvi
第一章　緒論 1
第二章　簡介 2
2.1 分佈式回饋雷射簡介 2
2.2 液晶介紹 4
2.1.1 液晶發現 [20, 21] 4
2.1.2 液晶分類 [21] 5
2.3 液晶物理 8
2.2.1 液晶分子秩序參數 8
2.2.2 液晶分子介電常數 9
2.2.3 液晶分子折射異向性與雙折射性 10
2.2.4 液晶的彈性係數 12
2.2.5 液晶折射率與溫度關係 13
第三章　分佈式回饋雷射相關理論 15
3.1 雷射機制 15
3.2 分佈式回饋雷射機制 18
3.3 相關理論 19
3.3.1 Bragg繞射(Bragg Scattering) 19
3.3.2 繞射光柵( Diffraction Grating ) 20
3.3.3 耦合波理論( Coupling Wave Theory ) 21
3.3.4 波導理論( Waveguide Theory ) [25] 23
第四章　儀器製作與實驗架設 28
4.1 材料介紹 28
4.1.1 液晶材料 HTW114200 28
4.1.2 液晶材料 E7 29
4.1.3 光阻劑 29
4.1.4 雷射染料 DCM 30
4.1.5 聚二甲基矽氧烷( Polydimethylsiloxane, PDMS ) 31
4.1.6 NOA81薄膜 32
4.2 樣品製作 33
4.2.1 清洗ITO玻璃 33
4.2.2 清洗矽基板 33
4.2.3 光學微影製作微結構之步驟 33
4.2.4 PDMS製作 34
4.2.5 NOA81翻模 35
4.2.6 樣品組裝 35
4.3 量測系統與原理介紹 36
4.3.1 掃描式電子顯微鏡( Scanning Electron Microscope, SEM ) 36
4.3.2 原子力顯微鏡( Atomic Force Microscope, AFM ) 37
4.3.3 三為輪廓儀( 3D alpha-Step Profilometer ) 38
4.4 實驗光路架設 38
第五章　實驗結果與討論 40
5.1 模仁脫模效果探討 40
5.2 NOA81薄膜摻雜雷射染料DCM之DFB雷射研究 44
5.2.1 DFB雷射輸出特性 44
5.2.2 DFB雷射輸出的偏振性 48
5.3 雷射染料DCM摻雜液晶薄膜之DFB雷射研究 49
5.3.1 液晶材料 - HTW114200 49
5.3.2 液晶材料 - E7 63
第六章 總結與未來展望 76
6.1 總結 76
6.2 未來展望 77
參 考 文 獻 78

[1] H. Kogelnik, C. V. Shank, "STIMULATED EMISSION IN A PERIODIC STRUCTURE," Appl. Phys. Lett., 18 (1971).
[2] Dario Pisignano, Luana Persano, Paolo Visconti, Roberto Cingolani, and Giuseppe Gigli, "Oligomer-based organic distributed feedback lasers by room-temperature nanoimprint lithography," Appl. Phys. Lett., 83, 13 (2003)
[3] Askin Kocabas, Atilla Aydinli, "Polymeric wavelength Bragg grating filter using soft lithography," Optics Express, 14, 22 (2006)
[4] Lujian Chen, Fengyu Gao, Chun Liu, Qiong Zhou, Sensen Li, Yikun Bu, and Zhiping Cai, "Distributed feedback leaky laser emission from by dye doped gel-glass dispersed liquid crystal thin film patterned by soft lithography," Optical Material, 34, 1 (2011)
[5] Tatsunosuke Matsui, Masanori Ozaki, and Katsumi Yoshino, "Electro-tunable lasers action in a dye-doped nematic liquid crystal wavelength under holographic excitation," Appl. Phys. Lett., 83, 3 (2003)
[6] Ryotaro Ozaki, Toshikazu Shinpo, Katsumi Yoshino, Masanori Ozaki, and Hiroshi Moritake, "Tunable Liquid Crystal Laser Using Distributed Feedback Cavity Fabricated by Nanoimprint Lithography," Applied Physics Express, 1, 1 (2008)
[7] Sonke Klinkhammer, Nico Heussner, Klaus Huska, Tobias Bocksrocker, Felix Geislhoringer, Christoph Vannahme, Timo Mappes, and Uli Lemmer, "Voltage-controlled tuning of an organic semiconductor distributed feedback laser using liquid crystal," Appl. Phys. Lett., 99, 2 (2011)
[8] Sebastian Doring, Matthias Kollosche, Torsten Rabe, Joachim Stumpe, and Guggi Kofod, "Electrically Tunable Polymer DFB Laser," Advanced Materials, 23, 37 (2011)
[9] Takashi Ubulata, Takashi Isoshima, and Masahiko Hara, "Wavelength-Programmable Organic Distributed-Feedback Laser Bsaed on a Photoassisted Polymer-Migration System," Advanced Materials, 17, 13 (2005)
[10] Zhenyu Li, Zhaoyu Zhang, Axel Scherer, and Demetri Psaltis, "Mechanically tunable optofluidic distributed feedback dye laser," Optics Express, 14, 22, (2006)
[11] Bernard Wenger, Nicolas Tetreault, Mark E. welland, and Richard H. Friend, "Mechanically tunable conjugated polymer distributed feedbacl lasers," Appl. Phys. Lett., 97, 19 (2010)
[12] H. Ghafouri-Shiraz, "Distributed Feedback Laser Diodes and Optical Tunable Filters," pp. 51-56.
[13] Yan Chen, Zhenyu Li, M. David Henry, and Axel Scheer, "Optofluidic circular grating distributed feedback dye laser," Appl. Phys. Lett., 95, 3 (2009)
[14] Naoto Tsutsumi and Takashi Ishibashi, "Organic dye lasers with distributed Bragg reflector grating and distributed feedback resonator," Optics Express, 17, 24 (2009)
[15] Xiao-lei Zhu and Dennis Lo, "Sol-gel glass distributed feedback waveguide laser," Appl. Phys. Lett., 80, 6 (2002)
[16] Zhihui Diao, Shupeng Deng, Wenbin Huang, Li Xuan, Lifa Hu, Yonggang Liu and Ji Ma, "Organic dual-wavelength distributed feedback laser empowered by dye-doped holography," J. Mater. Chem., 22, 44 (2012)
[17] Yuji Oki, Takeshi Yoshiura, Yuichi Chisaki, and Mitsuo Maeda, "Fabrication of a distributed-feedback dye laser with a grating structure in its plastic wavwguide," Applied Optics, 41, 24 (2002)
[18] Licinio Rocha, Vincent Dumarcher, Christine Denis, Paul Raimond, Celine Fiorini, and Jean-Michel Nunzi, "Laser emission in periodically modulated polymer films," Journal of Applied Physics, 89, 5 (2001)
[19] Tatsunosuke Matsui, Masanori Ozaki, and Katsumi Yoshino, "Electro-tunable laser action in a dye-doped nematic liquid crystal waveguide under holographic excitation," Appl. Phys. Lett., 83, 3 (2003)
[20] 謝毓章, 凝聚態物理學叢書 液晶物理學.
[21] 松本正一, 角田市良, 液晶之基礎與應用, 劉瑞祥, 編者, 國立編譯館 (1998)
[22] 楊國輝、黃宏彥, 雷射原理與量測概論, 五南出版社 (2008)
[23] H. Kogelnik and C. V. Shank, "Coupled-Wave Theory of Distributed Feedback Lasers," J. Appl. Phys., 43, 5 (1972)
[24] WILLAM STREIFER, DONALD R. SCIFRES, and ROBERT D. BURNHAM, "Coupling Coefficients of Distributed Feedback Single-and Double-Heterostructure Diode Lasers," IEEE Journal of Quantum Electronics, QE-11, 11 (1975)
[25] K. A. Winick, "Effective-index method and coupled-mode theory for almost-periodic waveguide gratings:a comparison," Applied Optics, 31, 6 (1992)
[26] "http://www.norlandprod.com/adhesives/noa 81.html," [線上].
[27] M. Ellman, A. Rodriguez, N. Perez , M. Echeverria, Y.K. Verevkin, C.S. Peng, T. Berthou, Z. Wang, S.M. Olaizola, and I. Ayerdi, "High-power laser interference lithoraphy process on photoresist: Effect of laser fluence and polarisation," Applied Surface Science, 255 (2009)
[28] D. W. Berreman, "Solid Surface Shap and the Alignment of an Adjacent Nematic Liquid Crystal," Phys. Rev. Lett., 28, 26 (1972)