利用微機電製程技術，設計製作微加熱器及微溫度感測器於微渠道上，用以量測微渠道之熱場變化。微渠道製作係以LIGA-like製程技術中的準分子微影製程於高分子材料聚甲基丙烯酸甲酯(PMMA)上，光刻出長20 mm、寬200μm、深為100μm之微渠道。微加熱器、微溫度感測器則是採用「白金薄膜」做為之材料，透過物理薄膜沉積(PVD)之製程，將元件製作於玻璃晶片上。最後以光阻膠將兩者進行裝封，並進行測試。

實驗結果發現，以微加熱器及微溫度感測器之形狀，採用lift-off製程技術，效果不佳，易造成金屬線旁破裂；而改溼式蝕刻，則無此現象。初步測試微溫度感測器，其電阻值與溫度關係成一線性正比關係，可實際運用於未來微渠道熱場量測。

Micro-channels are very important in bio-medical and cooler research. Although many research have been conducted with micro-channels, few results have been contributed to discuss the properties of fluids inside a micro-channel. For example, the thermal distribution of the fluid in a micro-channel is only simulated with numerical analysis approach. In our research, we aim to design a device that can measure real thermal data within a micro-channel. We first applied excimer laser lithography on a PMMA substrate to fabricate a micro-channel with 20 mm length, 200μm width and 200μm depth. Micro-heater and micro-thermal sensor is than fabricated by sputtering pt thin-thim with PVD process on a glass substrate. Finally, these devices were assembled with UV-curing and than applied for further testing.
According to our experiment, lift-off process cannot be easily applied to fabricate micro-heater and micro-thermal sensor since the architecture of these devices were fragile in metal line sidewalls. Wet-lithography is than used to conquer this problem. Our primary test on this micro-thermal sensor shows that its resistance varies with thermal changes. Such mechanism can be applied to measuring thermal field in a micro-channel.

總目錄 i
圖目錄 iii
表目錄 v
中文摘要 vi
英文摘要 ……………vii

第一章 緒論 1
1-1 前言 1
1-2 背景與目的 2
1-3 文獻回顧 3

第二章 理論基礎及元件設計 5
2-1 微溫度感測器及微加熱器之基礎原理 5
2-1-1 溫度感測原理 6
2-1-2 微加熱原理 10
2-2 元件設計 11
2-2-1 微溫度感測元件設計 11
2-2-2 微加熱器元件設計 13
2-2-3 微渠道之設計 14

第三章 實驗設備 19
3-1 實驗材料 19
3-2 製程設備 21
3-2-1 黃光微影製程設備 21
3-2-2 化學製程設備 21

第四章 元件製程規劃 27
4-1 微渠道製作流程 27
4-2 微加熱器及微溫度感測器之製作流程 30
4-3 封裝製程 33

第五章 實驗結果與討論 34
5-1 製程問題及決解方法 34
5-1-1 lift-off製程問題 34
5-1-2 微加熱器問題 38
5-1-3 平坦化問題 38
5-2 實驗結果與元件測試 40
5-2-1 實驗結果 40
5-2-2 元件測試 42

第六章 結論與建議 44
6-1 結論 44
6-2 建議與改進 45

參考文獻 47



圖 目 錄
頁次
圖2.1 一般溫度感測器之分類 5
圖2.2 熱電堆溫度感測器之構造圖 7
圖2.3 電流型感測電壓降之電路圖 8
圖2.4 薄膜形成的分類 11
圖2.5 微溫度感測器之設計圖 12
圖2.6 微加熱元件之設計圖 14
圖2.7 微渠道之完成示意圖 15
圖2.8 微加熱器及微溫度感測器位置配置圖 16
圖2.9 第一道光罩設計圖 17
圖2.10 第二道光罩設計圖 18
圖3.1 光阻旋塗機 21
圖3.2 曝光機 22
圖3.3 超音波振盪器 23
圖3.4 高真空濺鍍機 24
圖3.5 金屬蒸鍍機 25
圖4.1 微渠道製作流程圖 29
圖4.2 微加熱器及微溫度感測器之製作流程圖 32
圖5.1 lift-off製程元件圖：(a) 微加熱器；(b) 微溫度感測器 36
圖5.2 溼蝕刻製程元件圖：(a) 微加熱器；(b) 微溫度感測器 37
圖5.3 平坦化製程示意圖 39
圖5.4 微加熱器及微溫度感測器成品圖 40
圖5.5 感測元件與接線位置圖 41
圖5.6 微溫度感測器之電阻值與溫度關係圖 43
表 目 錄
頁次
表3-1 PMMA之性質表 20
表4-1 光阻參數表 31
表4-2 濺鍍參數表 31

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