Title page for etd-0729108-165234


[Back to Results | New Search]

URN etd-0729108-165234
Author Da-Sin Chang
Author's Email Address m953060035@student.nsysu.edu.tw
Statistics This thesis had been viewed 4672 times. Download 3604 times.
Department Materials Science and Engineering
Year 2007
Semester 2
Degree Master
Type of Document
Language zh-TW.Big5 Chinese
Title Growth of Nonpolar ZnO (10-10) Films on LiAlO2 substrate by
chemical vapor deposition method
Date of Defense 2008-06-16
Page Count 60
Keyword
  • CVD
  • nonpolar
  • ZnO
  • Abstract In this study, epitaxial ZnO films were grown by chemical vapor deposition (CVD) on LAO(200) substrate. This dissertation is divided into two parts. In the first parts, the growth of ZnO films on various time was investigated. In the second part, the growth of ZnO films on various pressure was investigated.
      In the first parts of the dissertation, high <10-10> orientation ZnO films were grown. For a long time growth, the grown ZnO films on LiAlO2 substrate have good crystallinity, as revealed by XRD 
    In the second parts, we discuss the difference of ZnO films by varying the growth pressure. It was found that both stripe-like ZnO(10-10) films and hexagonal ZnO(0002) grain existed at lower pressure(50~75 torr), as reveal by XRD and SEM. High <10-10> orientation ZnO films were grown at higher pressure. 
    From cross-section TEM result, we did not find considerable dislocations in the ZnO films, and the ZnO/LiAlO2 interface is shown to be smooth and with the formation of the interlayers, which represents that ZnO and LiAlO2 have some reactions below the temperature of 650 ℃. From the selected area diffraction (SAD) patterns, the orientation relationship between ZnO and LiAlO2 was determined as [11-20]ZnO//[001]LiAlO2、[0001]ZnO//[010]LiAlO2.
    Advisory Committee
  • Shen, Pouyan - chair
  • Liuwen Chang - co-chair
  • Mitch, Ming-Chi Chou - advisor
  • Files
  • etd-0729108-165234.pdf
  • indicate access worldwide
    Date of Submission 2008-07-29

    [Back to Results | New Search]


    Browse | Search All Available ETDs

    If you have more questions or technical problems, please contact eThesys