光學濾波器是一種能夠選擇特定波長光線穿透或反射的元件。有別於需以精準厚度薄膜堆疊而成的傳統薄膜濾波器，波導模態共振濾波器僅包含了光柵與波導結構，即能表現出優異的波長選擇能力。本研究展示了利用面鏡可調之全像干涉系統及蒸鍍介質材料之後製程技術所製作出的波導模態共振光柵。此光柵本身的共振波長對入射光之角度相當敏感，透過改變光入射之角度可容易地調整其波導光柵的共振波長。由於以一維次波長光柵結構所提出的波導模態共振濾波器對入射光之偏振有相依性，所以我們進一步提出了結合90°扭轉型液晶結構製作可調變之波導模態共振濾波器。其中波導光柵扮演光學共振器的角色，使共振波長產生強烈的反射，且同時也可當作液晶之配向層。而90°TNLC則作為與波長無關之偏振旋轉器以改變入射光的偏振。因此，本研究所製作之濾波器的共振波長和反射效率可以分別透過選擇入射角及驅動90° TNLC進行調控。且我們使用嚴格耦合波分析（RCWA）軟體（Rsoft軟體）對結合液晶的波導模態共振濾波器之光學特性和波導光柵結構進行了模擬及優化，以實現全彩濾波器之製作。此外，本研究也嘗試對液晶材料之反應時間進行優化。由於液晶分子的反應時間會隨著液晶層厚度增加而增長，所以我們提出以晶圓貼合之技術製作出次微米間距的液晶盒縮短液晶的反應時間。而向列型液晶材料E7在此次微米間距中展現了次毫秒等級的反應時間。期望此晶圓貼合技術能使液晶在超快光學與光電元件上拓展應用。

An optical filter is a device which is capable of choosing specific wavelength in transmission or reflection. Unlike traditional multilayer thin-film optical filters that consist of many layers with precise thicknesses, guided-mode resonance (GMR) filters, which only comprise a grating and a waveguide structure, exhibit an excellent wavelength-selecting ability. Therefore, this work demonstrates a GMR using a mirror-tunable interference lithographical system and the deposition of dielectric material process technology. The resonance wavelengths of the such a GMR filter depend strongly on angle of incidence, and thus the resonance wavelength can be easily chosen by changing the angle of incidence. The proposed GMR filter with the one-dimensional SWG structure also depends on polarization of incidence. Thus, this work further proposes a tunable guided-mode resonant (GMR) filter that incorporates a 90° twisted nematic liquid crystal (TNLC). The GMR grating acts as an optical resonator that reflects strongly at the resonance wavelength and as an alignment layer for LC. The 90° TNLC functions as an achromic polarization rotator that alters the polarization of incident light. The resonance wavelength and reflectance of such a filter can be controlled by setting the angle of incidence and driving the 90° TNLC, respectively. The optical properties and waveguide structure of the LC-based GMR filter were simulated and optimized using Rigorous Coupled Wave Analysis (RCWA) software (Rsoft software). Further, this work tries to optimize the response time of the liquid crystal medium. The response time of the liquid crystal medium will increase with the growth of the thickness of liquid crystal layer, so we propose a sub-micron cell gap of the liquid crystal cell using the wafer-bonding technique to shorten the response time. The liquid crystal (E7) cell with sub-micron cell gap exhibits a sub-millisecond response time. Such a wafer-bonding technique makes liquid crystal possible to expand its application in ultra-fast photonics and optoelectronic devices.

中文摘要 i
Abstract ii
第一章 緒論 1
第二章 液晶簡介 3
2-1 液晶的發現 3
2-2 何謂液晶 4
2-3 液晶的分類 5
2-3.1 向列相(Nematic phase) 6
2-3.2 層列相(Smectic phase) 7
2-3.3 膽固醇相(Cholesteric phase) 9
2-4 液晶基本物理特性 11
2-4.1 液晶的秩序參數 11
2-4.2 折射率異向性 13
2-4.3 介電係數異向性 15
2-4.4 黏滯係數異向性 16
2-4.5 連續彈性體理論 17
2-5 液晶的配向 18
2-5.1 配向形式 19
2-5.2 溝槽理論 20
2-5.3 扭轉型向列型液晶(TN-LC)介紹 21
2-5.4 瓊斯矩陣運算 23
2-5.5 Gooch-Tarry condition 26
2-5.6 Mauguin condition 27
第三章 波導模態共振基本原理 29
3-1 波導理論 31
3-2 等效介質理論 37
3-2.1 TE 模態等效折射率 38
3-2.2 TM 模態等效折射率 39
3-3 嚴格耦合波分析 40
3-4 波導模態共振原理之特性 46
3-4.1 偏振選擇性 46
3-4.2 共振位置 47
3-4.3 共振線寬 48
第四章 元件設計、製程與量測 51
4-1 元件設計模擬 52
4-2 元件製作方法與過程 55
4-2.1 全像術介紹 55
4-2.2 全像干涉系統之架設 56
4-3 樣品製作過程及步驟 58
4-3.1 ITO玻璃清洗 58
4-3.2 光柵結構製作 59
4-3.3 液晶盒製作 60
4-4 液晶元件優化製作 62
4-5 元件量測系統之架設 64
4-5.1 光阻光柵配向之觀察 64
4-5.2 穿透頻譜量測 65
4-5.3 V-T curve量測 67
4-5.4 反應時間量測 68
第五章 實驗結果與討論 69
5-1 光柵結構對液晶配向之影響 69
5-2 以液晶作為覆蓋層製作波導模態共振元件 71
5-2.1 水平配向液晶元件 72
5-2.2 扭轉型向列型液晶元件 79
5-3 液晶元件反應時間優化實驗 88
第六章 結論 92
參考資料 94

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