摘 要
靜電放電對石化工業、半導體及電子相關產業影響很大，在潤滑系統中因摩擦所造成的火花放電也是促使潤滑油劣化的原因之一。為了瞭解潤滑摩擦的帶電機制，本研究使用往復摩擦帶電試驗機及量測系統，以鐵金屬(Fe)及鐵氟龍(PTFE)為試片材料，石蠟基礎油為潤滑劑，在乾摩擦與潤滑條件下探討垂直負荷、滑動速度及摩擦循環時間等實驗參數，對輸出電位的影響。
實驗結果顯示，任何材料的配對在潤滑條件下輸出電位均比乾摩擦情況高，但表面電位反而降低。在Fe/PTFE、PTFE/Fe配對，輸出電位比較低，這是由於絕緣導體的電容效應幾乎不存在。當兩導體被絕緣體分開形成一電容器，如Fe/PTFE-Fe的材料配對下產生電容效應，使摩擦電荷不易消失，故輸出電位比其他材料配對情況高2~3倍。此外，輸出電位受轉速、負荷及循環時間之影響，其中以轉速的影響最顯著。在Fe/Fe配對上潤滑油和鐵金屬分別帶有不同的極性的電荷，其帶電量的大小在負荷固定下，會隨著轉速的增加而增加。
在Fe和PTFE摩擦帶電極性之研究中，提出Fe/PTFE、PTFE/Fe和Fe/PTFE-Fe的摩擦帶電機制模式，Fe/PTFE、PTFE/Fe的配對，輸出電位均為負，而Fe/PTFE-Fe配對輸出電位負正成對出現。由於Fe和PTFE摩擦後，PTFE上有殘留高的負電位，會對Fe造成感應電荷分離，輸出電位極性受到PTFE表面電位所支配。Fe/PTFE-Fe的配對中，上面的Fe輸出電位為負，另一面的Fe也受其感應產生電荷分離，但極性正好相反，因此輸出電位變成正極性。

ABSTRACT
Electrostatic discharge (ESD) influences a lot in the industries of petrochemistry, semiconductor, and electronics. ESD is one of the reasons for the deterioration of the lubricant in the lubrication system. In this study, to understand the performance of the frictional electrification of the lubricant, the reciprocating frictional electrification tester with the measurement systems is employed to investigate the friction electrification under the dry and lubricated conditions. The materials of the specimens are made of Fe and PTFE, and the paraffin base oil is used as the lubricant. Furthermore, the effects of the load, the sliding speed, and the duration of the friction on the friction electrification are investigated.
Results show that the electrification voltage in the lubricated condition is much higher than that in the dry condition for the all-material pairs, but the surface voltage is reverse. The measured voltage is lower for the pair of Fe/PTFE and PTFE/Fe because the capacitance effect of the isolator disappears. When two conductors become a capacitor by inserting an insulator, such as Fe/PTFE-Fe, the frictional voltage is about 2~3 times higher than the other pairs because of the isolator capacitance. Moreover, the rotational speed, the normal load, and the duration also affect the output voltage. Among them, the rotational speed is the most significant parameter. At a certain normal load, the oil and the iron have different polarities, and their voltages increase with increasing rotational speed for Fe/Fe pair.
In the polarity study; the tribo-electrification mechanism is proposed for Fe/PTFE, PTFE/Fe and Fe/PTFE-Fe pairs. The output voltages are negative at the lower and the upper specimens for Fe/PTFE and PTFE/Fe pairs, but negative and positive for Fe/PTFE-Fe pairs, respectively. After the surfaces of Fe and PTFE slide together, since the high residual negative voltage appears on PTFE, which causes the separation of induced charge on Fe, the surface residual voltage of PTFE dominates the polarity of output voltage. At Fe/PTFE-Fe pair, the polarity at the upper specimen of Fe is negative. However, the polarity at the lower specimen of Fe is positive, because the lower specimen is also influenced by the surface residual voltage of PTFE.

目 錄
頁次
封面 i
授權書 ii
論文口試審定書 iii
謝誌 iv
目錄 v
圖目錄 viii
表目錄 xi
符號說明 xii
中文摘要 xiv
英文摘要 xv
第一章 緒論 1
1.1 前言 1
1.2 研究動機 1
1.3 研究背景 2
1.4 文獻回顧 3
1.4.1 乾摩擦條件下之摩擦帶電研究 4
1.4.2 滑條件下之摩擦帶電研 8
1.5 本論文之研究目的及方法 14
1.6 本論文架構 15
第二章 靜電基本原理 16
2.1 電磁的發展簡史 16
2.2 靜電產生的原理 17
2.3 靜電的儲存與電容器的充放電 20
2.4 電位、電荷密度與電荷量測 31
2.4.1 電位(Electric potential) 31
2.4.2 電荷密度(charge density) 33
2.4.3 電荷量測(Charge measured) 34
第三章 實驗設備及實驗方法 35
3.1 實驗設備 35
3.1.1 往復式摩擦帶電試驗機 35
3.1.2 負荷控制系統 37
3.1.3 量測系統設備 39
3.1.4 抑制干擾的控制對策 44
3.2 實驗條件 45
3.3.1 潤滑油性質 45
3.3.2 試片材質與規格 45
3.3.3 試片處理方法 48
3.3.4 實驗參數與摩擦狀態 48
3.4 實驗步驟 48
第四章 實驗結果與討論 52
4.1 實驗準備與數據的量測 52
4.1.1 摩擦帶電量測法 52
4.1.2 帶電性的驗證 55
4.1.3 油品對表面電位及電容電位的影響 59
4.1.4 實驗的再現性 62
4.2 各種材料配對下的實驗結果 63
4.2.1 乾燥摩擦下各種材料配對的實驗結果 63
4.2.2 潤滑摩擦下各種材料配對的實驗結果 66
4.3 Fe/PTFE-Fe配對下的轉速、負荷與時間效應比較70
4.4 試片表面的光學影像 77
4.5 摩擦帶電極性機制 83
第五章 結論與展望 85
5.1 結論 85
5.2 展望 86
參考文獻 88
附錄A 94

圖 目 錄
頁次
圖1-1 潤滑油的劣化機制 3
圖1-2 同種硬金屬配對下的摩擦帶電機制 7
圖1-3 同種軟金屬配對下的摩擦帶電機制 7
圖1-4 兩種不同金屬材料的接觸電位差 12
圖1-5 不同潤滑狀態下的摩擦帶電種類 13
圖1-6 液體與固體間的電荷雙重層 13
圖1-7 電荷產生的示意圖 14
圖2-1 摩擦帶電 18
圖2-2 使兩金屬球感應等量異性電荷的過程 20
圖2-3 使一金屬球感應與帶電體相異電荷的過程 20
圖2-4 絕緣體被感應成電偶極 21
圖2-5 儲存電荷的電容器 23
圖2-6 電容器的介電質效應 26
圖2-7 介電質在電容器內的微觀性質 26
圖2-8 電容充放電電路 29
圖2-9 (a) 電容充電曲線 (b)電容放電曲線 29
圖2-10 移動電荷獲得電位能 31
圖2-11 電荷量測法之一 34
圖2-12 電荷量測法之二 34
圖3-1 往復摩擦帶電試驗機示意圖 36
圖3-2 往復式摩擦試驗機之實體照片 36
圖3-3 負荷計校正曲線 38
圖3-4 接觸電位計示意圖 40
圖3-5 非接觸表面電位計 42
圖3-6 表面電位計歸零校正 42
圖3-7 電容量檢驗器 42
圖3-8 數位示波器 42
圖3-9 上下試片規格圖 47
圖3-10 實驗之工作流程圖 51
圖4-1 表面電位量測點 53
圖4-2 電容電位量測—獨立式 54
圖4-3 電容電位量測—廻路式 54
圖4-4 上試片帶性的驗證—靜態 56
圖4-5 上試片的感應帶電—靜態 56
圖4-6 PTFE/Fe接觸前後的表面電位變化 57
圖4-7 實驗前量測材料表面電位變化 58
圖4-8 潤滑油對表面電位的影響 60
圖4-9 潤滑油對電容電位的影響—介電質效應 61
圖4-10 電容電位的再現性實驗 62
圖4-11 不同材料配下正向壓力15N，轉速1000rpm的電容電位 64
圖4-12 Fe/PTFE-Fe在轉速1000rpm下，電容電位的負荷效應 65
圖4-13 不同材料配下正向壓力15N，轉速1000rpm的電容電位 67
圖4-14 Fe/PTFE-Fe在轉速1000rpm下，電容電位的負荷效應 68
圖4-15 Fe/Fe在正向負荷5N下，電容電位的轉速效應 69
圖4-16 時間1分鐘於各種轉速和負荷下之電容電位--Vu 71
圖4-17 時間1分鐘於各種轉速和負荷下之電容電位--Vd 72
圖4-18 時間1分鐘於各種轉速和負荷下之電容電位--VL 73
圖4-19 負荷15牛頓時於各種轉速和時間下之電容電位--Vu 74
圖4-20 負荷15牛頓時於各種轉速和時間下之電容電位--Vd 75
圖4-21 負荷15牛頓時於各種轉速和時間下之電容電位--VL 76
圖4-22 Fe/PTFE-Fe在乾摩擦狀態下轉速1000rpm時不同負荷下的光學影像 79
圖4-23 Fe/PTFE-Fe在潤滑狀態下轉速1000rpm時不同負荷下的光學影像 80
圖4-24 Fe/Fe在潤滑狀態下負荷5N時不同轉速的光學影像 81
圖4-25 Fe/Fe在潤滑狀態下負荷5N時不同轉速的接觸電位 82
圖4-26 Fe/PTFE-Fe的摩擦帶電模式 84
圖4-27 下試片感應帶電模式 84
圖A-1 (a)穿隧效應 (b) 穿隧電流It與距離d的關係圖，d的變動很小，相對應的It變動卻很大，因此回饋電路可以輕易保持固定的d 94
圖A-2 靜電放電的過程 97
圖A-3 接地與連接以消除靜電 98
圖A-4 靜電遮蔽 99
圖A-5 電磁遮蔽 99
圖A-6 導體與絶緣體的表面電荷分佈 101
圖A-7 LC電磁振盪與木塊彈簧振盪 104

表 目 錄
頁次
表2-1 摩擦帶電序列 21
表2-2 介電常數與介電強度 25
表2-3 電容器的種類 27
表3-1 實驗設備規格表 43
表3-2 電容器規格表 43
表3-3 主動遮蔽與被動遮蔽的差異 44
表3-4 潤滑油HN的性質 46
表3-5 試片材料的性質 46
表3-6 實驗操作條件 50
表4-1 潤滑油對電容量與輸出電位的影響 59
表A-1 電學與力學之間的相當量 104

符 號 說 明

頻率，Hz
電流，A
負荷，N
質量，kg
轉速，rpm
轉速，rpm
速度，m/sec
位移，m
電容量，F
電場強度，
力，N
電感，H
功率或電功率，W
( ) 電荷，C
電阻，Ω
磁能，J
電位能，J
木塊的位能，J
木塊的動能，J
電壓或電位，V
電池電壓，V
獨立式上試片輸出電壓，mV
獨立式下試片輸出電壓，mV
迴路式上下試片輸出電壓，mV
移動電荷所作的功，J
電容抗，Ω
介電常數，
真空介電常數或電容率常數，8.85pF/m
介電常數比，
油膜參數，
表面電荷密度，
角頻率，Hz
功函數，

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