本論文主旨為研製垂直鏡面反射器之應用，我們以垂直鏡面反射器搭配彎曲波導來製作半導體雷射與半導體光濾波器。利用垂直鏡面，使一入射至多模干涉耦合器的光模行進方向轉彎，只要適當地調整反射器長度，就可達到特定的分光比 (K=0、0.15、0.5)。為了使光模在垂直反射鏡面產生全反射，我們利用ICP-RIE乾式蝕刻來製作垂直且平滑的反射鏡面，同時藉由BPM模擬驗證，此一設計能有效縮減元件體積達到50%以上。
半導體雷射方面，我們利用一單輸入及雙輸入的光波導反射器來製作費比-普洛雷射。另外，我們亦設計由一個1x2的3dB多模干涉耦合器，搭配兩個90度轉彎光波導反射器和彎曲波導所形成之環形共振腔，來製作一改良的費比-普洛雷射。
半導體光濾波器方面，我們設計2×2 耦合係數為0.15之90度轉彎反射器以及由兩個2×2的90度轉彎反射器搭配彎曲波導形成之具有波長選擇特性之環形共振腔。
元件製程方面，先利用光微影技術定義元件圖案，再利用乾式蝕刻以及溼式蝕刻兩種技術蝕刻出脊狀波導，再對彎曲波導及反射器外圍作深蝕刻以減少損耗，接下來再利用ICP-RIE蝕刻出反射鏡面。之後以高分子材料進行平坦化製程，最後鍍上金屬訊號電極。
元件特性方面，分光器具有65:35的分光效果，這證明光經過反射鏡面處能夠被反射之後由輸出端得到輸出訊號。

The purpose of this thesis is to design and fabricate vertical mirror reflector. We fabricated semiconductor laser and optical filter by vertical mirror reflector and bended waveguide. By this design, we could bend the incident optical mode and get the power splitter with coupling coefficient is 0, 0.15 and 0.5. In order to make total internal reflection in vertical reflective mirror, we used ICP-RIE dry etching process to fabricate vertical and smooth mirror. By BPM simulation, we showed that the device volume was decreased to 50%.
In the semiconductor laser, we fabricated the Fabry-Perot laser by optical waveguide reflector with one input and two inputs. In addition, we also fabricated a reformatory Fabry-Perot laser by the ring resonator with one 3dB coupler, two 90o angle reflectors, and bended waveguide.
In the semiconductor optical filter, we design 2×2 90o angle reflector whose coupling coefficient is 0.15, and ring resonator with two 2×2 90o reflector and bended waveguide.
In fabrication process, first, we defined the device pattern by using photo-lithography technique. Second, we etched ridge waveguide by using dry etching and wet etching method. In order to decrease the scattering loss, we deep etched bended waveguide and the reflector. Then, we etched the reflector mirror by ICP-RIE dry etching process. Finally, we used polyimide to flatten the sides of the ridge waveguide and evaporated metal electrode.
In the device characteristic, we obtained a power splitter with 65 percent and 35 percent output. It demonstrates that the light was reflected from reflective mirror to output port.

第一章 簡介 1
1-1 前言 1
1-2 論文架構 2
第二章 多模干涉耦合器 3
2-1 多模干涉耦合器(MMI)簡介與模擬 3
2-2 MMI之參數計算 6
第三章 垂直鏡面光波導反射器 8
3-1 垂直鏡面光波導反射器簡介 8
3-2 1×1垂直鏡面反射器之模擬結果 9
3-3 K=0.5之2×2垂直鏡面反射器之模擬結果 11
3-4 K=0.85之2×2垂直鏡面反射器之模擬結果 13
3-5 K=0.15之2×2 90度轉彎反射器 15
第四章 元件之設計 17
4-1 彎曲波導之簡介 17
4-2 環形共振腔 18
4-3 光罩之設計 21
第五章 元件製程與實驗結果 24
5-1 磊晶片簡介 24
5-2 實驗流程示意圖 28
5-3 實驗步驟及結果 31
第六章 結論 56

參考文獻 57

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