本論文研究噴霧流場與溫度場特性，主要分成三個部分來進行實驗及討論。使用了三種不同孔徑(dj =7, 10, 35 μm)的超音波震動微孔霧化片，所使用的加熱表面有訂製的金屬加熱圓板以及金屬加熱銅塊。
第一部分:針對工作流體為純水(DI water)，利用微質點影像測速儀(μPIV)，來拍攝噴霧流場的側面全域速度分布，並比較在不同高度和孔徑下的速度趨勢。分析其飛行中及撞擊平板時之物理特性。
第二部分:利用全像干涉粒徑分析儀(IPI),量測不同微孔徑下之側向噴霧液滴粒徑大小，以及其噴出微孔片的進場速度及接近測試平板的出場速度。並得到一粒徑分布變化。
第三部分:觀測金屬加熱表面的沸騰與冷卻現象，包含暫態和穩態曲線，並以熱電偶(T-type)記錄表面溫度分布，進而分析噴霧冷卻對散熱的速率及效果。實驗中的主要參數為孔徑大小(dj =7,10,35 μm)、不同噴霧高度(H=30, 40, 50, 70, 90 mm)以及不同加熱平板表面溫度(Tc=300, 200, 100 ºC)。

Spray cooling has been proven to be efficient in managing high power thermal load. Due to the MEMS technology, the spray nozzle plate has been reduced to minute size or even microscale with low power consumption. However, several of the key heat transfer mechanisms are still not well understood.
The main goal of this study is to observe the velocity characteristics of the spray field, droplets distribution along the downstream, the boiling/cooling curves and the cooling performance.
In this study, we use a commercial PZT nozzle plate with three different nozzle diameters of dj = 7 μm, 10 μm and 35 μm. The corresponding volumetric rate is 3.47 ml/min, 6.53 ml/min and 50 ml/min, respectively. The PZT atomizer is composed of Ni-Co alloy nozzle plate bounded to the PZT ring actuator. The approximate numbers of micro nozzles on a circular Ni-Co plate are 2288 and 1071 corresponding to dj = 7 μm and 35 μm, respectively.
We use DI water as working fluid spraying on a copper flat heater which the target surface area is 2x2 cm2 and with a 14.5 mm thickness. The main experimental parameters are the spray height, H (30, 40, 50, 70, 90 mm), the initial temperature of the heater surface, Ts (300, 200, 100 ºC), and nozzle diameter, dj (7, 10, 35 μm). Both a transient and steady boiling curve are obtained as well as the quenching cooling curve. The results show that the average heat transfer coefficient (HTC) and the associated critical heat flux(CHF) could be over 2W/cm-K(HTC) and 200W/cm2(CHF), respectively.
Furthermore, by using micro particle image velocimetry (μPIV) and Interferometric particle Imaging (IPI) systems, we could image and analyze the velocity and droplet size of the spray field. Besides, we also study the droplets dynamics to understand the droplet-surface interactions relevant to spray cooling.

CONTENTS
Page
論文審定書.................................................................................................i
謝 誌........................................................................................................ ii
中文摘要...................................................................................................iv
ABSTRACT ..............................................................................................v
CONTENTS.............................................................................................vii
LIST OF TABLE........................................................................................x
LIST OF FIGURE......................................................................................xi
NOMENCLATURE.....................................................................................xv
CHAPTER 1 Introduction............................................................................1
1-1 Backgroung.....................................................................................1
1-2 Characteristics of PZT piezoelectric vibrating plate.............................1
1-3 Structure of Atomization...................................................................2
1-4 Droplet size and measurement mode.................................................4
1-5 Development Background.................................................................5
1-6 Literature review...............................................................................8
1-7 Research purpose...........................................................................20
CHAPTER 2 EXPERIMENT SYSTEM and EQUIPMENT.............................26
2-1 Experimental equipment overview.....................................................26
2-2 Spray atomization and fluid supply system........................................27
2-3 Optics photography system..............................................................28
2-3-1 μPIV system............................................................................28
2-3-2 IPI system...............................................................................30
2-4 Heating system...............................................................................31
2-5 Data acquisition system...................................................................32
2-6 Other equipments............................................................................33
CHAPTER 3 EXPERIMENTAL METHODS and PROCEDURES...................46
3-1 Micro-spray system design and production.........................................46
3-2 Principle of Optics............................................................................47
3-2-1 μPIV system..............................................................................47
3-2-2 IPI system.................................................................................48
3-3 Experiment parameters.....................................................................48
3-4 Optics experimental system..............................................................50
3-4-1 Procedure of μPIV system..........................................................50
3-4-2 Procedure of IPI system.............................................................50
3-5 Production of heating system and test surface....................................51
3-5-1 Heating system of copper............................................................51
3-5-2 Experimental method in temperature measurement........................52
3-5-3 Experiment procedures of temperature field...................................56
3-5-4 Data analysis..............................................................................59
CHAPTER 4 THEORETICAL ANALYSIS.....................................................68
4-1 Definition of spray angle (β)...............................................................68
4-2 Definition of Renolds number (Re)......................................................68
4-3 Definition of Webber number (We)......................................................69
4-4 Definition of Sauter mean diameter (d32)............................................70
4-5 Calculation of heat transfer performance............................................71
4-5-1 Calculation of surface temperature (Tw)........................................71
4-5-2 Calculation of heat flux (Q").........................................................72
4-5-3 Calculation of heat transfer coefficient (ħ).....................................73
CHAPTER 5 UNCERTAINTY ANALYSIS.....................................................74
CHAPTER 6 RESULTS AND DISCUSSTION....................... .......................81
6-1 μPIV –spray velocity distribution.......................................................81
6-1-1 Characteristics of three different nozzle plates..............................82
6-1-2 Centerline velocity along the downstream.....................................83
6-1-3 Outlet velocity and the impact velocity at different spray height.....84
6-1-4 Spray velocity profile at different z-position without/with heating.....85
6-2 IPI—droplet size and distribution.......................................................86
6-3 Boiling and cooling curve..................................................................86
6-3-1 Quenching cooling curve.............................................................87
6-3-2 Transient boiling curve................................................................89
6-3-3 Steady boiling curve...................................................................90
CHAPTER 7 CONSLUSION AND RECOMMENDATION .............................118
7-1 Conclusions...................................................................................118
7-2 Recommendations..........................................................................120

REFERENCES........................................................................................122
APPENDIX A..........................................................................................144

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