論文摘要
本實驗以反應性濺鍍法製造鋯及氧化鋯薄膜及凝聚物 (condensates)，以分析式電子顯微鏡分析研究濺鍍於覆碳有機薄膜上，所形成的超細晶粒 (crystallites) 顆粒之大小分佈，形狀，聚合方位與相變化等問題。這些大小從數毫微米到數十毫微米不等的凝聚物是建構薄膜的基本單位，其大小，形狀，方位，生成相對於薄膜微結構性質發展有重要的影響。以金屬鋯為靶材，反應氣體氧氣的流量分別通以0~8 sccm，結果不論氧流量多寡都以氧化鋯相出現，而沒有明顯金屬鋯。氧化鋯 (ZrO2) 晶粒大小隨氧氣流量增加而增加，當氧流量為0~2 sccm時，晶粒尺寸 10 nm，為立方晶（tetragonal）相及正方晶（cubic）相，為（c＋t），隨流量增加正方晶相的量慢慢增多。當氧流量為3 sccm時單斜晶（monoclinic）相出現，為（c+t+m），晶粒尺寸為10 與20 nm間。當氧流量增大到4與4.5 sccm時，單斜晶相幾乎消失，此時有部分沈積物已不再是凝聚物，而是具有固態燒結現象的複晶立方晶相（TZP），晶粒大小約20 nm。氧流量為6與8 sccm時，晶粒幾乎都大於20 nm，有大於30 nm晶粒產生並且進行t m麻田散相變而出現具（111）雙晶面孿晶。流量在0到2 sccm時其生成相為Zr-ZrO2相圖中之穩定相，顯示濺鍍過程中Zr/O比值偏高，使Zr成低價數離子而穩定了立方晶與正方晶相，也可能是因為晶粒變小而穩定高溫穩定相。在氧流量為4與4.5 sccm時所得TZP，是由具固相燒結時受周圍晶粒制約而抑制了麻田散相變。高解析電子影像分析結果顯示氧化鋯晶粒間可藉著 {111} 與 {100}等特殊面進行聚合，當進行至較完美之聚合時，數顆小晶粒可輕易聚結成晶向一致之較大晶粒，而在不完美聚合時，則產生差排。此外也觀察到disorder，triple junction，necking等燒結現象。濺鍍於玻璃片上之鍍層，則於氧流量3與4 sccm之間發生由黑變乳白透明的顏色改變。此等凝聚物在不同基材上隨後之熱處理中，可望產生相變化及微結構改變，對工程應用之影響值得進一步評估。

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目錄 頁次
摘要 i
目錄 ii
前言 1
實驗原理方法 8
實驗結果 10
討論 14
總結 25
參考文獻 26
圖 28
附錄

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