在微機電的領域中，常以各類型的致動器作為動力來源。但在某些致動器的設計之中，雖然有著不錯的精度，但是其可以驅動的距離卻過短，所以這些致動器在使用時，通常會搭配著位移放大機構。
本研究應用機構設計的理論，利用機構合成的方法，按照不同的機構作動模式與設計的需求，進行微型平面縮放儀機構的合成。分別以單一自由度與二自由度輸出做出設計，再由機構的連桿運動鏈目錄衍生，找出適合單一平面，以梳狀致動器為輸入源、適合MUMPs製程的縮放儀機構。接著針對微型、平面式、撓性機構作為設計限制，分別以製程設計、剛體機構與撓性機構之轉換、撓性接頭設計與機構之實體化、輸入驅動源配置設計、FEM模擬、撓性接頭修正...等程序將原始的剛體機構，轉換為微型平面撓性機構。
最後，以FEM軟體模擬來試驗所設計的機構作動之位移縮放誤差狀態。針對微型縮放儀機構的縮放誤差數據作比較，定義出位移誤差百分比，並提出修正方程式作為操控時補償誤差的方法。

In the field of MEMS technology, all kinds of actuators are often regarded as the force source. However, some designs of actuators have good precision in position; the working distance to be driven is too short. Therefore, the actuator is often combined with a mechanism with displacement amplify function.
The objective of this study is to synthesize the new pantograph mechanism using the concept of mechanism design according to the desirable motion and the requirement of the actuator. The cases of single degree-of-freedom and two degree-of-freedom are assumed simultaneously for the output of the basic design constraints so as to generate new pantograph mechanisms from the catalogue of kinematic chains. The suitable pantographs are then found out with the features such as: (1) single level plane using comb driver, (2) using compliant mechanisms as joints, and (3) suitable for MUMPs process. These constraints of design are considered as the procedures of process design, compliant mechanisms transformation, compliant joints design, actuator configurations design, FEM dynamic analysis and joint modifications. Finally, prototypes are evaluated and transform into planar micro compliant pantographs.
Moreover, a test and a discussion of the displacement error are done under the consideration of the designed mechanism actuating using FEM analysis. The percentage of displacement error of planar micro compliant pantograph is defined, and the equation for estimating the percentage of displacement error is proposed so as to modify the motion error for controlling.

謝誌 I
目錄 II
圖目錄 IV
表目錄 VII
摘要 VIII
Abstract IX
第一章 緒論 1
1.1 研究背景 1
1.2 文獻回顧 2
1.2.1 槓桿式放大機構 3
1.2.2 肘節式放大機構 7
1.2.3 縮放儀機構 16
1.2.4 各類縮放機構原理 17
1.3 結論與探討 23
1.4 研究目標與論文大綱 23
1.5 預期的成果與問題 25
第二章 微型撓性縮放儀機構之設計與分析 26
2.1 微型縮放儀機構的設計概念與設計程序 26
2.1.1 微型縮放儀機構之特性與需求 26
2.1.2 平面微型撓性縮放儀機構系統化設計流程 27
2.2 縮放儀機構之作動分析 29
2.2.1 機構作動分析 29
2.2.2 輸入、輸出、與接地點之配置 31
2.3 縮放儀機構之構造合成 32
2.3.1 輸入配置 33
2.3.2 六桿一自由度之縮放儀機構合成 35
2.3.3 七桿二自由度之縮放儀機構合成 41
2.3.4 參考文獻之比對 48
第三章 微型撓性縮放儀機構之實體化設計 53
3.1 剛體機構與撓性機構之轉換 53
3.2 撓性接頭設計與機構之實體化 54
3.2.1 撓性接頭設計簡介 54
3.2.2 撓性接頭設計與機構之實體化 56
3.3 輸入驅動源配置設計 59
3.4 FEM模擬 61
3.5 撓性接頭修正 64
3.6 機構整體微調與位移放大誤差比較 69
第四章 結論 91
參考文獻 95
附錄 MUMPs微加工製程技術簡介 99
A.1 微加工製程技術分類 99
A.1.1 MUMPs加工製程 99

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