由於電子技術日漸進步，各種量測表面的儀器相繼問世。由於各種量測儀器的操作方法和適用的範圍都不盡相同，所以當使用不當時，難免會造成量測上的誤判及誤差。本實驗針對一般較常用的觸針式粗度儀，探討每個參數對標準試片以及加工元件表面粗度量測值之影響，並且對於尺寸細小或鏡面情況，以電子顯微鏡和原子力顯微鏡進行比較量測。
實驗的結果發現，操作參數以截取值對Ra的影響最大，選取時以截取值為0.8mm以上為較佳。掃描速度在速度為0.05、0.1、0.5mm/s時，Rmax誤差均小於3%，在2mm/s時則在10%內。試片台座水平傾斜角度與Rmax呈線性的關係，即角度愈大，Rmax愈大。量測長度則對標準試片的Ra和Rmax無影響。
當量測有曲率的表面時，先以截取值先濾掉表面曲率，判斷粗度曲線是否保有斷面曲線上的波峰與波谷，再以人工量測表面粗度。當量測不規則的表面時，選取截取值為0.8mm以上，且以分段或分區域的方式來量測。當量測尺寸細小以及鏡面之表面時，必須以電子顯微鏡和原子力顯微鏡輔助量測，以得到真正的粗度值。最後量測拋光過程中加工元件的表面粗度變化，得知Ra、Rq、Rmax、Rz及偏斜度會隨著拋光時間的增加而降低，而峭度隨拋光時間的增加而升高。

With the advent of electronics technology, various instruments in surface roughness measurements appear sequentially. Errors and erroneous judgment will happen while using unsuitably, due to the operating method and range are not exactly the same. For stylus profilometer, the effects of operating parameters on surface roughness of standard sample and machined elements are presented. Furthermore, small size elements or mirror-like surfaces are measured by scanning electron microscope (SEM) and atomic force microscope (AFM).
Experimental results show that the cut-off value is the most significant parameter to Ra, it suggests that the best range for the cut-off value is greater and equal to 0.8mm. The error of Rmax is less than 3% at scanning speed of 0.05, 0.1 and 0.5mm/s, and that within 10% at scanning speed of 2mm/s. Rmax increases with increasing angle of work-stage. The measurement length for standard sample is insignificant to Ra and Rmax.
When the surface with curvature is measured, the curvature is removed by the cut-off value for filtering, and the roughness curve is judged whether include peaks and valleys of profile curve, and then the surface roughness is measured by man-made. When the irregular surface is measured, the cut-off value of 0.8mm and higher is selected, and represented surface in the way of separate section or area. SEM and AFM are used to assist in measuring for real roughness value when small size elements or mirror-like surfaces are measured. Variations of roughness of machined elements in polishing are measured finally, results show that Ra, Rq, Rmax, Rz, Skewness will decrease with increasing polishing time, and Kurtosis will increase.

總目錄
頁次
總目錄 i
圖目錄 iv
表目錄 ix
中文摘要 x
英文摘要 xi


第一章 緒論 1
1-1 研究動機 1
1-2 文獻回顧 2
1-3 論文架構 6

第二章 表面粗度及其量測的基本概念 7
2-1 表面粗度的形成 7
2-2 表面粗度對零件使用性能的影響 11
2-3 表面粗度評定基準和參數 13
2-3-1 評定基準 13
2-3-2 評定參數 16
2-3-3 統計分析 19

第三章 實驗設備與實驗方法 25
3-1 實驗設備 25
3-1-1 表面粗度量測儀 25
3-1-2 原子力顯微鏡（AFM） 32
3-2 實驗材料 36
3-3 實驗步驟 37
3-3-1 試片的加工及處理 37
3-3-2 量測過程 37

第四章 實驗結果與討討論 39
4-1 粗度儀操作參數的影響 39
4-1-1 截取值Cutoff 的影響 39
4-1-1-1 截取值Cutoff 的探討 53
4-1-2 掃描速度的影響 59
4-1-3 水平傾斜角度、水平補正的影響 63
4-1-3-1 在一定Cutoff=0.8，量測長度3mm 條件下，傾斜角度及水平補正的影響 63
4-1-3-2 傾斜角和水平補正及Cutoff的影 69
4-1-4 量測長度的影響 74
4-1-5 標準試片的最佳量測規範 77
4-2 不同加工方法的影響 79
4-2-1 車削之表面 79
4-2-2 銑切之表面 83
4-2-3 球面及弧面之表面 89
4-2-4 矽晶圓和四種銅線之表面 97
4-3 量測Skewness 和 Kurtosis的變化 105

第五章 結論 112

參考文獻 114

參考文獻
【1】P. J. Gupta, N. H. Cook, Statistical Analysis of Mechanical Interaction of Rough Surface, Joutnal of Lubrication Technology, January(1972)19-26.
【2】J. D. Garratt, Survey of displacement transducers below 50 mm, J. Phys. E, 12(1979) 563-573.
【3】T. R. Thomas, Measurement techniques, Notes from a short Course on Surface Topography in Engineering, Teesside Polytechnic, September 1980.
【4】W. Hillman, O. Kranz, K. Eckolt, Reliability of roughness measurements using contact stylus instruments with particular reference to results of recent research at the Physikalisch-Technische Bundesanstalt, Wear, 97(1984) 27-43.
【5】I. Sherrington and E. H. Smith, The significance of topography in engineering, Precis. Eng., 8 (2) (1986) 79-87.
【6】G. Binnig, C. F. Quate, Ch. Gerber, Atomic Force Microscopy, Phys. Rev. Lett.,Vol. 56,No. 9,(1986) 930-933.
【7】I. Sherrington and E. H. Smith, Modern Mearsuement Techniques in Surface Metrology: Part I; Stylus Instruments, Electron Microcopy and Non-Optical Comparators, Wear, 125(1988) 271-288.
【8】Chin Y. Poon, Bharat Bhushan, Comparison of surface roughness measurements by stylus profiler, AFM and non-contact optical profiler, Wear 190 (1995) 76-88.
【9】Y. R. Jeng, Characterization of Surface Height Distributions, Journal of the Chinese Society of Mechanical Engineers, Vol.19, No.4,(1998)417-423.
【10】Zahide Yilbas, M. S. J. Hasmi, Surface roughness Measurement Using an Optical System, Journal of Materials Processing Technology 88(1999)10-22.
【11】Bharat Bhushan, Introduction to Tribology, John Wiely & Sons, (2002)9-98(Chapter 2).
【12】N. K. Myshkin, A. Ya. Grigoriev, S. A.Chizhik, K. Y. Choi and M.I. Pertokovets, Surface Roughness and Texture Analysis in microscale, Wear 254(2003) 1001-1009.
【13】We-Ruey Chang, Mikko Hirvonen, Gaoul Grönqvist, The Effects of Cut-off Length on Surface Roughness Parameters and Their Correlation with Transition Friction, Safety Science 42(2004) 755-769.

【14】Bernard J. Hamrock, Fundamentals of Fluid Film Lubrication, McGRAW-Hill International Editions (1994)
【15】張郭益、許全守 編著, 精密量測, 全華科技圖書(1997)
【16】俞漢清, 表面粗糙度標準及應用, 中國計量出版社(1997)
【17】何貢、馬樹山 編著, 表面粗糙度檢測, 中國計量出版社(1998)