本研究提出使用高穩定銦錫氧化觸控薄膜應用於溫度、酸鹼度及電導度三者特性開發與量測，改良前人穩定性不高的濕式王水蝕刻製程，採用快速雷雕取代，在酸鹼感測晶片上，使用雷射加工的方式，定義出溫度及電導度的電極圖形，此製程不僅大幅縮短晶片製程時間，也提高晶片加工後電極與電極間絕緣穩定性，使整體晶片可微小化。晶片後端量測架構中，酸鹼度感測部份，改良前人酸鹼量測中延伸式閘極場效電晶體(Extended-Gate Field Effect Transistor)架構，使用經過挑選的市售電晶體，搭配本研究開發穩定I - V轉換電路，得以作為穩定後端特性量測。溫度及電導度部份，連接市售電錶作為特性量測。在晶片連結部份，本研究使用6 pin軟性電路板(Flexible Printed Circuit，FPC)連接器作為電路與晶片電極連接橋梁，與其它市售腳位較平坦的連接器相比，FPC連接器接腳相對較立體，可以與感測晶片緊密接觸。且連接器可插拔特性，適合當薄膜長期量測損壞時，可迅速取下更換，成為一個多功能晶片可拋式感測器。量測結果顯示，微小化感測晶片，酸鹼感測範圍仍可達pH3 – pH13，且面積在19.5 ~ 52.0 mm2 變異量<8%及流動測試在100 ~ 500轉(Revolution(s) Per Minute, rpm)變異量< 4 %。溫度部份，水溫約每上升1oC ，感測薄膜的電阻大約會上升2 Ω，且不同初始電阻具有相同溫度電阻特性。電導度部份，可明顯區分不同水質電導度。雷射穩定度部份，利用雷射加工製作20片不同晶片，在相同酸鹼下，晶片變異量小於7%。最後，收集9位測試者，共計10個尿液樣本，成功歸納出飲食與尿液酸鹼及離子濃度關係。由一系列研究結果，驗證以此方式加工開發出的多重微型感測晶片，具有良好的穩定性，對尿液也具可進行實際感測，未來可將朝拋棄式及結合生理監控系統方向發展。

This thesis present the fast multiple pH, temperature and conductivity sensors utilizing full ITO as the sensing materials. Instead of wet chemical etching, CO2 laser was used to direct ablate the PET layer of the touch panel film (TPF) and defined the pattern of the sensing electrodes. The energetic laser spots ablate the PET layer such that the electrical insulation could be achieved without using wet chemical etching. Laser machining improve stability and insulation for the sensing electrodes for the sensing chip even more the time for the process can be faster. Therefore, the full ITO-based electrodes for temperature, pH and ionic strength can be easily produced and low-cost. In the pH sensing structure, the commercial CMOS IC is used and replaced the extending gate field effect transistor in the previous research to improve stable and high-sensitivity measurement. In addition, the commercial meter was used for measuring the properties of temperature and conductivity sensors. Six pin Flexible Printed Circuit(FPC) slot with three-dimensional structure to make better connect between chip and circuit. As the results, the minimize ITO multi-sensor exhibits great sensing performance for detecting temperature (2 Ω/ oC), pH value (pH3 - pH13 with rapid response time <1 S, low sensing area effect < 8% between 19.5-52.0 mm2 and effect of the flow rate is less than 4%), and nice distinction for different water conductivity. The results for 20 chips in different pH solution testing is below 7%. Finally, 10 urine samples from 9 students showed the strong connection between meals and urine. The full ITO multi-sensor has shown its potential for developing disposable water and urine sensors. It is also a good candidate to develop disposable and physiological sensor.

中文摘要 i
Abstract ii
目錄 iii
圖目錄 vii
表目錄 x
簡寫表 xi
第一章 緒論 1
1-1 研究背景 1
1-2人體生理學 2
1.2.1 人體腎臟 2
1.2.2 尿液酸鹼 5
1-3感測器 7
1.3.1離子場效電晶體感測器 8
1.3.2微奈米感測器 10
1-4 觸控薄膜發展與應用 12
1-5 研究動機與目的 14
1-6論文架構 14
第二章 材料特性與理論 16
2-1 ITO導電薄膜材料製備 16
2-2實驗系統量測原理 17
2-2-1 電雙層與吸附鍵結分析原理 17
2.2.2 酸鹼感測器原理 20
2.2.3 溫度感測器種類與原理 21
2.2.4離子感測器種類與原理 22
第三章 晶片設計與實驗架構 24
3.1感測晶片加工製程 24
3.1.1感測晶片設計 24
3.1.2晶片加工製程 25
3.2 實驗架構 27
3.2.1 酸鹼區量測系統架設 27
3.2.2溫度區量測系統架設 28
3.2.3 離子濃度區量測系統架設 29
第四章 結果與討論 30
4-1 晶片製程分析 31
4.1.1雷射加工結果分析 31
4.1.2晶片量測分析 34
4-2酸鹼量測 35
4.2.1 電晶體特性曲線 35
4.2.2 穩定性分析 37
4.2.3不同感測面積探討 38
4.2.4不同參考電極電壓分析 40
4.2.5量測系統靈敏度分析 41
4.2.6 重覆性分析 42
4.2.7 酸鹼度與溫度關係 44
4.2.8酸鹼與流速關係 44
4-3溫度電阻量測 45
4-4離子濃度量測 46
4.4.1離子濃度回覆性測試 46
4.4.2不同水質電導度實際量測 47
4-5尿液實測 48
第五章 結論與未來展望 51
5-1 結論 51
5-2 未來研究方向 53
參考文獻 54
自述 62

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