在光纖通訊中，高效率光模轉換器(SSC)已經變成主要成分之一，因為它在不同模態的波導間，具有高耦合效率。允許單模光纖有效的耦合到小尺寸的波導，實現低成本光纖相關的封裝到高性能的光子集成。在光模轉換器類型中，漸變式直接耦合器(TODC)已經廣泛被應用在光模轉換器中，因為共振條件可以在波導之間短距離內造成強力的能量轉換，然而，代價是與波長相依，此類的SSC不適用於波長分工多波器(WDM)技術中。
在本次工作中，提出與製作一種藉由串接不同形式的漸變式直接耦合器的新式光模轉換器，來轉換被動波導與主動波導的模態。不同的共振條件發生不同漸變式直接耦合器的寬度。藉由濕蝕刻底切主動波導來定義漸變式直接耦合器的寬度。其中被動波導是由InP/InGaAsP交換形成的；主動波導是由兩邊Inp夾InGaAsP多量子井形成的。此SSC利用3個分段的漸變式耦合器所製作。量測被動波導的far field angle 為7.6° (水平方向) ×7.18° (垂直方向)與主動波導的far field angle為17.5° (水平方向) ×30.9° (垂直方向)來確認SSC的功能。利用cutback method得知光纖與元件之間的耦合損耗，單模光纖與元件的耦合損耗為-2.6dB；錐形光纖與元件的耦合損耗為-6.6dB。在主動波導中，電致吸收調變器整合光模轉換器，利用光電流與光傳輸損耗來得知SSC的光模態轉換效率。藉由光在元件不同方向傳輸，在波長1520nm與1600nm範圍內，量測得到在光不同方向的傳輸中，EAM中所得到的光電流，去做比值，表示SSC具有寬波段的特性。

High efficient optical spot size converter (SSC) has become one of the major elements in optical fiber communications because it enables high coupling efficiency between different mode sizes of waveguides. Large core of single mode fiber is allowed to efficiently couple to small size waveguides, enabling low cost fiber-related package into high performance photonic integration. Among the types of SSCs, tapered optical direction coupler (TODC) has been widely applied to SSC because the resonant condition could bring up strong power coupling between waveguides within a short distance. However, the price is on its wavelength dependence and thus such SSC is not for wavelength division multiplexing (WDM) technique.
In this work, a new type of SSC formed by cascading different types of TODC is proposed and fabricated, where the converted two modes are a passive waveguide (PW) and active waveguide (AW). PW and AW are formed by alternated InP/InGaAsP layers and InGaAsP multiple quantum well (MQW) sandwiched by InP layers respectively. The different resonance conditions can be placed in different widths of TODC defined by undercut wet etching AW. Through 3 sections of TODC, the SSC is fabricated. The measured far field angles for SSC and EAM are 7.6° (horizontal) ×7.18° (vertical) and 17.5° (horizontal) ×30.9° (vertical), confirming the function of SSC. Using cutback method, the coupling loss between fiber and device is extracted, where the PW has -2.6dB coupling loss with fiber and AW has -6.6dB with tapered fiber. Using AW as electroabsorption integrated with SSC, the photocurrent and optical transmission properties can be used for extracting transfer loss of SSC. By reversed directions of optical transmission, the ratio of the measured photocurrent from EAM is range from 1520nm to 1600nm along the wavelength range of from 1520nm to 1600nm for different directions of pumping, suggesting that the SSC has broadband properties.

中文審定書…………………………………………………………i
英文審定書…………………………………………………………ii
誌謝…………………………………………………………………iii
中文摘要……………………………………………………………iv
英文摘要……………………………………………………………v
目錄…………………………………………………………………vi
圖次…………………………………………………………………viii
表次…………………………………………………………………xi
第一章 緒論………………………………………………………1
1.1前言……………………………………………………………1
1.2研究動機………………………………………………………2
1.3研究步驟………………………………………………………4
1.4論文架構………………………………………………………4
第二章 工作原理……………………………………………………6
2.1光模轉換器原理…………………………………………………6
2.1.1主動波導…………………………………………………6
2.1.2被動波導…………………………………………………7
2.1.3共振耦合…………………………………………………7
2.2寬波段設計…………………………………………………………8
2.3被動波導模擬………………………………………………………11
2.3.1磊晶層折射率理論模型……………………………………11
2.3.2 被動波導模擬………………………………………………12
2.4光電致吸收調變器…………………………………………………14
2.4.1載子躍遷……………………………………………………14
2.4.2量子局限史塔克效應………………………………………15
第三章 元件製程………………………………………………………17
第四章 光模態轉換效率量測…………………………………………28
4.1 電致吸收調變器特性量測……………………………………29
4.2 IV量測………………………………………………………30
4.3 Far field angle量測…………………………………………31
4.4 Coupling loss量測…………………………………………31
4.5整合元件之光電流量測…………………………………………32
4.6未來工作………………………………………………………36
參考文獻…………………………………………………………………37

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