材料能隙工程在整合光電元件上是很重要的技術。藉由材料擴散的方式改變量子井內部結構來調整材料能隙，熱混合擴散技術已被廣泛的使用在材料能隙工程上，因能簡單化且能夠在晶片上區域性的調整。電致光吸收調變器與光放大器在光電領域中是必要的元件，利用調整能隙的方式使得電致光吸收調變器與光放大器的能隙匹配因此更能最佳化兩者之間的整合度。在本文中我們利用其中一種熱混合擴散的方法-內部晶格擴散，來輔助整合電致光吸收調變器與光放大器元件。元件的設計上，鏈狀式電致光吸收調變器整合光放大器是為了高速調變與降低雜訊，完整製程中不需要使用到重複磊晶的方式。最後我們已成功的利用內部晶格擴散的方法使電致光吸收調變器藍位移20nm。

The band-gap engineering is an important technique for integration of optoelectronic devices. Using the inter-diffusion of atoms in the quantum well structure, Quantum-Well Intermixing (QWI) technique has been widely used for band-gap engineering due to its simple process and capability of local tuning in chip. Electroabsorption modulator (EAM) and semiconductor optical amplifier (SOA) are two essential devices in optoelectronic field. The band-gap engineering is needed to get optimized performance in integration of EAM and SOA because of the energy level offset in both material structures. In this work, an simple QWI technique, called impurity free vacancy diffusion (IFVD), is employed to integrate EAM and SOA. In the device design, a chain structure of EAM-integrated SOA is used for high-speed and low-noise performance. No re-growth step is needed in the whole device process. An good property EAM with blue shift of 20nm from SOA portion is achieved from this IFVD method.

中文摘要………………………………………………2
英文摘要………………………………………………3
致謝……………………………………………………4
目錄……………………………………………………5
第一章 簡介………………………………………… 7
1-1 前言……………………………………………… 7
1-2 研究動機………………………………………… 8
1-3鏈狀式電致光吸收調變器與光放大器結構…… 14
1-4論文架構……………………………………… 15
第二章 理論與程式模擬……………………………17
2-1熱混合擴散效應…………………………………17
2-2電致光吸收調變器與光放大器…………………18
2-3模擬熱混合擴散下之量子井定義……………21
2.3.1 熱混合效應下能帶結構的改變…………22
2.3.2 量子井基態能階與波函數計算……28
第三章熱混合的方法與整合元件的製作…………34
3.1 熱混合製程的方式…………………………38
3.2 元件的製作…………………………………39
3.2.1 氫離子佈植和蒸鍍p型接觸金屬…… 41
3.2.2 蝕刻光波導與主動層………………… 42
3.2.3 蒸鍍N型接觸金屬…………………… 45
3.2.4 平坦化製程…………………………… 47
3.2.5 蒸鍍共平面電極……………………… 48
3.3 製程結論…………………………………… 50
第四章 元件特性量測與討論……………………51
4-1金屬半導體接觸電阻…………………………51
4-2鏈狀式EAMSOA光電流頻譜量測…………… 53
4-3 元件量測問題與討論………………………… 57
第五章 結論…………………………………………58
第六章 參考文獻……………………………………59

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