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博碩士論文 etd-0808105-144930 詳細資訊
Title page for etd-0808105-144930
論文名稱
Title
微扣件機構設計
A Study on the Design of Microfasteners
系所名稱
Department
畢業學年期
Year, semester
語文別
Language
學位類別
Degree
頁數
Number of pages
94
研究生
Author
指導教授
Advisor
召集委員
Convenor
口試委員
Advisory Committee
口試日期
Date of Exam
2005-07-14
繳交日期
Date of Submission
2005-08-08
關鍵字
Keywords
機構設計、合成、微機電、微扣件
microfastener, MEMS, synthesis, mechanism design
統計
Statistics
本論文已被瀏覽 5611 次,被下載 15
The thesis/dissertation has been browsed 5611 times, has been downloaded 15 times.
中文摘要
微機電技術已發展多年,近年來強調組裝的重要,因此組裝的方
式也相對的愈趨重要。扣件在這方面就扮演了重要的角色,除了因為
外型簡單,最重要的原因還是因為製程配合度高,不需艱難的加工法
即可製作。
本研究主要的目的在利用觀察到的現象,符合一般機構自由度的
定義,以機構設計的概念來合成新式扣件。首先根據需求來進行扣件
分析,合成出新的扣件之後,再轉換成撓性機構。藉著訂定尺寸,以
FEM來模擬其嵌入及保持狀態,並驗證是否會有挫曲產生。最後經由
改變桿寬來改善其保持力,並訂定篩選機制。利用嵌入力、保持力、
應力與構型四項條件來篩選出合用的扣件。另外提出一款齒輪組裝機
構,在製造時微齒輪有較大之背隙,以便於為製程加工,然後再藉著
滑塊的作動、扣件的結合,使兩齒輪軸固定於正確嚙合位置。
Abstract
The MEMS technology has been developed for many years.
Micro-assembly becomes more and more important in this years.
Microfasteners play a critical role in micro-assembly due to their simple
configuration and easy to be fabricated.
The objective of this study is to utilize the phenomenon observed, that
fits the definition of the degree of freedom of general mechanisms, and to
synthesize new microfasteners employing the concept of mechanism
design. Firstly, microfasteners are analyzed based on the need. After
synthesizing new microfasteners in micro-scale, they are transformed into
compliant mechanisms in micro-scale. By establishing geometry, FEM is
applied to simulate the situation of insertion and retention, and to check if
bucking will happen. Finally, the retention force is improved by changing
the width of links. The insertion force, retention force, and stress are
considered for selecting feasible configurations. An example of
microgear set mechanism is introduced to demonstrate the assembly of
the microgear set after microfabrication process with large backlash.
目次 Table of Contents
謝誌................................................................................................................................i
目錄................................................................................................................................ii
圖目錄...........................................................................................................................iv
表目錄...........................................................................................................................vi
摘要..............................................................................................................................vii
Abstract..................................................................................................................... viii
第一章 緒論...............................................................................................................1
1.1 研究背景與研究動機.......................................................................................1
1.2 文獻回顧...........................................................................................................2
1.3 研究目標與論文大綱.......................................................................................6
第二章 微扣件之設計與分析...................................................................................8
2.1 微扣件的設計概念...........................................................................................8
2.1.1 微扣件的特性需求......................................................................................9
2.2 連桿式扣件合成設計.....................................................................................10
2.2.1 實體化轉換規則........................................................................................18
2.2.2 實體化轉換................................................................................................20
2.3 新式扣件模擬分析.........................................................................................24
2.3.1 有限元素法概論........................................................................................24
2.3.2 微扣件尺寸設計........................................................................................25
2.3.3 模擬數值與初步篩選................................................................................29
2.4 挫曲測試.........................................................................................................42
2.5 保持力改進.....................................................................................................42
2.6 評比與篩選.....................................................................................................45
第三章 微齒倫組裝機構之設計.............................................................................47
3.1 微齒倫組裝機構之概念設計.........................................................................47
3.1.1 組裝機構之滑動裝置................................................................................47
3.1.2 組裝機構之扣合裝置................................................................................51
3.2 微齒倫組裝機構之幾何尺寸.........................................................................55
第四章 微齒倫組裝機構之製程設計.....................................................................57
iii
第五章 結論與建議.................................................................................................70
參考文獻......................................................................................................................72
附錄..............................................................................................................................75
參考文獻 References
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Howe, R. T., 1988, “Surface Micromachining for Microsensors and
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Koester, A. D., 1993, Introduction to Micro-Electro-Mechanical Systems
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Kovacs, G. T. A., 1998, Micromachined Transducers Sourcebook,
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Fabrication Process for Electrostatic Microactuators with Integrated Gear
Linkages,” Journal of Microelectromechanical Systems, Vol. 6, No. 3, pp.
234-241.
Madou, M., 1997, Foundamentals of Microfabrication, CRC Press, New
York, ISBN 0-8493-9451-1, pp. 138-139.
Prasad, R., B
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