渦電流檢測為被廣泛使用之非破壞檢測方法，常用於檢測較薄之金屬材料。主要是藉由電磁感應作用，獲得渦電流磁場與線圈磁場間作用之線圈阻抗變化，再經由阻抗平面訊號圖觀測其相位角及對檢測之影響，而不同之缺陷型態與檢測因素往往會影響檢測之結果。
本文目的在於使用有限元素法，分析各種檢測因素對於渦電流檢測所造成之影響。先利用有限元素分析軟體Femlab建立其二維軸對稱簡化之檢測模型，再經由Matlab軟體進行後處理運算，並繪製阻抗平面訊號圖與深度-角度評估曲線，針對不同檢測因素下，訊號圖與評估曲線之變化情形，降低誤差之發生率。
經由有限元素模擬分析出來之各檢測因素及缺陷型態之結果，可提供實際檢測更多數據交相比對，使實際檢測能夠更正確的判定其缺陷之情況，降低評估誤差的產生，增加檢測之準確度與可靠度。

Eddy current testing is a non-destructive testing method, which is usually used for an examination of thin metal material. It can acquire the coil impedance variety between the eddy current magnetic field and the coil magnetic field by electromagnetic induction. By prognosticating its phase angle, testing can exam the influence of the examination through the impedance plane diagram. However, the eddy current testing is usually influenced by different types of the defects and factors of examination.
The purpose of this study is to analyze the examination factors of eddy current testing accuracy by means of the finite element method (FEM). This study is to create two dimensional axial symmetry model of simplification in eddy current testing by finite element software package Femlab. After that, the researcher applied the mathematics software package Matlab to plot the impedance plane diagram and evaluation curve. Furthermore, the researcher analyzed the impedance plane diagram and evaluation curve in different examination factors.
After the FEM simulation in different types of the defects and the examination factors, this study can provide many comparable data for experimentalists, to judge the condition of the defects more correctly and to reduce testing errors more effectively in the eddy current testing.

目錄 i
表目錄 iv
圖目錄 vi
中文摘要 ix
英文摘要 x
第一章 緒論 1
1.1 前言 1
1.2 文獻回顧 2
1.3 研究動機與目的 4
1.4 使用軟體介紹 4
1.4.1 Femlab(v2.3) 4
1.4.2 Matlab(v6.51) 5
1.5 本文架構 5
第二章 理論分析 7
2.1 渦電流檢測簡介 7
2.2 電磁理論基礎方程式 7
2.3 能量方程式與有限元素法 10
2.4 渦電流線圈阻抗方程式 12
2.5 深度-角度評估曲線跨角經驗公式 14
第三章 渦電流之有限元素模擬 14
3.1 有限元素法模型建立 14
3.1.1 渦電流模型初始假設條件 14
3.1.2 軸對稱模型之建立 15
3.1.3 邊界條件之設定 15
3.1.4 材料性質設定及模型網格化 16
3.2 有限元素計算與電磁分佈圖 17
3.3 有限元素分析流程與訊號圖之建立 17
第四章 有限元素模擬分析與探討 18
4.1 阻抗平面之訊號圖 18
4.2 深度-角度評估曲線 18
4.3 線圈間距 19
4.4 線圈尺寸大小 20
4.4.1 厚度變化 20
4.4.2 寬度變化 21
4.5 檢測頻率 22
4.6 電流大小 23
4.7 缺陷型態 24
4.7.1 缺陷寬度變化 24
4.7.2 缺陷形狀變化 25
4.7.3 內部缺陷 26
4.7.4 內外缺陷並存 26
第五章 結論 28
5.1 結論與建議 28
5.2 未來展望 30
參考文獻 82

1.余坤城，林文宏，董寶鴻，渦電流檢測法初級，第 1-2頁，財團法人中華民國非破壞檢測學會出版社，台北.
2.Dodd, C. V., “Application of a Phase-Sensitive Eddy Current Instrument,” Materials Evaluation, Vol. 22, No. 6, pp.260-262 (1964).
3.Dodd, C. V., “A Portable Phase –Sensitive Eddy Current Instrument,” Materials Evaluation, Vol. 26, No. 3, pp.33-36 (1968).
4.Dodd, C. V., “ Solutions to Electromagnetic Induction Problems,” Ph.D. dissertation, University of Tennessee, Knoxville, June (1967).
5.Muzhitskii, V. F., and Smirnov, A. S., “ Phase-Sensitive Method of Electromagnetic Flaw Detection,” Soviet Journal of Nondestructive Testing, pp. 7-13(1973).
6.Maclean, M.D. “Defect Characterization by the Remote Field Eddy Current Technique in Small-Diameter Tubing, ” Materials Evaluation, Vol. 47, No.1, pp. 24-28 (1989).
7.Kilgore, R.J. and Ramchandran, S. , “Remote-Field Eddy Current Testing of Small-Diameter Carbon Steel Tubes, ”Materials Evaluation, Vol. 47, No.1, pp. 32-36(1989).
8.Mackintosh, D.D., Atherton, D.L. and Sullivan, S.P., “Remote-Field Eddy Current Signal Analysis in Small-Bore Ferromagnetic Tubes,” Materials Evaluation, Vol. 51, No.4, pp. 492-495 (1993).
9.Kituta, T., Fisher, J. L., Rowland, S. N., and Jolly ,W. D., “ Far-Field Eddy Current Model for Carbon Steel Gas Pipes,” the 5(th) International Symposium on Offshore Mechanics and Arctic Engineering (OMAE), Dallas, TX (1985).
10.Schmidt, T.R.“The Remote Field Eddy Current Inspection Technique , ” Materials Evaluation, Vol. 42, No.2, pp. 225-230 (1984)..
11.Atherton, D. L., Szpunar, B., and Sullivan, S., “ The Application of Finite-Element Calculations to the Remote-Field Inspection Technique,” Materials Evaluation, Vol. 45, No. 9, pp. 1083-1086 (1987)
12.Lord, W., Sun ,Y.-S., Udpa, S. S., and Nath, S., “A Finite Element Study of the Remote-Field Eddy Current Phenomenon,” IEEE Transactions on Magnetic, Vol. 24, No.1, pp. 435-438 (1988).
13.Lord, W., and Palanisamy, R., “Development of Theoretical Models for Nondestructive Testing Eddy-Current Phenomena,” in Eddy- Current Characterization of Materials and Structures, ed. G. Birnbaum and G. Free, STP 772, ASTM, Philadelphia, PA. (1981)
14.Lord, W., Nath, S., and Shin, Y.K., “ Pulsed RFEC Probe Response,” IEEE Transactions on magnetics, Vol. 28, No. 2, pp.1430-1433 (1992).
15.Schmidt, T.R., “History of the Remote-Field Eddy Current Inspection Technique,” Materials Evaluation, Vol.47, No.1, pp. 14-22 (1989).
16.Brown, D.J. and Le, Q.V., “Application of the Remote-Field Eddy Current Technique to The In-Service Inspection of Ferromagnetic,” Materials Evaluation, Vol. 47, No.1, pp. 47-55, (1989).
17.Mackintosh, D.D., Atherton, D.L. , Schmidt, T.R. and Russell, D.E., “Remote Field Eddy Current for Examination of Ferromagnetic Tubes ,” Materials Evaluation, Vol. 54, No.6, pp. 652-657 (1996).
18.Shatat, A., Atherton, D. L., “ Remote Field Eddy Current Inspection of Support Plate Fretting Wear,” Materials Evaluation, Vol. 55, No 3, pp 361-366 (1997).
19.Palanisamy, R., “Finite Element Modeling of Eddy Current Nondestructive Testing Phenomena,” Ph.D. dissertation, Colorado State University (1980).
20.Ida, N., Palanisamy, R., and Lord, W., “Eddy Current Probe Design Using Finite Element Analysis,” Materials Evaluation, Vol. 41, No. 12, pp. 1389-1394 (1983).
21.Palanisamy, R., “Theoretical Prediction of Remote-Field Eddy Current Response for the Nondestructive Evaluation of Metallic Tube,” Journal of Applied Physics, Vol. 61, No. 8, Part IIA, pp. 3202-3204 (1987).
22.Atherton, D. L., Szpunar, B., and Sullivan, S., “The Application of Finite-Element Calculations to the Remote-Field Inspection Technique,” Materials Evaluation, Vol. 45, No. 9, pp. 1083-1086 (1987).
23.Lord, W., Sun ,Y.-S., Udpa, S. S., and Nath, S., “A Finite Element Study of the Remote-Field Eddy Current Phenomenon,” IEEE Transactions on Magnetic, Vol. 24, No.1, pp. 435-438 (1988).
24.Atherton, D.L., Czura, W., and Schmidt, T.R., “Finite Element Calculations for Shields in Remote-Field Eddy Current Tools,” Materials Evaluation, Vol. 47, No. 9, pp.1084-1088 (1989).
25.Atherton, D.L., Czura, W., Schmidt, T.R., Sullivan, S. and Toal, C., “Use of Magnetically-Saturated Regions in Remote Field Eddy Current Tools,” Journal of Nondestructive Evaluation, Vol. 8, No. 1, pp.37-43 (1989).
26.Atherton, D.L., and Czura, W., “Finite Element Calculations for Remote Field Eddy Current Inspection Tools,” Electrosoft, Vol. 2, No. 2/3, pp.157-174 (1991).
27.Harold, R. L., “Analysis of Variance in Experimental Design,” Springer-Verlag, pp13-46 (1991).
28.Isobe, M., Iwata, R. and Nishikawa, M., “High sensitive remote field eddy current testing by using dual exciting coils,” In: Collins R, Dover WD, Bowler JR, Miya K, editors. Nondestructive testing of material, IOSPress , pp. 145-152. (1997).
29.鄭錦智., “Study on Reducing Evaluation Error of Remote Field Eddy Current Testing,”國立中山大學機械與機電工程學系,博士論文(2002).
30.H.Ostermeyer，”New Aspects for Remote Field Eddy Current Probe Development，”NDT.net，Vol.4，N0.8（1999）
31.Young-Kil Shin, Member, IEEE, “Design of Encircling Remote Field Eddy-Current Probe,” IEEE Transactions on magnetics, Vol. 38, No. 2, pp.1273-1276 (2002).
32.黃純夫，渦電流檢測中級，中華民國非破壞檢測協會出版社，台北（1990）
33.張淵俞，A Finite Element Study of the Influential Factors of Remote Field Eddy Current Testing，碩士論文，國立中山大學機械與機電工程學系（2004）
34.黃璽文，The Influence of Probe Structure on Remote Field Eddy Current Testing using Finite Element Analysis，碩士論文，國立中山大學機械與機電工程學系（2004）
35.林建宏，The Finite Element Analysis of Evaluation Curves and Errors in the Eddy Current Testing，碩士論文，國立中山大學機械與機電工程學系（2005）