本論文探討以光電導偶極天線(PC antenna)產生兆赫波輻射，並以兆赫波時間解析光譜(Terahertz Time-Domain Spectroscopy)研究m面氮化鎵(GaN)樣品。因樣品表面具有極性，將樣品旋轉角度藉由兆赫波輻射與樣品c軸夾角觀察波型與強度的關係，同時探討同一氮化鎵樣品中，兆赫波對於不同位置吸收的強度比較，並計算樣品的物理參數(折射率、導電率等等)與探討影響波形的因素。樣品間具有不同氮鎵比以及不同通氮電漿濃度的差異。根據基板與樣品的兆赫波訊號，我們計算材料的複數折射率(complex refractive index)、複數導電率(complex conductivity)，利用德汝德模型(Drude model)對實驗數據進行擬合(fitting)獲得載子濃度(carrier density)與載子遷移率(mobility)。最後與過去的文獻做比較，其折射率與擬合後所獲得的導電率值，接近於過去文獻。
關鍵詞：兆赫波, 氮化鎵, 折射率, 導電率, 德汝德模型, 載子濃度, 載子遷移率

Key word：Terahertz, GaN, refractive, conductvity, Drude model, carrier density, mobility
We use the PC-antenna to generate the THz and study the optical properties of nonpolar GaN using Terahertz Time Domain system. In this thesis, because of the nonpolar GaN, we investigate the THz intensity data and wave shape when changing the angel between terahertz polarization and c-axis. At the same sample, we use the THz to pass the different position and research the THz intensity data and wave shape, and then we calculate the refractive index and conductivity. We investigate the factors which affect the wave shapes. The differences between samples are N/Ga ratio and N power. Using the signal of substrate and sample, we calculate the complex refractive index and conductivity. We use Drude model to obtain the parameters of carrier density and mobility by fitting experiment data. Finally, the results are compared with the previous papers. The refractive index and conductivity are near the values in previous papers.

目錄
論文審定書 i
致謝 ii
Abstract iv
第一章 導論 1
1-1前言 1
1-2兆赫波發展史 2
1-3簡述兆赫波產生方式 3
1-4文獻探討-利用兆赫波對樣品之相關研究 5
第二章 實驗原理 11
2-1光電導偶極天線產生及偵測兆赫波原理 11
2-2光電導偶極天線產生及偵測兆赫波原理推導 12
2-3在ZnTe及Balance detector方面 15
2-4實驗數據分析原理: 17
第三章 實驗架設 24
3-1實驗光路架設 24
3-2 Mai Tai Laser & PC Antenna 26
3-2鎖相放大器(Lock-in, SR850) 27
3-3 Balance Detector 28
第四章 樣品介紹與實驗結果 29
4-1樣品介紹(M-plane多層膜GaN) 29
4-2實驗結果分析 32
第五章 結論 95
參考文獻 97

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