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論文名稱 Title |
氧化鋅/氧化銦超晶格磊晶薄膜:磁控濺鍍法成長與其物理特性之量測 In2O3/ZnO Superlattice Epitaxial Thin Films: Growth by Sputtering Deposition and Characterizations of Physical Properties |
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系所名稱 Department |
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畢業學年期 Year, semester |
語文別 Language |
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學位類別 Degree |
頁數 Number of pages |
32 |
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研究生 Author |
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指導教授 Advisor |
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召集委員 Convenor |
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口試委員 Advisory Committee |
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口試日期 Date of Exam |
2017-07-20 |
繳交日期 Date of Submission |
2017-09-14 |
關鍵字 Keywords |
磊晶、氧化鋅、超晶格、磁控濺鍍系統、氧化銦 ZnO, Epitaxy, Sputtering, Superlattice, In2O3 |
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統計 Statistics |
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中文摘要 |
本實驗是在923K的溫度下,使用磁控薄膜濺鍍機在c面藍寶石基板上製程In2O3/ZnO的超晶格結構,超晶格結構具有量子井的效應。透過改變濺鍍時的功率、沉積溫度、和週期數嘗試得到最佳化的超晶格參數,透過X射線衍射(XRD)、低掠角X射線衍射(GIXRD)和Phi角掃描檢視超晶格的結構,判斷結構是否為磊晶,再從X射線反射率(XRR)得知其膜厚、密度及粗糙度;先從單層膜找到最適合製程超晶格的結構,比較兩材料長在基板上的特性,進一步製程超晶格結構,在針對超晶格介面處電子結構做討論分析,也必須透過電子顯微鏡(TEM)去了解薄膜沉積的情況。 |
Abstract |
Superlattices of shallow quantum well structures with alternating layers of In2O3 and ZnO have been prepared by sputtering at 923K on c-sapphire substrates. Optimization of the processing parameters was attempted through varying the sputtering power, deposition temperature, and number of periods. X-ray reflectivity (XRR) assisted with analytical data fittings was used to extract the thickness, density, and roughness of the samples, while X-ray diffraction (XRD), Grazing Incidence X-ray Diffraction (GIXRD), and phi scans were adopted to verify their epitaxy. The epitaxial qualities for the samples with In2O3 as a starting layer are superior to those starting with ZnO based on transmission electron microscopy (TEM) atomic imaging and electron diffraction. |
目次 Table of Contents |
論文審定書 i 論文公開授權書 ii 誌謝 iii 摘要 iv Abstract v 目錄 vi 圖次 vii 表次 ix I. Introduction 1 II. Experiment 2 A. Sample series 2 B. Sample series 3 C. Sample series 4 III. Results and Discussion 5 A series comparison 5 B series comparison 12 C series comparison 15 IV. Conclusion 20 V. References 21 |
參考文獻 References |
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