摘要

隨著近幾年半導體產業的發達，許多的元件都逐漸以小尺寸為結構，由於尺寸的縮小相對的造成線路密集化及線路直徑細小化，細小化的結果產生了許多問題如電磁干擾、高溫、熱應力等，因此半導體產品產生失效的機率隨之提升。在半導體產品中最常見的損害方式是經由熱疲勞所引起的破壞，熱疲勞是由反覆的溫度變化所引起的熱應力集中而造成疲勞效應。一般對於半導體產品的疲勞量測大都是以反覆的溫度循環實驗去造成破壞，本文則以有限元素套裝軟體來加以模擬分析，且於溫度循環實驗中一循環約需花80分鐘的時間，有著時間過長的缺點，因此本文使用不同的溫度幅度變化於溫度循環中，探討錫鉛凸塊於不同溫度負載條件下的塑性變化，以及不同溫度負載和等效塑性應變增量之關係，由等效塑性應變增量經Coffin-Manson關係式可以預測出錫鉛凸塊的疲勞壽命，以期由不同溫度負載和等效塑性應變增量之關係式能準確的加快疲勞測試速度。

Abstract

Accompany a rapid growth in the semiconductor industry in the past few year, most components gradually used the small dimension as its basic structures. Due to the reduction of component size will induces highly concentrated on circuit and dimension, it also incurs a lots problem, such as electromagnetic interference, high temperature and thermal stress, which will decrease the product reliability. The most common damage in the semiconductor product is thermal fatigue, which is caused by thermal stress concentrated under repeatedly temperature variation loading. Usually, the thermal cycle loading is applied to induce the fatigue destruction and predict the product reliability, but this method spends one cycle for 80min which is time-consumption. Therefore, in this thesis, the finite element method package is used to simulate and evaluate the plastic variation of solder bump and the relation between different temperatures loading and equivalent plastic strain under different temperature range test. Through the Coffin-Manson equation, the equivalent plastic strain can be used to predict the fatigue live, which can be precisely accelerating the fatigue test.

目錄

謝誌.......................................................Ⅰ
目錄.......................................................Ⅱ
圖目錄.....................................................Ⅳ
表目錄.....................................................Ⅶ
中文摘要...................................................Ⅷ
英文摘要...................................................Ⅸ


第一章、緒論.................................................1
1-1 前言..................................................1
1-2 文獻回顧..............................................3
1-3 研究目的..............................................7
1-4 組織與章節............................................8第二章、理論基礎............................................9
2-1 彈性應力應變之關係....................................9
2-2 應力應變與熱應變之關係...............................11
2-3 平面應變問題.........................................12
2-4 塑性應力應變之關係...................................14
2-5 潛變模型.............................................15
2-6 Bauschinger Effect....................................16
2-7 應變硬化模型.........................................18
2-8 黏彈性理論...........................................18
2-9 可靠度預測...........................................20
2-10降伏準則..........................................23
第三章、研究方法與步驟......................................29
3-1 簡介.................................................29
3-2 有限元素模型之建構...................................30
3-3 材料性質與邊界條件...................................30
3-4 ANSYS分析流程........................................32
3-5 收斂性分析...........................................34
第四章、結果與討論..........................................48
4-1 文獻比對之驗證.......................................48
4-2 加速熱循環模擬結果...................................50
4-3 錫鉛凸塊狀態分析.....................................52
4-4 錫鉛凸塊可靠度分析...................................53
4-5 溫度加速測試之比較...............................55
第五章、結論與未來展望......................................80
5-1 結論.................................................80
5-2 未來展望.............................................81
參考文獻...................................................82


圖目錄

圖2-1 平面應變問題之受力狀態...............................25
圖2-2 應力應變曲線圖.......................................25
圖2-3 應力應變曲線圖.......................................26
圖2-4 Isotropic應變硬化模型................................27
圖2-5 Kinematic應變硬化模型................................27
圖2-6 Isotropic應變硬化模型之應力-應變關係.................28
圖2-7 Kinematic應變硬化模型之應力-應變關係.................28
圖3-1(a) 覆晶構裝體下視圖..................................40
圖3-1(b) 覆晶構裝體上視圖..................................40
圖3-1(c) 覆晶構裝體右半邊剖面圖............................40
圖3-2 覆晶構裝體2D幾何模型.................................41
圖3-3 錫鉛凸塊幾何模型.....................................41
圖3-4 錫鉛凸塊使用BKIN時各溫度點之應力應變關係圖.........42
圖3-5 錫鉛凸塊楊氏係數與溫度之關係圖.......................42
圖3-6 錫鉛凸塊熱膨脹係數與溫度之關係圖.....................43
圖3-7 溫度循環曲線圖.......................................43
圖3-8 ANSYS模擬分析流程圖...................................44
圖3-9 二維八個節點的元素結構示意圖.........................45
圖3-10 最大等效應力與元素數目關係圖........................45
圖3-11 最大等效塑性應變與元素數目關係圖....................46
圖3-12 構裝體網格密度......................................46
圖3-13 錫鉛凸塊網格密度....................................47
圖4-1 溫度循環曲線圖.......................................61
圖4-2 等效塑性應變增量與循環次數之關係.....................61
圖4-3 最大等效塑性應變分佈圖...............................62
圖4-4 對稱中心及自由端之定義...............................62
圖4-5（a） 構裝體於高溫125 時之 方向位移分佈................63
圖4-5（b） 構裝體於低溫-40 時之 方向位移分佈................63
圖4-6（a） 構裝體於高溫125 時之 方向位移分佈................64
圖4-6（b） 構裝體於低溫-40 時之 方向位移分佈................64
圖4-7（a） 構裝體於高溫125 時之總位移分佈...................65
圖4-7（b） 構裝體於低溫-40 時之總位移分佈...................65
圖4-8 構裝體在 方向之應力分佈..............................66
圖4-9 構裝體在 方向之應力分佈..............................66
圖4-10 構裝體之等效應力分佈................................67
圖4-11 構裝體之等效應變分佈................................67
圖4-12（a） 錫鉛凸塊於高溫125 時之等效塑性應變分佈..........68
圖4-12（b） 錫鉛凸塊於低溫-40 時之等效塑性應變分佈..........68
圖4-13 錫鉛凸塊等效應力圖..................................69
圖4-14 最外顆錫鉛凸塊等效應力圖............................69
圖4-15 錫鉛凸塊等效塑性應變圖..............................70
圖4-16 錫鉛凸塊塑性應變能分佈圖............................70
圖4-17(a) 塑性應變能曲線圖（6 Cycle）.........................71
圖4-17(b) 塑性應變能曲線圖（1 Cycle）.........................71
圖4-18 等效塑性應變曲線圖..................................72
圖4-19 應力-應變曲線（2 Cycle）...............................72
圖4-20 應力-應變曲線（6 Cycle）...............................73
圖4-21 累積等效塑性應變....................................73
圖4-22 等效塑性應變增量與循環次數之關係....................74
圖4-23 均值溫度17.5 之塑性應變能..........................75
圖4-24 均值溫度42.5 之塑性應變能..........................75
圖4-25 均值溫度67.5 之塑性應變能..........................76
圖4-26 溫度幅度82.5 之塑性應變能..........................76
圖4-27 均值溫度17.5 之累積等效塑性應變....................77
圖4-28 均值溫度42.5 之累積等效塑性應變....................77
圖4-29 均值溫度67.5 之累積等效塑性應變....................78
圖4-30 溫度幅度82.5 之累積等效塑性應變....................78
圖4-31 溫度差與等效塑性應變增量之趨勢圖....................79


表目錄

表3-1 各元件的材料性質表...................................35
表3-2 隨溫度改變之錫鉛凸塊楊氏係數.........................35
表3-3 隨溫度改變之錫鉛凸塊熱膨脹係數（參考溫度76.85 ）......36
表3-4 錫鉛凸塊之雙線性材料性質.............................36
表3-5 錫鉛凸塊之潛變材料性質...............................37
表3-6 液狀底部封膠的黏彈材料參數...........................37
表3-7 等效塑性應變增量與循環次數之關係.....................38
表3-8 溫度循環測試條件.....................................39
表4-1 實驗驗證材料參數表...................................57
表4-2 等效塑性應變增量與循環次數之關係.....................57
表4-3 累積等效塑性應變與熱負載數之關係.....................58
表4-4 等效塑性應變增量與循環次數之關係.....................58
表4-5 溫度變化與等效塑性應變增量之關係.....................59
表4-6 溫度循環測試條件.....................................60
表4-7 溫度變化與等效塑性應變增量之關係.....................60

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