本文是針對在溫度的變化下，單根氮化鎵奈米柱(GaN nanorod)之缺陷研究，以及與bulk奈米柱之間的關係，並且以掃描式顯微鏡(SEM)、陰極螢光(CL)、微光致螢光(μ-PL)做為量測工具。本實驗最主要目的，藉由溫度的變化，在光譜圖上能有效的觀察到氮化鎵奈米柱之缺陷，並且探討奈米柱高比值的面積-體積比所產生的表面態。由CL光譜結果觀察出在20K時的表面態訊號較能隙間躍遷的訊號大。能量3.21eV的訊號來自於氮化鎵和矽基板之間的缺陷。由單根奈米柱在20K的訊號顯示出底部的表面態訊號大於來自頂部的表面態訊號。

In this article, we report the study of defects between single and bulk GaN nanorods in temperature dependence. High quality of GaN nanorods have been investigated by μ-photoluminescence. Optical properties and surface morphology have been analyzed by a series of measurements, including field-emission electron microscopy (FESEM), and cathodoluminescence (CL). CL data reveal that the intensity of surface state emission is larger than near-band-edge emission at 20K . The 3.21eV peak reveals the structural defect at GaN/Si interface. The surface state emission from bottom is larger than top.

序論 ............................................................... 1
1.1氮化鎵(GaN)的發展 ....................................................................................... 1
1.2氮化鎵奈米柱(GaN nanorods) ..................................................................... 2
第二章、儀器原理與介紹 ............................................. 5
2.1 螢光 ................................................................................................................ 5
2.1.1 微光致螢光(μ-PL)系統 .................................................................. 5
2.1.2 螢光導論 ............................................................................................ 6
2.1.3 光致螢光 ............................................................................................ 6
2.1.4 輻射耦合與非輻射耦合 .................................................................... 7
2.1.5 躍遷機制 ............................................................................................ 8
2.2 掃描式電子顯微鏡(Scanning electron microscope) .......................... 11
2.3 陰極螢光 (Cathodoluminescence, CL) .................................................. 14
第三章 樣品介紹 ................................................... 16
3.1 樣品製備 ...................................................................................................... 16
3.2 樣品參數 ...................................................................................................... 19
第四章 實驗結果分析 ............................................... 20
4.1 SEM結果 ....................................................................................................... 20
4.1.1 SEM定位 ........................................................................................... 20
4.1.2 SEM分析 ........................................................................................... 22
4.2 Micro-PL光譜分析 ..................................................................................... 26
4.3 陰極螢光分析 .............................................................................................. 28
第五章 結論 ....................................................... 44
參考文獻 .......................................................... 45

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