本論文內容主要是對於微加速度計強韌控制方法之探討。一開始對於不同的微加工技術及各種不同感測方式（質量位置量測方式）的微加速度計做個說明以及比較還有優點缺分析。然而在微加速度計型式及其架構之外，如加以適當之回授控制，可以增加其穩定度、頻寬、靈敏度、解析度、及其動態量測範圍等等的優點；因此論文內容中便先對目前各型微加速度計中的控制器做分析，並在最後以穿隧式微加速度計做為模型，以不同強韌控制的方法（ 設計及裂隙度量）設計其控制器，使微加速度計能在不同的環境、不確定性之下還能保有其穩定性及效能；最後並在不同的強韌控制方法之間做分析、比較。

This paper presents the research on the robust control of micromachined accelerometers. First, we present different micromaching techniques and compare, analyze the accelerometers with different methods of signal pick-off. Besides the different methods of signal pick-off(the position detection of the seismic mass) and structure designs, we can enhance the performance such as stability, bandwidth, sensitivity, resolution and dynamic range etc. by suitable feedback controllers. So inside the front part of the paper are the analyses for the controllers of different types of accelerometers so far. Moreover, we design the controllers by robust control in different methods with the model of one specific type of micromachined tunneling accelerometer. Because of the robust controllers, the accelerometers can be stable and have good performance under different environments and uncertainties. At last we analyze and compare the controllers designed by -synthesis and gap metric.

論文摘要（中文）………………………………………………………Ⅰ
論文摘要（英文）………………………………………………………Ⅱ
目錄……………………………………………………………………Ⅲ
圖目錄…………………………………………………………………Ⅶ
符號說明………………………………………………………………Ⅹ
第一章　緒論……………………………………………………………1
　　1.1 前言……………………………………………………………1
　　1.2 加速度計之用途………………………………………………2
　　1.3 加速度計的發展以及文獻回顧………………………………3
　　1.4 控制在加速度計中所扮演的角色……………………………6
　　1.5 內容簡介及文章架構…………………………………………7
第二章　微加工技術之介紹…………………………………………9
　　2.1 前言…………………………………………………………9
　　2.2 塊體微加工技術……………………………………………10
　　2.3 表面微加工技術……………………………………………11
　　2.4 LIGA微加工技術……………………………………………12
　　2.5 結論…………………………………………………………13
第三章　微加速度計種類及其原理…………………………………15
　　3.1 前言…………………………………………………………15
　　3.2 加速度計作用的原理………………………………………15
　　3.3 壓電式微加速度計…………………………………………21
　　　3.3.1 感測原理………………………………………………21
　　　3.3.2 優缺點及結論…………………………………………22
　　3.4 壓阻式微加速度計…………………………………………23
　　　3.4.1 壓阻性質………………………………………………23
　　　3.4.2 感測原理………………………………………………27
　　　3.4.3 不同結構之壓阻式微加速度計………………………28
　　　3.4.4 優缺點及結論…………………………………………31
　　3.5 電容式加速度計……………………………………………32
　　　3.5.1 訊號的量取……………………………………………32
　　　3.5.2 靜電力造成的影響……………………………………34
　　　3.5.3 開路電容式微加速度計………………………………36
　　　3.5.4 閉迴路容式微加速度計………………………………37
　　　3.5.5 架構及微加工方式比較………………………………39
　　　3.5.6 結論……………………………………………………41
　　3.6 穿隧式微加速度計…………………………………………42
　　　3.6.1 感測原理………………………………………………42
　　　3.6.2 基本架構及相關介紹…………………………………43
　　　3.6.3 不同形式之穿隧式微加速度計………………………45
　　3.7 結論…………………………………………………………49
第四章　微加速度計控制器的分析…………………………………50
　　4.1 前言…………………………………………………………50
　　4.2 回授驅動力…………………………………………………51
　　4.3 壓阻式加速度計的回授控制………………………………52
　　4.4 電容式加速度計的回授控制………………………………53
　　4.5 穿隧式加速度計的回授控制………………………………56
第五章　強韌控制在微加速度計上的應用…………………………60
　　5.1前言…………………………………………………………60
　　5.2加速度計之模型（model）…………………………………60
　　5.3強韌控制之 設計在穿隧式微加速度計的應用…………61
　　　5.3.1 設計（mu-synthesis）………………………………61
　　　5.3.2 分析（mu–analysis）………………………………78
　　5.4裂隙度量（gap metric）控制在微加速度計上之應用…69
　　　5.4.1 裂隙度量控制理論及控制器之求得…………………70
　　　5.4.2 裂隙度量控制器之 分析……………………………79
　　5.5兩種方式之比較……………………………………………82
第六章　結論與討論…………………………………………………88
　　6.1結論……………………………………………………………88
　　6.2未來希望與發展………………………………………………90
參考文獻………………………………………………………………91

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