本論文的目的為利用表面電漿的原理探討銀島膜的SERS增強。在銀島膜的製作上，以兩種製程方式包括新提出的基板彎曲製程以及單純改變鍍率的方式，可得到不同表面形貌的銀島膜。利用銀在常態下的表面碳化當作待測物量測拉曼光譜。先討論與利用電子束蒸鍍出的平整銀膜在訊號上的有無，以證實島膜間隙SERS的存在；進而藉由對兩種製程的SEM圖做影像處理計算間隙密度，並結合拉曼光譜和SEM圖做比較以確認間隙寬度較小的島膜會有較佳的增強效果，同時也討論一些可能會影響強度的因素；最後把島膜理想化成MIM結構做計算以理解在銀島膜上間隙寬度大小與表面電漿增強的關係。

Surface-enhanced Raman scattering (SERS) effect on Ag films with different morphology is studied. We varied the deposition rates and also proposed a new method to control the nano-gaps on the silver island film. By bending the glass substrates during film deposition, we can control the gap width on the fractal Ag film. The measured SERS intensity is related to the metal film morphology and we found that the gap width is the dominant factor to analyze the SERS signal. The 3-layer metal-insulator-metal structure is simulated and the E-field intensity with different gaps fits to our measurement results.

誌謝 i
摘要 ii
Abstract iii
目錄 iv
表目錄 vi
圖目錄 vii
第一章 序論 1
1-1 前言 1
1-2 文獻回顧與研究動機 2
1-3 論文架構 3
第二章 表面電漿波 4
2-1 金屬塊材的電磁波反應 4
2-2 表面電漿波 8
2-2-1 金屬/介電質平板結構 8
2-2-2 金屬/介電質/金屬平板結構 14
2-3 侷域性表面電漿 18
第三章 表面增強拉曼散射 19
3-1 拉曼散射 19
3-2 表面增強拉曼散射 23
3-2-1 物理機制 24
3-2-2 化學機制 25
第四章 試片製作與量測 27
4-1 實驗架構 27
4-2 實驗儀器 27
4-2-1 熱蒸鍍與電子束蒸鍍系統 27
4-2-2 掃描式拉曼光學顯微鏡 28
4-2-3 掃描式電子顯微鏡 29
4-3 試片製作與表面形貌分析 30
4-3-1 試片製作與SEM觀測 30
4-3-2 島膜間隙密度計算 36
4-4 拉曼光譜分析 38
4-4-1 待測物成份確認及SERS驗證 38
4-4-2 表面形貌與拉曼光譜增強分析 42
第五章 模擬分析與探討 45
5-1 理想化MIM模型 45
5-2 間隙大小與增強強度分析 46
第六章 結論 53
參考文獻 54

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