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博碩士論文 etd-0823111-145558 詳細資訊
Title page for etd-0823111-145558
論文名稱
Title
以拉曼及光致螢光分析m面氮化物之偏振性質
Investigation polarization property of m-plane nitrides by Raman and photoluminescence
系所名稱
Department
畢業學年期
Year, semester
語文別
Language
學位類別
Degree
頁數
Number of pages
88
研究生
Author
指導教授
Advisor
召集委員
Convenor
口試委員
Advisory Committee
口試日期
Date of Exam
2011-07-04
繳交日期
Date of Submission
2011-08-23
關鍵字
Keywords
應力、極化光致螢光、藍寶石基板、電漿輔助分子束磊晶系統、m面
stress, polarization dependent PL, sapphire, PAMBE, m-plane
統計
Statistics
本論文已被瀏覽 5658 次,被下載 561
The thesis/dissertation has been browsed 5658 times, has been downloaded 561 times.
中文摘要
本實驗以電漿輔助分子束磊晶系統(plasma-assisted molecular beam epitaxy, PAMBE),在m面藍寶石基板上成長m面氮化物薄膜。我們藉由掃描式電子顯微鏡觀察樣品表面形貌及量測薄膜厚度,利用電子背向散射繞射及X光繞射確認樣品的成長方向。m面氮化物因其成長方向為非極性面,其薄膜會受到各向異性應力,進而影響其電子能帶結構,而有光學各向異性之性質,本論文以極化光致螢光光譜去探討其螢光在15 K及300 K的偏振性質,並利用公式計算螢光的極化率,再以微拉曼光譜儀分析m面氮化物所受之各向異性應力,探討m面氮化物之應力與極化率,當薄膜所受之各向異性應力越大時,其極化率也越大。
Abstract
The samples this thesis investigated were m-plane nitrides films grown on m-plane sapphire by plasma-assisted molecular beam epitaxy (PAMBE). Scanning electron microscopy (SEM) images revealed the surface morphologies of the films and thicknesses of the films were measured by cross-sectional scanning electron microscopy. Then we used electron back-scattered diffraction (EBSD) and X-ray diffraction (XRD) to check the growth orientation of the films. The m-plane nitrides films have the anisotropic optical properties were due to the growth orientation of the films. The films are under anisotropic stress since they were grown along m-axis and hence change the electron band structure (EBS), which resulted in anisotropic optical property. We studied the polarization properties of the luminescence at 15 K and 300 K by polarization dependent photoluminescence (PL) and calculated the degree of polarization. And then measured the strain of the m-plane nitrides films by micro-Raman spectroscopy, discussed the degree of polarization and stress. The degree of polarization larger as the anisotropic stress of the film increased.
目次 Table of Contents
論文審定書 i
誌謝 ii
摘要 iii
Abstract iv
圖目錄 vii
表目錄 xii
第一章 序論 1
1-1 前言 1
1-2 非極性氮化物發展簡介 4
1-3 非極性氮化鎵的光學性質 7
1-4 薄膜應力 12
第二章 實驗儀器原理與介紹 15
2-1 掃描式電子顯微鏡(Scanning Electron Microscopy, SEM) 15
2-2 電子背向散射繞射(Electron Back-Scattered Diffraction, EBSD)系統 18
2-3 X光繞射儀(X-ray Diffraction, XRD) 21
2-4 光致螢光(Photoluminscence, PL)系統 24
2-5 微拉曼光譜儀(Micro-Raman Spectroscopy) 35
第三章 樣品介紹 38
第四章 實驗結果分析 40
4-1 掃描式電子顯微鏡 40
4-2 電子背向散射繞射 42
4-3 X光繞射 44
4-4 光致螢光光譜分析 46
4-5 拉曼光譜分析 68
第五章 結論 72
參考文獻 73

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