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論文名稱 Title |
二氧化鋯/氧化鎳界面之研究 A study of the ZrO2/NiO interfaces |
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系所名稱 Department |
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畢業學年期 Year, semester |
語文別 Language |
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學位類別 Degree |
頁數 Number of pages |
69 |
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研究生 Author |
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指導教授 Advisor |
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召集委員 Convenor |
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口試委員 Advisory Committee |
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口試日期 Date of Exam |
2011-06-28 |
繳交日期 Date of Submission |
2011-08-24 |
關鍵字 Keywords |
界面、氧化鎳、奈米薄膜、穿透式電子顯微鏡、氧化鋯、氯化鈉 ZrO2, NaCl, NiO, Transmission electron microscopy, Nanofilm, Interfaces |
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統計 Statistics |
本論文已被瀏覽 5682 次,被下載 1737 次 The thesis/dissertation has been browsed 5682 times, has been downloaded 1737 times. |
中文摘要 |
本實驗研究奈米氧化鎳薄膜與奈米二氧化鋯薄膜兩者之間,藉由界面旋轉而形成之穩定界面。利用離子濺鍍機,分別製備奈米氧化鎳及二氧化鋯磊晶薄膜於NaCl單晶 (100)、(111)、(110)面上;並將奈米氧化鎳薄膜和奈米二氧化鋯薄膜,以不同角度差加以相疊製作成複合疊膜。先由熱處理之後,再利用穿透式電子顯微鏡及電子繞射圖分析薄膜之旋轉過程及最後穩定之界面。分析其晶向關係以及熱處理之變化。 結果得到五組新界面,分別是: (1) (001)N/ Z,[110]N//[110]Z (2) (001)N/ Z,[100]N//[110]Z (3) N/ Z,[110]N//[110]Z (4) N/ Z,[111]N//[110]Z (5) N/ Z,[001]N//[110]Z |
Abstract |
The stable interfaces between NiO and ZrO2 reached by nanofilms interface rotation method are reported in this study. Epitaxial nanofilms of NiO and ZrO2 were synthesized on single crystal NaCl (001), (011), (111) surfaces. All nanofilms are investigated by transmission electron microscopy and selected-area diffraction (SAD) patterns. Composite nanofilms were formed by overlapping nanofilms of NiO and ZrO2 at difference angles and thermally treated. The rotation process and final stable interfaces in the overlapped nanofilms are analyzed by SAD patterns. Orientation relationships and interface rotation are analyzed. This study found five new interfaces. (1) (001)N/ Z,[110]N//[110]Z (2) (001)N/ Z,[100]N//[110]Z (3) N/ Z,[110]N//[110]Z (4) N/ Z,[111]N//[110]Z (5) N/ Z,[001]N//[110]Z |
目次 Table of Contents |
目錄 1、簡介...................................................1 1.1薄膜沉積與表面能的關係.............................1 1.2 ZrO2與NiO之性質...................................1 1.3 NiO 與 ZrO2 之低能量界面...........................2 1.4 NiO 與ZrO2在氯化鈉基板之磊晶生長............3 1.5奈米晶粒之旋轉現象..........................5 1.6離子束濺鍍磊晶系統特點......................8 1.7研究目的..........................................9 2、實驗方法...............................................10 2.1 實驗儀器.........................................10 2.1.1離子束濺鍍機................................10 2.1.2穿透式電子顯微鏡............................11 2.2實驗步驟........................................12 2.2.1 ZrO2薄膜試片製作............................12 2.2.2 NiO薄膜試片製作............................13 2.2.3 NiO和ZrO2薄膜試片堆疊與退火................14 2.3濺鍍參數..........................................14 2.3.1製備單層NiO薄膜濺鍍參數....................14 2.3.2製備(100)ZrO2及(110) ZrO2薄膜濺鍍參數........15 2.3.3製備單層(111)ZrO2薄膜濺鍍參數...............15 2.4實驗內容..........................................16 3、實驗結果...............................................18 3.1 NiO (100)、(110)、(111)之薄膜製備結果............18 3.2 NiO及ZrO2複合磊晶之薄膜製備......................18 3.3 NiO與ZrO2之界面旋轉之研究........................19 3.3.1 (111)N/(111)Z NiO與ZrO2之界面旋轉................19 3.3.2 (001)N/(111)Z NiO與ZrO2之界面旋轉................19 3.3.3 (110)N/(111)N NiO與ZrO2之界面旋轉................19 4、討論...................................................21 4.1NiO在NaCl及ZrO2在NaCl上之磊晶....................21 4.2NiO與ZrO2異質磊晶.................................21 4.3 NiO與ZrO2之界面..................................22 5、結論...................................................27 6、參考文獻...............................................28 表目錄 表一 雙離子束濺鍍系統規格................................31 表二 NiO與ZrO2之界面晶向關係.............................32 表三 NiO與ZrO2之界面具有低misfit之低能量面..............33 表四待完成NiO與ZrO2之界面旋轉實驗試片之界面與可能晶向關 係.......................................................33 表五 分子動力學模擬的低能量面組合以及表面能等其他性質[4]......................................................34 圖目錄 圖 1. (a)氧化鋯之相圖及氧化鋯之三種不同結晶結構圖。(b)立方晶 結構;(c)正方晶結構;(d)單斜晶結構[37].....................35 圖 2. NaCl基板(100)生長的c、t-ZrO2薄膜tem繞射圖[5]........36 圖 3. 銀薄膜於NaCl(100)基板去離子水處理將強磊晶能力[11]..37 圖4. 雙離子束濺鍍系統腔體示意圖..........................37 圖5. NiO薄膜SAD電子繞射圖[36]...........................38 圖6. ZrO2(011)/NiO(011) 複合濺鍍薄膜之電子繞射圖.........39 圖7. ZrO2(011)/NiO(011) 複合濺鍍薄膜之明場像(BFI)........39 圖8. ZrO2(011)/NiO(011) 複合濺鍍薄膜之暗場像(DFI)........40 圖9. ZrO2(100)/NiO(100) 複合濺鍍薄膜之電子繞射圖..........40 圖10 (111)N/(111)Z熱處理前電子繞射圖(A組晶向關係)[35].....41 圖11 (111)N/(111)Z350 ℃熱處理10小時(A組晶向關係) [35]...42 圖12 (001)N/(111)Z熱處理前電子繞射圖(B組晶向關係).........43 圖13 (001)N/(111)Z 300℃熱處理10小時Δθ=0°(B組晶向關係)......................................................43 圖14 (001)N/(111)Z熱處理前電子繞射圖(B`組晶向關係)........44 圖15 (001)N/(111)Z300 ℃10 h熱處理後電子繞射圖(B`組晶向關係)......................................................44 圖16 (110)N/(111)Z熱處理前電子繞射圖(C組晶向關係)........45 圖17 (110)N/(111)Z300 ℃10 h熱處理後電子繞射圖(C組晶向關係)......................................................45 圖18 (110)N/(111)Z熱處理前電子繞射圖(C`組晶向關係)........46 圖19 (110)N/(111)Z300 ℃10 h熱處理後電子繞射圖(C`組晶向關係)......................................................46 圖20 (110)N/(111)Z試片熱處理前電子繞射圖(C``晶向關係).....47 圖21 (110)N/(111)Z300℃10h熱處理後電子繞圖(C``晶向關係)...47 圖22 (111)N/(111)Z原子平面模擬圖與堆疊模擬NCSL圖(A組晶向關係)......................................................48 圖23 (001)N/(111)Z原子平面模擬圖與堆疊模擬NCSL圖(B組晶向關係)......................................................49 圖24 (001)N/(111)Z原子平面模擬圖與堆疊模擬NCSL圖(B`組晶向關係)......................................................50 圖25 (110)N/(111)Z原子平面模擬圖與堆疊模擬NCSL圖(C組晶向關係)......................................................51 圖26 (110)N/(111)Z原子平面模擬圖與堆疊模擬NCSL圖(C`組晶向關係)......................................................52 圖27 (110)N/(111)Z原子平面模擬圖與堆疊模擬NCSL圖(C``組晶向關係)....................................................53 圖28 (111)N/(001)Z原子平面模擬圖與堆疊模擬NCSL圖(D組晶向關係)......................................................54 圖29 (111)N/(001)Z原子平面模擬圖與堆疊模擬NCSL圖(D`組晶向關係)......................................................55 圖30 (001)N/(001)Z原子平面模擬圖與堆疊模擬NCSL圖(E組晶向關係)......................................................56 圖31 (001)N/(001)Z原子平面模擬NCSL圖(E`組晶向關係).......57 圖32 (001)N/(110)Z熱處理前電子繞射圖Δθ=16°,由(220)N與(220)Z判斷角度(F組晶關係)[35]............................58圖33 (001)N/(110)Z 350 ℃熱處理1小時Δθ=0°(F組晶關係)[35]..................................................58 圖34 (001)N/(110)Z原子平面模擬圖與堆疊模擬NCSL圖(F組晶向關係)......................................................59 |
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