本研究是利用改良之LIGA製程來製作高深寬比非球面微透鏡陣列，讓OLED因內全反射所造成的出光量低落得以改善。
目前OLED的發光取出效率（Extraction Efficiency）普遍不高，如何增加OLED的發光取出效率是值得探討。研究中分析影響微透鏡成形之相關參數作用，如直徑尺寸變化、乾蝕刻參數與電鑄速率之影響。實驗結果顯示，尺寸在熱回流與乾時刻階段中變化誤差約5%；乾蝕刻中之氧氣含量與光阻表面間有著相當的影響力；高的電鑄速率有助於光阻表面缺陷彌平；乾蝕刻造成之底切會使得電鑄起始層不連接。非球面微透鏡陣列所能提高之輝度最大有15倍。

This study utilizes a modified LIGA process to fabricate a high aspect ratio aspherical micro lens array, which improves low light output of OLED due to its intrinsic total internal reflection.
Presently typical OLED extraction efficiency is not high. How to increase OLED extraction efficiency is a valuable topic to discuss. This study analyzes related parameters that influence the formation of micro lenses, for example, the influence of variation of diametric dimension, dry etching parameters and electroforming rate. The experimental results indicate that the tolerance of dimensional variation of the diameter is about 5% during the thermal reflow and dry etching stage. The oxygen content and the photoresist surface during dry etching influence the result. A high electroforming rate is helpful for covering the surface defects on photoresist. An undercut caused by dry etching will discontinue the initial electroformed layers. A apherical microens array can raise the luminance to a maximum of 15 times higher.

目錄I
圖目錄IV
表目錄VIII
摘要IX
AbstractX
第一章 緒論 1
1.1前言1
1.2 研究目的與動機2
1.3 文獻回顧5
1.4 本文架構13
第二章 有機發光二極體15
2.1 認識OLED15
2.1.1 OLED之取出效率16
2.2 OLED之發展與微透鏡結合18
2.2.1 OLED發展軌跡18
2.2.2 OLED與微透鏡陣列之結合應用20
2.2.3非球面微透鏡陣列之設計理念24
第三章 非球面微透鏡陣列之製程26
3.1 製程原理26
3.1.1 LIGA技術26
3.1.2 黃光微影27
3.1.3 乾蝕刻28
3.1.4 真空濺鍍29
3.1.5 電鑄29
3.2 改良之LIGA製程30
3.2.1 實驗參數34
3.2.2 PDMS參數40
3.3 設備簡介41
3.3.1 UV曝光機41
3.3.2 旋轉塗佈機41
3.3.3 加熱平台42
3.3.4 真空濺鍍機43
3.3.5 光學顯微鏡44
3.3.6 反應式離子蝕刻機 44
3.3.7 三維輪廓儀45
3.3.8 掃描式電子顯微鏡 46
3.3.9 手提示UV燈源46
3.3.10 光學量測系統47
第四章 結果與討論49
4.1 前言49
4.2 檢測結果49
4.2.1 製程中之尺寸變化 49
4.2.2 乾蝕刻含氧量參數之影響52
4.2.3 不同電鑄速率之影響58
4.3 光學性質之量測64
4.3.1 量測方式64
4.3.2 量測結果64
4.4 影響非球面微透鏡陣列良率之因素69
第五章 結論與未來展望71
5.1 結論71
5.2 未來展望72
參考文獻73

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