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博碩士論文 etd-0827109-034231 詳細資訊
Title page for etd-0827109-034231
論文名稱
Title
應用四象儀量測微小物體位移之研究
A Study on the Displacement Measurement of Meso-objects Using PSDs
系所名稱
Department
畢業學年期
Year, semester
語文別
Language
學位類別
Degree
頁數
Number of pages
84
研究生
Author
指導教授
Advisor
召集委員
Convenor
口試委員
Advisory Committee
口試日期
Date of Exam
2009-07-28
繳交日期
Date of Submission
2009-08-27
關鍵字
Keywords
位置感測器、銲後位移、光纖研磨
PSD, Postweld shift, Grinding
統計
Statistics
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The thesis/dissertation has been browsed 5668 times, has been downloaded 1 times.
中文摘要
精密量測已發展多年,近年來量測微小元件位移變成一重要研究項目。本文以光纖研磨技術製作成微米級反射面,並與PSD(Position Sensing Detector)組合,研發一套微小物體之位移量測系統。其主要原理係應用雷射光打在物體上之微反射鏡後,追蹤其反射光點在PSD上之位置,即可計算微小物體之位移量。此系統可應用於蝶式雷射二極體光傳輸模組構裝之銲後位移量測,以改善其構裝良率。
銲後位移影響雷射模組構裝良率甚大,目前研究解決銲後位移之文獻相當多,但大都小於六個自由度之量測。本研究提出應用四象儀量測微小物體位移量測技術,可量測雷射模組構裝之六個自由度銲後位移。首先針對光纖套管外型,設計一個可安裝三個具微米級反射面探針之台座,再利用座標轉換方法推導出雷射光源、微反射面與PSD之位置座標轉換矩陣數學模式。利用PSD之讀值代入位移方程式,透過數值法求解,即可得到銲後位移。
最後將本系統安裝於Newport-LW4200蝶式雷射二極體光傳輸模組構裝機台上測試。實驗結果顯示本量測系統之解析度達1μm,精度為2μm。本論文除可應用於蝶式雷射二極體光傳輸模組構裝之銲後位移量測外,也可應用於其他微小尺寸物體之位移量測。
Abstract
Precision measurement technologies have been developed for a long time. Measuring the displacement of meso-scale objects became an important issue in the recent years. In this study, a displacement measurement system for meso-scale objects is developed by combining the measurement technique of using position sensing detectors (PSD) and the grinding skill of fabricating micro scale reflection surfaces on optical fiber tips. This measurement system can be used for detecting the postweld shift (PWS) of a laser-welded butterfly-type laser diode module package.
The PWS affects the coupling efficiency of a laser-welded butterfly-type laser diode module package quite a lot. Although there are many papers studied the measurement of PWS, most of the measurements are less than 6 degrees of freedom (DOF). The system developed in this paper can measure the 6 DOF displacement of the PWS. An attachment for carrying 3 micro reflection probes is designed firstly which will be settled on the fiber ferrule of a laser diode module. After all the coordinate transformation matrices of the laser beam light source, micro reflection surfaces, and the position sensing detectors are derived as well as the PSD readings are taken, displacements of the ferrule of a laser diode module can be solved from the displacement equations by using numerical method.
The system developed in this paper is implemented on a Newport butterfly-type laser diode module package station (Model LW4200) for demonstration. The testing results show that the resolution of this system is 1μm and the accuracy is 2μm. Beside the application of measuring the 6 degrees of freedom PWS of a laser diode module package, the system developed in this paper can also be applied for measurement the displacement of other meso-scale objects.
目次 Table of Contents
目錄 i
圖目錄 iii
表目錄 vi
摘要 vii
Abstract viii
第一章 緒論 1
1.1 研究背景 1
1.2 文獻回顧 3
1.3 研究動機 5
1.4 研究方法 6
1.5 論文架構 7
第二章 基本概念 9
2.1 雷射四象儀量測系統概述 9
2.2 光纖反射面製作 10
2.3 反射面台座 16
2.4 雷射銲接系統 18
2.5 銲後位移成因 22
第三章 銲後位移數學模式之推導 25
3.1 銲後位移之定義 25
3.2 銲後座標轉換矩陣 27
3.3 反射面座標轉換矩陣 31
3.4 PSD座標轉換矩陣 34
3.5 入射點與反射點座標 36
3.5.1 入射點座標 37
3.5.2 反射點座標 39
3.6 雷射光點與反射面尺寸大小之關係 41
3.7 數值法求解非線性方程組 43
第四章 銲後位移量測系統 46
4.1 量測系統組件介紹 46
4.2 量測系統架構與量測流程 51
4.3 PSD位置校正與重複性分析 55
4.4 量測系統實機測試 65
第五章 結論與建議 70
參考文獻 72
參考文獻 References
Bokelberg, E. H., Sommer, H. J. and Trethewey, M. W., 1994, "A 6-degree-of-freedom Laser Vibrometer .1. Theoretical Development," Journal of Sound and Vibration, Vol.178, No.5, pp. 643-654.
Chen, C. J., Lin, P. D. and Jywe, W. Y., 2007, "An Optoelectronic Measurement System for Measuring 6-degree-of-freedom Motion Error of Rotary Parts," Optics Express, Vol.15, No.22, pp. 14601-14617.
Fan, K. C., Chen, M. J. and Huang, W. M., 1998, "A six-degree-of-freedom Measurement System for the Motion Accuracy of Linear Stages," International Journal of Machine Tools & Manufacture, Vol.38, No.3, pp. 155-164.
Jywe, W. Y. and Chen, C. J., 2007, "A New 2D Error Separation Technique for Performance Tests of CNC Machine Tools," Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology, Vol.31, No.4, pp. 369-375.
Kuang, J. H., Sheen, M. T., Wang, Z. C., Wang, G. L. and Cheng, W. H., 2001, "Post-weld-shift in Dual-in-line Laser Package," IEEE Transactions on Advanced Packaging, Vol.24, No.1, pp. 81-85.
Labudovic, M. and Burka, M., 2003, "Finite Element Analysis of Post-weld Shift During Fiber Pigtail of 980nm Pump Lasers," IEEE Transactions on Advanced Packaging, Vol.26, No.1, pp. 41-46.
Liao, T. T. and Lin, P. D., 2003, "Analysis of Optical Elements with Flat Boundary Surfaces," Applied Optics, Vol.42, No.7, pp. 1191-1202.
Song, M. K., 1996, "Laser Weldability Analysis of High-Speed Optical Transmission Device Packaging," Components, Packaging, and Manufacturing Technology, Part B: Advanced Packaging, Vol.19, No.4, pp. 758-763.
Valk, B., Battig, R. and Anthamatten, O., 1995, "Laser Welding for Fiber Pig Tailing with Long-term Stability and sub Micron Accuracy," Optical Engineering, Vol.34, No.9, pp. 2675-2682.
何岳林,2004,圓柱型雷射二極體模組銲後位移量測技術之研究,碩士論文,國立中山大學機械與機電工程學系,高雄、台灣。
呂昱寬,2003,新型四角錐形光纖透鏡,碩士論文,國立中山大學通訊工程研究所,高雄、台灣。
宋欣錦,2003,蝶形雷射模組構裝銲後位移檢測,碩士論文,國立中山大學機械與機電工程學系,高雄、台灣。
沈茂田,2000,雷射二極體模組殘留應力及潛變效應之研究,博士論文,國立中山大學機械與機電工程學系,高雄、台灣。
卓信鴻,2007,"建立簡單、快速及低成本之精密機具空間定位檢測儀器",技術學刊,Vol.第二十二卷,No.第四期,pp. 307-313。
林旻進,2008,10-40 Gb/s同軸式高速雷射模組構裝之研究,博士論文,國立中山大學光電工程研究所,高雄、台灣。
邱顯桓,2004,蝶式雷射模組銲後位移與能量損失之研究,碩士論文,國立中山大學機械與機電工程學系,高雄、台灣。
洪玉璽,2005,蝶式雷射模組銲後位移量測與補償技術,碩士論文,國立中山大學光電工程研究所,高雄、台灣。
許宏崑,2008,電容式測距儀量測蝶式模組構裝之銲後位移與溝槽式扣件,碩士論文,國立中山大學光電工程研究所,高雄、台灣。
許益誠,2005,雷射模組構裝之光纖偏移量測與補償研究,博士論文,國立中山大學光電工程研究所,高雄、台灣。
黃韋凱,2003,2.5-10Gb/s高速蝶式半導體雷射模組銲後位移之研究,碩士論文,國立中山大學光電工程研究所,高雄、台灣。
劉育達,2006,非對稱光纖端面加工機構設計之研究,碩士論文,國立中山大學機械與機電工程學系,高雄、台灣。
謝銘駿,2008,雙變曲率光纖端面研磨機構設計與製造之研究,碩士論文,國立中山大學機械與機電工程學系,高雄、台灣。
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