隨著微機電系統技術之蓬勃發展，將微感測器與微致動器結合，以應用在醫學上之器官移植或作為建築物或橋樑上之嵌入式感測器，已變為可能。一般使用電池作為動能源，具環保回收問題。因此，發展利用周遭環境之振動源的自主式發電機為另一更好的選擇。
本研究成功建立振動電磁式微發電機之發電轉換模式。並利用數學軟體Mathematica模擬分析得到微發電機之發電特性。運用微機電系統技術，可製作矽基微振動片、銅製平面線圈、磁性薄膜及各元件之組裝。利用文獻上的實驗數據與理論模型互相比較來驗證此發電量轉換模式之正確性。

With the flourishing development of MEMS, it is possible to combine micro-sensors with micro-actuator and apply to the organ transplant in medical fields or as an embedded sensor on buildings or bridges. Generally batteries is are used as the kinetic energy source, but it involves the issue of recycling. Therefore, development of a self-generator utilizing vibrational source from environment is another better choice.
This study succeeds in building up the transform mode of electricity in an electro-magnetic vibration-induced micro-generator. The electricity characteristics of micro-generator are obtained by Mathematical software analysis. MEMs technology can be used to fabricate and assemble the microstructure , planar coils and magnetic films. The analytic results of maximum power and minimum volume by using a mathematics model are achieved. The validity of this model is verified by comparing the theoretical and experiment data from the literature.

謝誌……………………………………………………………………….I
中文摘要……………………………………………………………...…II
ABSTRACT…………………………………………………………….III
總目錄……………………………………………………………..……IV
圖目錄………………………………………………………………….VII
表目錄…………………………………………………………………..XI
符號說明……………………………………………………………….XII
單位一覽表…………………………………………………………....XV
尺寸符號說明……………………………………………………...…XVI
第一章 緒論……………………………………………………………..1
1-1前言……………………………………………………………..1
1-2微發電機之發展背景…………………………………………..2
1-3文獻回顧………………………………………………………..5
1-4本文之目的及架構……………………………………………11
第二章 微發電機之結構設計與分析…………………………………12
2-0前言……………………………………………………………12
2-1力學分析………………………………………………………15
2-2電磁分析……………………………………………………....24
第三章 微發電機發電特性模擬分析…………………………………33
3-1 Mathematica簡介……………………………………………..33
3-2羅倫茲力所造成發電阻尼之模擬分析……………………....34
3-2-1不考慮羅倫茲力下的發電特性………………………….34
3-2-2羅倫茲力對此系統所造成的阻尼效應………………….40
3-2-2-1利用力學分析計算k值之模擬……………………...45
3-2-2-2利用傳統懸臂樑計算k值之模擬…………………...49
3-2-3發電結果………………………………………………….52
3-2-3-1利用力學分析計算k值之發電結果………………...52
3-2-3-2利用傳統懸臂梁計算k值之發電結果……………...54
3-3微發電機振動結構之參數最佳化……………………………57
第四章 實驗結果與模擬驗證…………………………………………62
4-1微振動結構之製作………………………………………..…..62
4-1-1 雷射加工簡介……………………………………………62
4-1-2 雷射加工…………………………………………………66
4-2平面感應線圈之製作………………………………………....72
4-2-1 微線圈之製作方式………………………………………72
4-2-2 繞線技術…………………………………………………73
4-3磁性薄膜之製作………………………………………………77
4-4發電特性量測結果與討論……………………………………79
4-4-1 振動量測…………………………….……..…………….79
4-4-2 發電特性量測……………………………………………83
第五章 結論與未來展望………………………………………………86
5-1結論……………………………………………………………86
5-2未來展望………………………………………………………87
參考文獻………………………………………………………………..89

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