現今社會科技發展越來越發達，對於高速運算的需求也跟逐年上升，為了追求更高速的運算與更大的頻寬，最直觀的其中一個方法是在單位體積內放入更多的元件，但是這一方法除了使得元件電路複雜化並且要求元件體積縮小，其元件速度也受到連接金屬所造成電容電阻影響而可能導致訊號失真。許多積體電路產業為了突破此一限制，從電路傳輸轉向光路傳輸的方式。而矽光子(Silicon Photonics)和CMOS(Complementary Metal-oxide Semiconductor)製程技術有很好的相容性且具有高速且低損耗的優點以達到現今科技的要求。

矽光子的高折射率對比度能大幅縮小光子元件體積，甚至能將大量的光電調變器整合於單一晶片上來獲得更佳的調變速度。在本篇論文中使用矽光子環形光電調變器(Silicon Ring Modulator)作為主要待測元件且在高速運算上做應用，並嘗試以環形調變器產生強度調變(Intensity Modulation)與相位調變(Phase Modulation)兩種光訊號，並觀察調變器在不同操作條件下的表現與響應。

Due to the advances of modern technologies, the need of high speed operation has been increasing continuously. To pursue faster and higher operation and bandwidth, one of the simplest way is to integrate more device into the chip. However this way would require smaller devices and make an integrated circuit (IC) more complex. Thus, the speed of IC’s would be limited by the connection among devices, and the usage of metal wires may lead to RC delay and, signal distortion. As a results, replacing conventional connections by optical interconnection has become a visible to the bandwidth limit. In addition, Silicon Photonics have good compatibility with CMOS (Complementary Metal-oxide Semiconductor) processing and the advantage of high speed and low loss, such that it is a key technology of cost-effective optical interconnection.

Thanks to high refractive index contrast of Silicon Photonics, the size of silicon-based devices is small, and therefore, the density and speed of such devices can be high. In this thesis, we use Silicon Ring Modulator to be our main DUT (Device Under Test) for high speed applications. In addition to Intensity Modulation, the ring modulator is also used to realize Phase Modulation. According to the measurement, the performances of ring modulator under different operation conditions are analyzed.

論文審定書 i
致謝 ii
摘 要 iii
Abstract iv
目錄 v
圖次 vii
第一章 緒論 1
1.1矽光子學 1
1.1.1 技術背景 2
1.1.2 積體化應用 4
1.2 研究動機 4
1.3論文架構 5
第二章 光電調變器原理與調變方式 6
2.1環形共振腔數學模型 6
2.2光電調變器原理 7
2.2.1熱光效應 Thermal Optics Effect 8
2.2.2電漿色散效應 Plasma Dispersion Effect 8
2.3調變方式 10
2.3.1 振幅偏移調變&差分相移調變 10
2.3.2 環形調變器調變機制 12
第三章 實驗架構與結果 15
3.1 振幅偏移調變 (ASK)-高頻測試 17
3.2 差分相移調變 (DPSK)–高頻測試 19
第四章 非線性效應 24
4.1 非線性效應 24
4.1.1 AC/DC 特性曲線 25
4.1.2 占空比 Duty cycle 32
4.2 濾波式應用 35
4.2.1 濾波器 36
4.2.2 頻譜掃描 38
第五章 結論 40
參考文獻 41

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