本研究利用電容式測距儀，直接量測蝶式雷射模組構裝時，因雷射銲接所產生之光纖頭端銲後位移(Post-weld-shift)。此電容式測距儀的優點在於，可即時量得具體之位移方向與大小。此外，輔以溝槽式鞍型扣件於模組構裝，將可以雷射鎚回技術(Laser Hammering Technique)，量化補償銲後位移，有效地恢復耦光功率。銲後位移的減少是開發低成本、高效能半導體雷射模組的重要議題。因此，在可即時量測與具體量化補償下，將有助於提昇雷射模組構裝之良率。
相較以往的CCD影像擷取量測銲後位移之技術，其解析度為0.7μm，本實驗中使用電容式測距儀之感測器，用以感測光纖金屬套管的銲後位移，其解析度為25.4nm，精確度可達0.1μm，且於構裝模組過程中，可即時偵測到位移值，輔助構裝參數的調整，進而降低銲後位移，減少耦光功率的損失。在本論文的量測結果中，量得銲後位移為X=0.15μm、Y=-4.58μm時，其耦光效率為43.19%，此位移量與耦光效率相當吻合。

In this study, the capacitance displacement system (CDS) is employed to measure the post-weld-shift (PWS) induced by laser welding in butterfly type laser module package. The advantage of CDS is able to simultaneously and immediately measure the direction and the magnitude of PWS. Furthermore, with the aid of notch clip, the PWS can efficiently and quantitatively be compensated by laser hammering technique to regain the coupling power. Reduction of the PWS is an important issue in developing low-cost and high-performance laser modules. The package yield of laser modules can be imp roved due to the real-time measurement and quantitative compensation.
In comparison with the high-magnification camera with image capturing system (HMCICS) having 0.7μm resolution, the capacitance sensor achieves 25.4nm and 0.1μm in its resolution and accuracy, respectively. Besides, during the package procedure, the real-time displacement detection can be used to adjust the package parameters. As a result, the PWS is reduced that contributes to less coupling power loss. After welding, the result reveals that the PWS was measured as X=0.15μm and Y=-4.58μm, while the coupling power is 43.19%.

第一章 緒論 1
1-1 研究背景------------------------------------------------------------- 1
1-2 研究目的------------------------------------------------------------- 4
1-3 文獻回顧------------------------------------------------------------- 5
1-4 論文架構------------------------------------------------------------- 5
第二章 雷射銲接系統簡介 7
2-1 雷射銲接原理------------------------------------------------------- 7
2-2 雷射銲接系統------------------------------------------------------- 8
第三章 蝶式雷射模組結構與構裝程序 16
3-1 蝶式雷射模組結構------------------------------------------------- 16
3-2 蝶式雷射模組構裝流程------------------------------------------- 19
第四章 銲後位移之量測與補償結果 26
4-1 電容式測位移系統------------------------------------------------- 26
4-1-1電容式測位移系統工作原理--------------------------------- 26
4-1-2 系統組件介紹與架設----------------------------------------- 27
4-2 銲後位移的成因---------------------------------------------------- 36
4-3 金屬套管表面特性量測實驗------------------------------------- 37
4-4 校正曲線------------------------------------------------------------- 41
4-4-1校正步驟--------------------------------------------------------- 41
4-5 量測方法------------------------------------------------------------- 43
4-5-1 量測方法之建立----------------------------------------------- 43
4-5-2 量測步驟-------------------------------------------------------- 46
4-5-3 數據處理方法-------------------------------------------------- 47
4-6 補償方法------------------------------------------------------------- 52
4-7 量測結果與補償結果---------------------------------------------- 55
4-8 結果分析------------------------------------------------------------- 61
4-9 準確性的探討------------------------------------------------------- 62
第五章 結論 66
5-1 結論------------------------------------------------------------------- 66
5-2 未來工作與後續研究建議---------------------------------------- 67
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