本實驗將以化學氣相沉積法利用Vapor-Liquid-Solid機制(VLS)於LiAlO2基板得到LiAl5O8奈米級螢光粉體：以碳與氧化鋅混合之粉體於高溫下進行碳熱還原反應(Carbothermal reduction)，在此反應下產生的一氧化碳將把LiAlO2基板分解，所分解的產物被基板上之金點吸附而成長出LiAl5O8奈米柱。
在本實驗中將利用金點大小、載送氣流改變以及反應溫度的不同來比較對LiAl5O8奈米柱成長的影響：在金點越大的情況下所成長的奈米柱直徑也會隨之變粗，載送氣流的增加將使的奈米柱的長度增加，而反應溫度的增加也將使奈米柱長度增加，然而反應溫度在超過946oC後奈米柱反而較短。在此實驗中將利用穿透式電子顯微鏡以及X-ray繞射分析儀來判斷奈米柱成長方向，並研判LiAl5O8奈米柱是延著(111)方向來成長。

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目錄
第一章 緒論 1
1-1 引言 1
1-2 LiAl5O8的應用 2
1-3 奈米級螢光粉的研究 5
1-4 研究動機 5
第二章 理論基礎 6
2-1 Vapor-Liquid-Solid(VLS)成長機制 6
2-2文獻回顧 11
第三章 樣品成長 16
3.1 實驗介紹 16
3.2 實驗準備步驟 17
3.3 實驗製程參數 19
3.4 量測系統介紹 22
3.4.1 場發射掃描式電子顯微鏡 (Field Emission Scanning Electron Microscope, TF-SEM) 22
3.4.2 X光繞射分析儀 (X-ray diffraction, XRD) 22
3.4.3 穿透式電子顯微鏡 (Transmission Electron Microscope, TEM) 22
第四章 實驗結果與討論 23
4-1 改變鍍金時間對LiAl5O8成長之影響 23
4-2改變氣體流量對LiAl5O8成長之影響 25
4-3 改變溫度對LiAl5O8成長之影響 25
4-4 LiAl5O8奈米柱TEM分析 32
4-5 X-ray繞射結果分析 38
第五章 結論 43
參考文獻 45

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