在微機電的領域當中，壓電微致動器之模擬設計較一般熱驅動及靜電驅動微致動器複雜，主要是因為壓電材料偶合之計算困難，但是壓電材料的特性及優點受到大多數使用者所需求及依賴；一般就壓電微致動器的設計模擬，長久以來並無一簡易的方法來達成及做性能改善，只使用較沒有效率的試誤法來嘗試。
本篇論文研究著重於壓電式微幫浦之出力模擬研究，利用ANSYS軟體為架構，建立起整體微致動器及微幫浦組件的模擬系統，模擬微幫浦因壓電特性所產生的電壓值，所造成各種不同的共振頻率、背壓及流量等；建立驅動頻率、最大背壓與最大流量的關係，闡述觀察所得到的現象。

Among the MEMS field, the design and simulation of piezoelectric micro-actuators are difficult as compared to thermal micro-actuators and electrostatic micro-actuators. The main reason of the piezo-electric material coupling effect is difficult to calculate. However the piezo-electric material has several advantages and characteristics for designing micro-actuators. Moreover, the design is usually done by the experimental or try-and-error method which is not so effective. It should be noted that there is not a simple method already developed for the design and simulation of the piezo-electric micro-actuators.
In this research we proposed to use the software of ANSYS for the simulation of piezo-electric micro-pump. Simulation of force output of piezo-micro-pump can use ANSYS software to establish the simulation system of piezo-micro-pump. The micro-pump will have different resonance frequency, back-pressure and fluid due to piezo-electric characteristic. In this study, the author used a square, rectangle and circle geometric shape to simulate the result, each geometric shape has four different kinds of size. As a result, there are twelve groups of different simulation results. We are able to using the chart to present and explain the relation between resonance frequency and displacement.

目錄.........................................................................................................Ⅰ
圖目錄.....................................................................................................Ⅳ
表目錄.....................................................................................................Ⅷ
中文摘要.................................................................................................Ⅸ
英文摘要................................................................................................ Ⅹ
第一章 緒論......................................................................................1
1-1 背景介紹.................................................................................1
1-2 研究動機.................................................................................2
1-3 研究目的.................................................................................3
1-4 文獻回顧.................................................................................4
1-4-1 靜電式...............................................................................5
1-4-2 形狀記憶合金..................................................................9
1-4-3 電磁式..............................................................................12
1-4-4 熱驅動式.........................................................................14
1-4-5 壓電式.............................................................................17
第二章 壓電原理............................................................................22
2-1 壓電簡介................................................................................22
2-2 壓電理論................................................................................27
2-2-1 概論.................................................................................27
2-2-2 壓電材料........................................................................28
2-2-3 壓電方程式....................................................................30
2-3 壓電諧振體............................................................................35
2-4 微幫浦....................................................................................37
第三章 模擬與分析.......................................................................40
3-1 壓電模擬................................................................................40
3-1-1 概論.................................................................................40
3-1-2 ANSYS簡介....................................................................42
3-2 模擬與分析............................................................................45
3-2-1前處理...............................................................................45
3-2-2分析...................................................................................46
3-2-3後處理...............................................................................46
第四章 結果與討論......................................................................48
4-1模擬結果.................................................................................48
4-1-1正方形.............................................................................49
4-1-2長方形..............................................................................58
4-1-3圓形...................................................................................67
4-2討論與分析.............................................................................76
4-2-1應變與位移關係式.........................................................78
4-2-2應力與位移關係式.........................................................79
4-2-3矩形(d31型)致動器方程式..............................................80
4-2-4圓形致動器方程式.........................................................81
4-2-5結果分析..........................................................................83
第五章 結論與展望........................................................................88
參考文獻.............................................................................................89

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