本研究使用自行研製之微電解加工試驗機探討不同供應電壓以及不同工件最高位置對工件外形之影響。將外圍包覆絕緣物，且尖端僅露出直徑50μm之鐵針做為陰極，以及作為陽極且可上下往復運動之直徑200μm鎢棒工件浸入含2wt.%之氫氧化鈉電解液中進行電解加工。
實驗結果發現，由於工件於加工過程中長度以及直徑皆會改變，因此工件於每次上下之往復運動時，需手動調整工件末端最高位置以及加工間隙以得到外觀均勻之圓鎢棒。此外，當供應電壓較大時，工件移除率較快，但是長度與直徑變化皆難以控制。反之，當供應電壓較小時，工件移除率較慢，但是長度與直徑變化皆可控制。最後，先以高供應電壓快速加工工件後，再以低供應電壓進行電解加工，即可加工出直徑約2μm，長度約200μm，長度直徑比約為100 之高長度直徑比之均勻圓棒。

In the study, a self-developed electrolytic micro-machining tester is employed to investigate the effects of the supply voltage and the highest position of the workpiece relative to the tool on the geometry of the tungsten rod. The peripheral surface of the iron needle (tool) is insulated by an insulator and its tip with a diameter of 50μm is exposed to the electrolyte as a cathode. The tungsten rod (workpiece) with 200μm in diameter reciprocates as an anode. Both the cathode and the anode are dipped into an aqueous electrolyte of 2wt % sodium hydroxide to proceed electrochemical machining.
Experimental results show that since the length and the diameter of the workpiece are varied during the machining process, it is necessary to manually adjust the highest position and the gap between the workpiece and the tool in each reciprocating motion to achieve a uniform tungsten rod. Moreover, because of the higher removal rate of the workpiece at the higher supply voltage, it is hard to control the geometry of the workpiece. On the contrary, the geometry of the workpiece can be controlled at the lower supply voltage. Finally, the workpiece is first machined at the higher supply voltage, and then the supply voltage is switched to the lower one to achieve a uniform tungsten rod with 2μm in diameter and 200μm in length, or 100 in aspect ratio.

總 目 錄
總目錄......................................................................................I
圖目錄......................................................................................IV
表目錄......................................................................................VIII
中文摘要..................................................................................IX
英文摘要..................................................................................X

第一章 緒論..........................................................................1
1.1 前言..................................................................................1
1.2 文獻回顧..........................................................................3
1.2.1 電化學加工文獻............................................................3
1.2.2 探針與微電極之製作....................................................6
1.3 研究目的..........................................................................12
第二章 實驗設備及實驗方法..............................................13
2.1 實驗設備...........................................................................13
2.1.1 微電解加工試驗機系統............................................13
2.1.2實驗資料蒐集分析與訊號量測設備.........................17
2.1.2.1數位式儲存示波器..............................................17
2.1.2.2高倍率顯微鏡設備..............................................17
2.1.2.3量測與資料收集分析..........................................22
2.2 實驗試片之材料特性與幾何形狀.................................23
2.2.1鎢針之材料特性與幾何形狀.....................................23
2.2.2電解液的選擇.............................................................24
2.2.3 工具電極....................................................................26
2.3 試片處理...........................................................................28
2.3.1 微鎢棒工件................................................................28
2.3.2 工具電極....................................................................29
2.4 實驗條件設定...................................................................30
2.5 實驗步驟...........................................................................32
2.5.1 NaOH電解液之調配................................................32
2.5.2 電流波形之量測.......................................................33
2.5.3 實驗流程...................................................................34
第三章 前導實驗.................................................................37
3.1 加工間隙對工件外形之影響..........................................38
3.2 不同工件末端面之最高位置對工件外形之影響..........40
3.3 主軸轉速之影響..............................................................44
第四章 實驗結果與討論........................................................48
4.1 不同加工方式對工件之直徑與錐度變化.......................48
4.2 不同供應電壓對工件外形之影響...................................56
4.2.1 長度方向之縮短量....................................................56
4.2.2 直徑方向之變化........................................................61
4.2.3 兩階段供應電壓加工................................................66
4.3 工件末端最高位置之影響...............................................69
4.4 高長度直徑比之微鎢針之製作.......................................79
第五章 結論與未來研究方向.................................................83
5.1 結論...................................................................................83
5.2 未來研究方向...................................................................85
附錄A.......................................................................................86
附錄B.......................................................................................89
參考文獻..................................................................................96

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