本實驗利用去合金法腐蝕方法製備多孔的金屬玻璃薄膜與塊狀金屬玻璃。金屬玻璃薄膜的製備是利用ZrCuTi合金靶與純Ta靶共濺鍍而成，而塊狀金屬玻璃的製備則是採用兩種成分的金屬玻璃粉末, Zr53Cu30Ni9Al8和 Ti40Cu36Pd14Zr10，將Zr基與Ti基金屬玻璃粉末於此兩種材料重疊的過冷區間溫度燒結。為了製備多孔性的結構，將材料利用0.1莫爾濃度的硝酸水溶液經由電化學處理作選擇性腐蝕來製成，材料腐蝕後其金屬玻璃的性質與表面形貌可利用X光繞射與掃描式電子顯微鏡作觀測。近來的研究製出了孔洞大小約10~30微米，孔洞率為43%的多孔性金屬玻璃。將來改變粉末大小與體積分率可分別將孔洞大小提升至300~500微米，孔洞率提升至70~80%左右。

The processing and characterization of thin film metallic glasses (TFMGs) and bulk metallic glass foams (BMGFs), prepared by the dealloying corrosion process, have been studied. The TFMGs were fabricated by the co-sputtering with the Zr65Cu25Ti10 (wt%) alloy target and the pure Ta target. For BMG, there are two kinds of amorphous metallic powders adopted, namely, Zr53Cu30Ni9Al8, and Ti40Cu36Pd14Zr10. The Zr- and Ti-based powders were sintered at the temperature that Zr- and Ti-based powders overlap their supercooled regions. To fabricate the porous structure, these materials were selectively dissolved using electrochemical treatments in 0.1 M HNO3 solution. The glassy nature and the pore morphology of the corroded materials were confirmed by X-ray diffraction and scanning electron microscopy. In the current study, the pore size is about 10-30 μm and the porosity volume faction is about 43%. By using different combinations of the powders size and volume fraction, the resulting pore size and porosity fraction can be upgraded to 200-500 μm and 60-80%, respectively.

Content i
List of Tables and Figures iv
中文摘要 x
Abstract .xi
Chapter 1 Introduction 1
1-1 Amorphous alloys or metallic glasses 1
1-2 Evolution of thin film metallic glasses (TFMGs) 3
1-3 Characteristics of Ta and its biomedical application 7
1-4 Sputter process 8
1-4-1 Introduction to sputtering 8
1-4-2 Sputtering systems 11
1-5 Development of Ta- and Zr-rich TFMGs with immiscible tantalum 15
1-6 Metallic glass powders 18
1.6.1 Metallic glass powders fabrication 18
1.6.2 Glass transition and crystallization temperatures 19
1-7 Corrosion 19
1-7-1 Introduction 19
1-7-2 The corrosion behavior of Zr and Ta 22
1-8 Dealloying 22
1-9 Motivation 24
Chapter 2 Experimental Procedures 27
2-1 Materials 27
2-2 Sample preparation 28
2-2-1 Film preparation 28
2-2-2 Sintering 29
2-3 Property measurements and analyses 30
2-3-1 X-ray diffraction (XRD) 30
2-3-2 Differential scanning calorimetry (DSC) 30
2-3-3 Optical microscopy (OM) 31
2-3-4 Scanning electron microscopy (SEM) and energy dispersive spectrometry (EDS) 31
2-3-5 Compression testing 32
2-3-6 Electrochemical analysis 33
2-3-7 Porosity measurement 34
Chapter 3 Results and Discussion 36
3-1 Sample preparation 36
3-1-1 Thin film metallic glasses (TFMGs) 36
3-1-2 Bulk metallic glass foams (BMGFs) 36
3-2 Electrochemical tests 39
3-3 XRD analysis 41
3-4 SEM SEI and BEI observations 42
3-4-1 Thin film metallic glasses (TFMGs) 42
3-4-2 Bulk metallic glass foams (BMGFs) 42
3-5 The porosity measurement 44
3-6 Simulated body-fluid and electrochemical biocompatibility tests 44
Chapter 4 Conclusion 47
References 49
Table 53
Figures 54-97

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