本論文主要研究一平面旋轉電磁式微發電機之設計、製作、測試及應用，期能獲得高能量輸出。微發電機主要由兩部分組成，一為多層平面銀微線圈，另一部份是多極銣鐵硼硬磁。此研究提出一創新微線圈製程-低溫共燒陶瓷(Low temperature co-fired ceramics, LTCC)-來製作微發電機之線圈，LTCC微線圈製程技術比起LIGA (Lithographie Galvanoformung Abformung)、LIGA-like和繞線製程更節省成本及時間。研究使用有限元素分析法設計分析三種基本幾何形狀的微線圈分別是圓形、矩形及扇形，來獲得發電機之電磁資訊，並且建立此三種形狀微線圈之數學解析解，期能節省實驗時間與成本。經設計之尺寸將由LTCC製程製作微線圈，其線寬線徑均為100 μm，層數為兩層，搭配燒結製程所製作的銣鐵硼硬磁，外徑為9 mm，厚度為700 μm，所組成的發電機原型整體體積小於9×9×1 mm3，由自組裝驅動裝置驅動並進行量測，實驗結果顯示扇形線圈有最大發電量1.89 mW且在轉速為13,325 rpm時有感應電壓205.7 mV，實驗結果與模擬分析及解析解分析均有相同的趨勢，進而驗證模擬與數學分析的可行性。驗證LTCC製程製作微發電機之可行性後，設計製作一低轉速的平面旋轉電磁式能量擷取系統，期能應用於自行車發電系統上。此能量擷取系統由多層LTCC線圈、多極銣鐵硼硬磁，以及用來提升磁效能的軟鐵組成，並使用有限元素法搭配田口法設計能量擷取系統的最佳參數；LTCC線圈為10層與20層，線寬200 μm，線徑100 μm；硬磁為28極，外徑50 mm，厚度2 mm，磁場強度為1.4 Tesla；能量擷取系統原型總體積約為50×50×3 mm3 (20層線圈+硬磁+線圈與硬磁距離)。最後測試20層線圈在轉速為300rpm下感應電壓為1.539 V，且在外阻為740 Ω時，有0.788 mW 的發電量且其發電效率為26.62%；並實際接200顆LED((VF) <2.2 V、20 mA)在轉速為250 rpm時即可全部點亮，可應用於自行車光源上。

This study focuses on the design, fabrication, test and application of in-plane rotary electromagnetic micro-generator to obtain a high power output. The micro-generator comprises multilayer planar low temperature co-fired ceramics (LTCC) Ag micro-coil and multipole hard magnet of Nd/Fe/B. Finite element simulations have been carried out to observe electromagnetic information. The study also establishes analytical solutions for the micro-generator to predict the induced voltage. Three different configurations of planar micro-coils investigated, which are sector-shaped, circle-shaped, and square-shaped micro-coils. A prototype of the micro-generator is as small as 9×9×1 mm3 in volume size. The experimental results show that the micro-generator with sector-shaped micro-coil has the highest power output of 1.89 mW, and the effective value of the induced voltage of 205.7 mV at 13,325 rpm is achieved. In application, this study designed and fabricated a planar rotary electromagnetic energy harvester with a low rotary speed for use in bicycle dynamos. Finite element analysis and the Taguchi method were used to design this dynamo system. LTCC technology was applied to fabricate Ag planar multilayer coils with 20 layers. A 28-pole magnet Nd/Fe/B with an outer diameter of 50 mm and a thickness of 2 mm was also sintered and magnetized. This harvester system was approximately 50×50×3 mm3 in volume. The experimentally induced voltages for 20-layer coils were 1.539 V at the rotary speeds of 300 rpm. The power output was 0.788 mW with an external resistance load of 740 Ω, and the efficiency was 26.62%. This harvester is capable of powering a minimum of 200 light emitted diodes (LEDs) (forward voltage (VF) <2.2 V and 20 mA) using a rotary speed of 250 rpm, and can be used for bicycle dynamo lighting.

中文摘要 I
Abstract II
Contents III
List of Figures V
List of Tables IX
Nomenclature X
Abbreviations XIII
Chapter 1 Introduction 1
1-1 Piezoelectric, thermoelectric and electrostatic generators 2
1-2 Micro-electromagnetic generators 3
1-2-1 Vibrational electromagnetic generators 3
1-2-2 Rotary electromagnetic generators 4
1-3 LTCC 8
1-4 Finite element simulation and analytical solutions 9
1-5 Motivation 10
1-6 Introduction of the dissertation 11
Chapter 2 Design, simulation and analytical theorem 13
2-1 LTCC micro-generator 13
2-2 Simulation 15
2-3 The analytical theorem of micro-generator electromagnetism 18
2-3-1 Simplification 20
2-3-2 Analysis of vector magnetic potential 22
2-4 The analytical solutions for power generation 23
Chapter 3 Fabrication 32
3-1 LTCC process 35
3-2 Magnet process 37
3-3 Measurement set up 38
Chapter 4 Results and discussions 40
4-1 Design 40
4-2 Analytical solutions 50
4-3 Fabrication 55
Chapter 5 Application 73
5-1 Design and analysis 73
5-2 Finite element analysis 74
5-2-1 One-factor-at-a-time method 79
5-2-2 Taguchi’s orthogonal arrays method 79
5-3 Fabrication 80
5-4 Results and discussion 84
5-4-1 One-factor-at-a-time method 84
5-4-2 Taguchi method 88
5-4-3 Fabrication 90
5-4-4 Comparison of measurement and simulation 94
Chapter 6 Conclusions 103
References 105

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