本研究為奈米壓印探討半節距200nm以下之矽柵型結構模仁與高分子材料(H-PDMS)間的抗沾黏力技術。我們以FIB製作不同深度及寬度之奈米溝槽結構模仁，在這些模仁對於高分子材料H-PDMS作軟微影翻模製程時，為了得到成型性完整的H-PDMS軟模仁，並避免因為其界面間沾黏問題所帶來的模仁缺陷問題，我們需要在矽模仁和PDMS模仁間鍍上一層抗沾黏層。在這裡我們用三種方法鍍上抗沾黏層，分別為:液相浸潤、氣相蒸鍍、摻氟類鑽碳薄膜。其中液相浸潤和氣相蒸鍍使用PFOTCS當作我們的脫模劑，並量測期接觸角以得知其抗沾黏能力；而摻氟類鑽碳薄膜除了使用水的接觸角量測個別樣品的抗沾黏能力外，另外還使用了原子力顯微鏡量測各別薄膜的表面沾黏力、並比較各薄膜水的接觸角大小。以這樣的方式我們可以得到並探討表面沾黏力較小的鍍抗沾黏膜方式，以得到成型性良好的模仁。

In this study, it was nanoimprint focused on the anti-adhesion technique between the grating structure silicon molds below 200nm half-pitch and polymer materials (H-PDMS). The nano-groove structure molds with different depths and widths were made by FIB. During the process of molding by soft-lithography, an anti-adhesion layer needed being plated between the silicon and PDMS mold, which was in order to get completely formed H-PDMS soft mold and prevent defective mold caused by the adhesion problem on the surface. There were three kinds of method of plating anti-adhesion layer which were the liquid immersion, vapor deposition, and fluorine doped DLC film. The PFOTCS was used as mold releasing agent in the methods of liquid immersion and vapor deposition, and the contact angle was measured to realize the ability of anti-adhesion. In the method of fluorine doped DLC film, in addition to measuring the anti-adhesion ability for each sample through contact angle with water, the AFM was also applied to measure the degree of adhesion on the surface for each film. And the contact angles with water between each film were also compared. The methods of plating anti-adhesion film with lower degree of adhesion on the surface could be acquired and discussed by means of the above-mentioned ways to fabricate the molds with good formability

誌謝 I
目錄 II
表目錄 V
圖目錄 VI
中文摘要 IX
Abstract X
第一章 緒論 1
1.1 前言 1
1.2 文獻回顧 2
1.2.1 奈米壓印簡介 2
1.2.2 抗沾黏層的作用力(固態-固態) 3
1.2.2.1 簡介 4
1.2.2.2 共價鍵 8
1.2.2.3 離子鍵 8
1.2.2.4 金屬鍵 9
1.2.2.5 氫鍵 10
1.2.2.6 凡德瓦鍵 11
1.2.3 抗沾黏層的重要性 11
1.2.3.1 液態自組裝 13
1.2.3.2 氣態自組裝 13
1.2.3.3 摻氟類鑽碳薄膜抗沾黏層 14
1.3 研究動機與目的 15
第二章 實驗材料與儀器介紹 16
2.1 實驗儀器 16
2.1.1 場發射型掃描式電子顯微鏡(JEOL-6330 SEM) 16
2.1.2 掃描探針式電子顯微鏡(AFM) 18
2.1.2.1 AFM表面作用力量測原理[15, 50] 20
2.1.2.2 AFM表面作用力量測步驟 24
2.1.2.3 AFM表面作用力量測資料處理 26
2.1.3 接觸角量測 32
2.2 實驗材料 33
2.2.1 脫模劑-PFOTCS 33
2.2.2 H-PDMS 33
第三章 實驗設計 34
3.1 氣相及液相之抗沾黏層脫模效果探討 34
3.1.1 實驗簡介 34
3.1.2 探討項目 34
3.1.3 實驗步驟 35
3.2 摻氟類鑽碳之抗沾黏層脫模效果探討 37
3.2.1 實驗簡介 37
3.2.2 探討項目 37
3.2.3 實驗步驟 37
第四章 實驗結果與討論 40
4.1 液相浸潤和氣相蒸鍍抗沾黏層 40
4.2 摻氟類鑽碳薄膜抗沾黏層 45
4.3 氣相蒸鍍壓印結果以及類鑽碳薄膜和摻氟類鑽碳薄膜壓印結果比較 55
第五章 結論與未來期許 63
5.1 結論 63
5.2 未來期許 64
參考文獻 65

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50 國家實驗研究院儀器科技研究中心, 奈米檢測技術, ISBN:978-986-81409-4-3