本論文的目的是希望可以利用微拉曼(micro Raman)量測測量出載子密度。本實驗主要用來量測的樣品為兩個系列的三族氮化物半導體：不同程度矽參雜的氮化銦薄膜，最高載子密度的樣品為1.90 X 1019 cm-3；不同程度矽參雜的氮化鎵薄膜，最高載子密度的樣品為4.17 X 1019 cm-3。在室溫下進行微拉曼量測，針對樣品微拉曼光譜量測中的縱向光支頻聲子與電漿偶合模態(LOPCM：LO phonon-plasmon coupled modes)隨載子密度變化改變之現象加以分析和模擬，並將其計算出來的結果與霍爾量測(Hall measurement)測出的載子濃度比較討論。

The purpose of this thesis is to find out carrier concentration in nitride semiconductors by micro Raman measurements. We focus on the Raman measurements of two different III-nitride semiconductors doped with Si. First series is narrow band gap InN films with varying carrier concentration (ne). The highest (ne) in this series is 1.9 X 1019 cm-3. The second series is wide band gap GaN films, with highest (ne) of 8.0 X 1019 cm-3.From the room temperature Ramam measurements ,it is observed that the L- LOPCM (lower branch of longitudinal-optical phonon-plasmon coupled modes) depends on the carrier concentration. We focus the further analysis of this result and try to extract the carrier concentration and compare with electrical measurements.

目錄

中文摘要------------------------------------------ 2
Abstract------------------------------------------ 3
圖列---------------------------------------------- 6
表列---------------------------------------------- 9
第一章 序論
1.1 引言------------------------------------- 10
1.2 拉曼簡介--------------------------------- 11
1.3 氮化銦簡介------------------------------- 12
第二章 實驗系統與原理及公式介紹
2.1分子束磊晶成長(MBE) ---------------------- 14
2.1.1分子束磊晶成長原理------------------ 14
2.1.2分子束磊晶成長系統------------------ 15
2.1.3 樣品成長條件和參數----------------- 19
2.2 掃描式電子顯微鏡(SEM) ------------------- 21
2.2.1掃描式電子顯微鏡原理---------------- 21
2.2.2掃描式電子顯微鏡系統---------------- 25
2.2.3樣品掃描式電子顯微鏡圖-------------- 24
2.3 高解析度X光繞射儀(HR-XRD) --------------- 28
2.3.1高解析度X光繞射儀原理-------------- 28
2.3.2高解析度X光繞射儀系統-------------- 29
2.3.3 樣品高解析度X光繞射儀圖----------- 31
2.4 霍爾量測(Hall measurement) --------------- 32
2.4.1霍爾量測原理------------------------ 32
2.4.2霍爾量測系統------------------------ 35
2.4.3霍爾量測測出的樣品載子濃度---------- 38
2.5 微拉曼量測(micro-Raman)------------------ 40
2.5.1微拉曼量測原理---------------------- 41
2.5.2微拉曼量測系統---------------------- 45
2.5.3 LOPCM原理及公式-------------------- 49
第三章 拉曼實驗結果與討論
3.1 不同載子濃度氮化銦的微拉曼光譜圖--------- 52
3.2 不同載子濃度氮化鎵的微拉曼光譜圖--------- 63
第四章 結論-------------------------------------- 69
Reference List----------------------------------- 71
附錄 A 氮化銦奈米柱的微拉曼光譜圖--------------- 74

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