本論文主要探討以close-space sublimation(以下簡稱CSS)法所鍍製的CdTe薄膜層及其性質，並嘗試製作新結構的CdTe薄膜太陽能電池，其結構依序為Al:ZnO(以下簡稱AZO)、CdS、CdTe、CIGS以及Mo層，參考文獻中最高效率的CdTe的薄膜太陽能電池結構，以較高穿透率的AZO取代cadmium tin oxide(以下簡稱CTO)，並加入Cu(In,Ga)Se2(以下簡稱CIGS)層，增加元件能帶的梯度以提高效率，另外CdTe薄膜太陽能電池的背電極因CdTe能隙值高故常以high-doping的方式摻入Cu或其合金以達成歐姆接觸，但長時間使用會使doping效果降低，因此改以Mo背電極與CIGS層搭配以期能解決此問題，並以模擬軟體模擬比較新結構及原結構的效率。
以濺鍍法鍍製AZO薄膜，其電阻率可達1.0×10-3Ω-cm，穿透率達85%以上，以CSS法鍍製CdTe薄膜，經量測後部分晶粒大小可達5μm，mobility達15.72(cm2/V-s)，Eg為1.48eV。以濺鍍法製作CdTe薄膜，晶粒大小可達2μm，並製作superstrate結構的太陽能電池元件，量測其Ｉ-Ｖ圖，但發現元件的串連電阻過高且漏電流大，需待後續努力提高薄膜及界面的品質以製造出好的元件。

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摘要 I
目錄 II
圖目錄 IV
圖表目錄 V
第一章 簡介 1
第二章 文獻回顧與疊層設計 4
2.1 CdTe薄膜太陽能電池 4
2.2 新結構元件的設計 7
2.3 各層膜的性質 12
2.3.1 AZO層 12
2.3.2 CdS層 12
2.3.3 CdTe薄膜 13
熱處理的好處: 14
2.3.4 CuInSe2層 15
2.3.5 Mo層 16
2.4 研究目的 16
第三章 實驗方法 18
3.1 元件製作流程 18
Superstrate法 18
Substrate法 19
3.2 AZO層 19
3.3 CdS層 20
3.4 CdTe層 20
3.5 CIS層 23
3.6 Mo層 23
第四章 實驗結果與討論 25
4.1 AZO薄膜製程 25
4.2 CdTe薄膜CSS法製程 27
XRD分析 29
4.2.1 製程條件最佳化 30
熱處理溫度的影響 30
熱處理時間的影響 31
蒸鍍CdCl2於熱處理的影響 34
穿透光譜與能隙 35
4.2.2 成果 36
4.3 元件製作 38
Substrate元件製程： 38
Superstrate元件製作： 39
成果： 41
第五章 結論 43
參考資料 44

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