拉曼光譜技術具有快速、無損及靈敏度高等優點，已經成為檢測石墨烯樣品和研究其缺陷的最主要工具之一。透過石墨烯拉曼光譜的D-band及拉曼頻移位於1450cm-1和1530cm-1的兩個邊緣聲子模式，可以了解石墨烯薄膜的缺陷或無序的程度。本論文以電子束微影與剝離技術製作奈米等級的金屬光柵，而後使用化學氣相沉積法生長石墨烯層並轉印至金屬光柵上，利用光柵作為耦合表面電漿的媒介，用來產生表面增強拉曼散射效應。藉由觀察石墨烯拉曼光譜的D-band、G-band及1450cm-1和1530cm-1兩個子峰強度在不同光柵週期間的變化，探討光柵的週期大小與拉曼峰強度和峰位間的關係。同時比較黃金光柵與鎳光柵結構上的表面電漿模態，及光柵結構與平整薄膜上石墨烯拉曼訊號間的差異，以驗證表面增強拉曼散射效應的存在。另外也討論一些可能會影響強度的因素，如激發雷射的波長與偏振等;最後探討石墨烯邊緣聲子模式作為檢測石墨烯邊緣缺陷的應用價值。

Raman spectroscopy has become one of the most important tools for characterizing and studying defect in graphene, due to its rapid, non-destructive and sensitive technique. Through the D-band and two edge-phonon modes (1450cm-1 & 1530cm-1) of graphene Raman bands can understand the degree of defect or disorder of graphene films. In this thesis, we prepared the nano-metal gratings by E-beam lithography and lift-off process, then using chemical vapor deposition growth of graphene layers and transfer to the metal gratings. Use the grating as medium of surface plasmon coupling to produce SERS effect. By observing the change of D-band、G-band and two sub-peaks intensity during different periods of gratings of Raman spectrum of graphene, explore the relationship between the size of the grating period and the Raman peak intensity and position between peaks. In the meanwhile to compare the surface plasmon mode while gold and nickel grating structure, and also the differences of graphene Raman signals between grating structure and flat film to prove the existence of SERS effect. Besides, we also discussed certain factors which may affect intensity, such as laser excitation wavelength and polarization, and so on. Finally, we discussed graphene edge-phonon mode as the application of graphene defect detection.

誌謝 i
摘要 ii
Abstract iii
表目錄 vi
圖目錄 vii
第一章 緒論 1
1.1 前言. 1
1.2 文獻回顧與研究動機 2
1.3 論文架構 3
第二章 表面電漿波 4
2.1 金屬的光學性質 4
2.2 金屬平面之表面電漿波模態[12] 7
2.3 具起伏性金屬結構之表面電漿波模態[18] 14
2.4 不同金屬材料之表面電漿波模態 15
第三章 拉曼光譜學 18
3.1 拉曼散射[19] 18
3.2 表面增強拉曼散射 23
3.3 石墨烯之拉曼光譜 26
3.3.1 石墨烯之原子結構 26
3.3.2 石墨烯之拉曼光譜 29
第四章 樣品製備與量測方法 36
4.1 樣品製備與SEM觀測 36
4.1.1 金屬光柵基板之製備 36
4.1.2 石墨烯之製備[33] 38
4.1.3 SEM觀察表面型態 40
4.2 量測架構與方法 47
4.2.1 拉曼光譜量測方法 47
第五章 結果與討論 48
5.1 拉曼光譜分析 48
5.1.1 黃金光柵表面之石墨烯拉曼光譜分析 48
5.1.2 黃金光柵表面之SERS增強分析 50
5.1.3 驗證石墨烯拉曼子峰之成因及其SERS增強分析 52
5.2 表面電漿模態之模擬與分析 56
第六章 結論 59
參考文獻 60

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