本研究提出高C/P值(成本/效能)的酸鹼值感測器開發與特性研究，以延伸閘極場效電晶體(Extended-Gate Field Effect Transistor）作為感測架構，以觸控薄膜（Touch Panel Film）作為氫離子的感測元件，展現出高效能的感測特性。採用工業用捲對捲濺鍍(Roll to Roll Sputtering)製程進行觸控薄膜研製，在品質上不僅具備高均勻性及可靠度，更具備低製造成本優勢，非常適合用於現場快速及生化領域拋棄式檢測應用。觸控薄膜使用聚對苯二甲酸乙酯（PET）為基材，於基材表面上沉積多層的薄膜（銦錫氧化物/二氧化矽/五氧化二鈮），多層膜設計主要考量光學匹配性及提升層膜間附著力，研製的觸控薄膜厚度約0.2 μm，導入快速插拔設計，將感測器與MOS-FET元件快速的連接換。觸控薄膜上層的銦錫氧化物作為感測層，與氫離子具備很強的鍵結能力，以Nernst方程式評估感測性能，在pH值範圍3〜13，靈敏度為59.2 mV/pH，具備良好線性度R2 = 0.9938，與理想Nernst靈敏度相當一致，也具備快速響應能力（〜1秒），高重現性（變異係數〜2％）與長時間穩定性（變異係數〜1％）。推導出感測器的緩衝能力達7.5×1018~1019 (groups/m2)與理論值一致，單位面積附著淨電荷數與表面鍵結點數的比值(0.8% /ΔpH)優於高靈敏度的IS-FET Ta2O5感測器(0.7% /ΔpH)。TPF感測器在溶液約pH 9、10之間輸出0電位，此時溶液中的氫離子數已遠低於氫氧離子，顯示TPF感測器對氫離子有很強的鍵結能力。溶液中除了氫離子，也含有許多其他正、負離子，針對常見的鉀、鈉離子(K+，Na+)的影響進行探討，干擾離子在鹼性溶液中的影響比酸性溶液中明顯，感測器的靈敏度降低至45.3 mV/pH，仍具有高線性度(R2 = 0.9962)。感測面積在128〜800 mm2，都具有高線性度，靈敏度為42.1~59.2 mV/pH，由於感測器省略封裝處理的設計，使得面積大小對靈敏度有一定的影響。後續的研究，將利用觸控薄膜具備可撓性與成本優勢，朝多感測功能方向發展，應用在穿戴式與拋棄式的感測場域。

This study presents the research and development of properties with high C/P value of pH sensors which were developed under the EG-FET utilizing industrial-grade touch panel film (TPF) as the gate sensing element. The mass production touch panel films have high quality and reliability such that the developed sensors are ideal for on-site and biochemical disposable applications. Based on PET substrate, multilayer films (ITO / SiO2 / Nb2O5) were sequential sputtered by utilizing roll-to-roll sputtering process and the thickness of the developed touch panel film was about 0.2 μm. The TPF sensor is simply connected to a MOS-FET via a plug-in slot such that the developed pH sensor is easy to be replaced in seconds. Theoretical Nernst equation is adopted to evaluate the sensing performance of the developed sensor which shows high sensitivity of 59.2 mV/pH in pH 3 to 13 with good linearity of R2 = 0.9948. The developed sensor also shows excellent performance including ultra-fast response (~1 sec), good repeatability (C.V. ~ 2%) and stability (C.V. ~1%). The buffer capacity7.5×1018~1019 (groups/m2) shows consistent with the theoretical results and the ratio of net charge ions over site-binding groups per uint sensing area (0.8% /ΔpH) is superior than the IS-FET Ta2O5 sensor(0.7% /ΔpH). The potassium, sodium cations (K+, Na+) used for evaluation of the performance interference showed the potential output changes were more obvious in base than in acid solutions resulting lower sensitivity of 45.3 mV/pH (R2 = 0.9962). The performance of the sensing area range 128 ~800 mm2 were evaluated that the responses showed good linearity and the sensitivity range 42.1~59.2 mV/pH. Based on TPF, multi-function sensor is expected to develop for wearable and disposable applications.

論文審定書 i
誌謝 ii
中文摘要 iii
Abstract iv
表目錄 vii
圖目錄 viii
符號表 xi
簡寫表 xiii
第一章 緒論 1
1.1 前言 1
1.2薄膜感測器(Thin Film Sensor) 3
1.3 電化學氫離子感測器(Electro-Chemical pH Sensor) 7
1.4 固態電子氫離子感測器(Solid-State IS-FET pH Sensor) 10
1.5 延伸閘極場效電晶體感測器(EG-FET sensor) 15
1.6酵素型場效電晶體感測器(Enzyme Based EN-FET sensor) 17
1.7觸控薄膜應用 19
1.8 動機與目的 22
1.9論文架構 23
第二章 pH EG-FET分析模型與原理 25
2-1電雙層分析模型(Electrical Double Layer) 25
2.2表面鍵結模型(Site-Binding Model) 29
2.3 Nernst方程式 33
2.4 MOS-FET量測模式 34
第三章 觸控薄膜製備與實驗方法 36
3.1觸控薄膜結構與材料 36
3.2觸控薄膜捲對捲濺鍍設備 37
3.3觸控薄膜製程 40
3.4 Ta2O5感測薄膜特性與製程 44
3.5 pH特性量測實驗設計 46
第四章 結果與討論 49
4.1 TPF的電性分析 49
4.2靈敏度特性分析 52
4.3暫態反應特性分析 60
4.4長時間穩定性量測 63
4.5重複性感測能力 67
4.6抗外部離子干擾感測能力 71
4.7感測面積對感測能力的影響 77
第五章 結論及未來展望 81
5.1 結論 81
5.2 未來研究方向 84
參考文獻 85
自述 91

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