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博碩士論文 etd-0909108-154323 詳細資訊
Title page for etd-0909108-154323
論文名稱
Title
高長度直徑比的微米級圓針之研製
The research of the high aspect ratio of a micron size round pin
系所名稱
Department
畢業學年期
Year, semester
語文別
Language
學位類別
Degree
頁數
Number of pages
118
研究生
Author
指導教授
Advisor
召集委員
Convenor
口試委員
Advisory Committee
口試日期
Date of Exam
2008-07-26
繳交日期
Date of Submission
2008-09-09
關鍵字
Keywords
鎢針、氫氧化鈉
tungsten needle, sodium hydroxide
統計
Statistics
本論文已被瀏覽 5663 次,被下載 3
The thesis/dissertation has been browsed 5663 times, has been downloaded 3 times.
中文摘要
本研究使用自行研製之微電解加工試驗機,以單點及往復方式,探討供應電壓和起始加工位置對鎢針幾何形狀之影響。以鎢針為陽極浸在2 wt. % 氫氧化鈉電解液中,304不?袗?針為陰極,其尖端直徑為100 μm,電極間距為10 μm進行鎢針之電解加工。
實驗結果發現在較高供應電壓下,因為鎢針直徑縮減速率極快,所以其直徑較難控制,且產生之氣泡較為激烈,容易將極細尺寸之鎢針撞裂。在較低供應電壓下,雖可將鎢針直徑加工至較細尺寸,唯加工時間增長。
在單點加工狀況下,供應電壓12V,起始加工位置為75 μm時,可用來製作短而均勻之微圓柱鎢針,其鎢針表面均勻且光滑、直徑約為9 μm。在往復加工狀況下,供應電壓4V,當起始加工位置介於-50 μm與0 μm之間,可用來製作長而均勻之微圓柱鎢針,其鎢針表面略為粗糙。在起始加工位置為0 μm時,以4V之供應電壓加工24分鐘,再以2V供應電壓加工約28分鐘,可得長度直徑比約為30、直徑約為9 μm之鎢針。
關鍵字:鎢針、氫氧化鈉
Abstract
In this study, an electrolytic micro-machining tester is employed to investigate the effects of supply voltage and initial machining position on the geometry of the tungsten needle using the single-point and the reciprocating methods. The tungsten needle to be electrolyzed is dipped in an aqueous electrolyte of 2wt % sodium hydroxide as the anode, and the stainless steel needle with a diameter of 100 μm as the cathode, and the electrode gap is set to be 10 μm.
Experimental results show that it is difficult to control the diameter of the tungsten needle because the reduction rate of its diameter is quite fast and the bubbles are generated violently to cause the breakage of the tungsten needle at the higher supply voltage. At the lower supply voltage, the tungsten needle can be machined to a finer scale, but it takes a long machining time.
Under the single-point machining condition, it can be used to manufacture a short, uniform, and smooth tungsten needle with the diameter of 9 μm at the supply voltage of 12V and the initial machining position of 75 μm. Under the reciprocating machining condition, a long uniform micro-cylinder tungsten needle can be manufactured, but its surface becomes rough slightly at the supply voltage of 4V and the initial machining position in the range between -50 and 0 μm. A tungsten needle with the aspect ratio of 30 and the diameter of 9 μm can be manufactured using the following process: the machining time of 24 min at the supply voltage of 4V, and then the machining time of 28 min at the supply voltage of 2V.
Key words:tungsten needle, sodium hydroxide
目次 Table of Contents
封面 I
學位論文審定書 II
謝誌 III
總目錄 IV
圖目錄 VII
表目錄 X
中文摘要 XI
英文摘要 XII
第一章 緒論 1
1-1 前言 1
1-2 相關文獻 3
1-2-1 電解加工文獻 3
1-2-2 探針與微電極之製造 7
1-3 本文重點 10
第二章 基本原理 11
2-1 電解加工之基本原理 11
2-2 電化學表面拋光原理 13
2-3 過電壓與極化現象 15
2-4 電解液 18
2-4-1 電解液之選用 18
2-4-2 不同電解液之特性 21
2-4-3 電解液之壽命 23
第三章 實驗設備及實驗方法 25
3-1 實驗設備 25
3-1-1 高精度微電解加工試驗機 25
3-1-2 實驗資料蒐集分析與訊號量測設備 28
3-1-2-1 示波器擷取系統 28
3-1-2-2 顯微鏡設備 28
3-1-2-3 量測與資料收集分析 31
3-2 實驗試片之材料特性與幾何形狀 32
3-2-1 鎢棒材料特性與幾何形狀 32
3-2-2 電解液、輔助電極 33
3-3 試片處理 36
3-3-1 鎢棒試片 36
3-3-2 304不?袗?輔助電極 36
3-4 實驗條件設定 38
3-5 實驗步驟 40
3-5-1 NaOH水溶液之調配 40
3-5-2 電流波型量測 41
3-5-3 實驗流程 42
第四章 實驗結果與討論 45
4-1 單點加工對圓鎢針幾何形狀之影響 45
4-1-1 主軸速度之影響 45
4-1-2 電極間距之影響 53
4-1-3 加工位置之影響 61
4-1-4 供應電壓之影響 63
4-1-4 加工時間之影響 70
4-2 供應電壓對往復電解圓鎢針之影響 75
4-3 加工時間對往復電解圓鎢針之影響 85
4-4 調降供應電壓對往復電解圓鎢針之影響 90
第五章 結論與未來研究方向 97
5-1 結論 97
5-2 未來研究方向 100
參考文獻 101
參考文獻 References
【1】 J.A. McGeough, “Principles of electrochemical Machining, chapman & hall”, London, 1974, pp.1-10.
【2】 A.R. Mileham, S.J. Harvey and K.J. Stout , “The characterization of electrochemically machined surfaces”, Wear, 109, 1986, pp. 207-214
【3】 J.E. Labraga, J.M. Bastidas, S. Feliu, “A contribution to the study on electropolishing of mild Steel and aluminium using alternating current”, Electrochimica Acta, 36, 1991, pp. 93-95
【4】 R. Venkatachalam, S. Mohan, S. Guruviah, “Electropolishing of stainless steel from a low concentration phosphoric acid electrolyte”, Metal Finishing, 89, No. 4,1991, pp. 47-50 .
【5】 M.A. Bejar and F. Gutierrez, “On the determination of current efficiency in electrochemical machining with a variable gap”, Journal of Materials Processing Technology , 37, 1993, pp. 691-699.
【6】 魏水文, “單曲率球面之電化學拋光”, 國立清華大學動力機械工程研究所碩士論文, 1997。
【7】 G.H. Sedahmed, M.S. Abdo and M.A. Kamal, “A mass transfer study of the electropolishing of metals in mechanically agitated vessels”, Int. Comm. Heat Mass Transfer, 28, No.2, 2001, pp. 257-265.
【8】 H. Hocheng , P.S Pa , “The application of a turning tool as the electropolishing”, Journal of Materials Processing Technology, 120, 2002, pp. 6-12.
【9】 R. Farooq, Y. Wang, F. Lin, S.F. Shaukat, J. Donaldson, A.J. Chouhdary, “Effect of ultrasound on the removal of copper from the model soltions for copper electrolysis process”, Water Research, 36, 2002, pp. 3165-3169.
【10】 李碩仁, 施博中, 王忠祥, 崔海平, 林庭凱, 江文欽 ,吳俊賢 ,“脈衝式表面電解拋光技術研究”,第二十屆機械工程研討會論文集, 2003, pp. 923-930.
【11】 B. Bhattacharyya and J. Munda, “Experimental investigation on the influent of electrochemical machining parameters on machining rate and accuracy in micromachining domain”, International Journal of Machine Tool and Manufacture, 43, 2003, pp. 1301-1310.
【12】 P. Allongue, P. Jiang, V. Kirchner, A. L. Trimmer and R. Schuster, “Electrochemical micromachining of p-Type silicon”, Journal of Physical Chemistry B, 108, 2004, pp. 14434-14439.
【13】 T. Kurita, M. Hattori, “A study of EDM and ECM/ECM-lapping complex machining technology”, International Journal of Machine Tools & Manufacture , 46, 2006, pp. 1804-1810.
【14】 G. Binning , H. Rohrer, Ch. Gerber, and E. Weibel, “Surface studies by scanning tunneling microscopy”, Physical Review Letter, 49,1982, pp. 57-61.
【15】 郭詩坪, “碳化鎢微細電極的成形性及鈦合金的微孔放電加工特性研究”, 國立中央大學機械工程研究所碩士論文, 1998。
【16】 吳偉堯, 郭佳儱, 李季龍, 游智翔, 黃俊德, 解安國, “ 電解微針成形及氣中放電製作微球狀電極之研究 ”, 第十九屆機械工程研討會論文集, 2002, pp. 731-738.
【17】 M. Yamazaki , T. Suzuki, N. Mori, M. Kunieda, “EDM of micro-rods by self-drilled holes”, Journal of Materials Processing Technology, 149 ,2004, pp. 134-138.
【18】 D.Y. Sheu,“Multi-spherical probe machining by EDM combining WEDG technology with one-pulse electro-discharge”, Journal of Materials Processing Technology, 149, 2004, pp. 597-603.
【19】 Y. M. Lim and S. H. Kim, “An electrochemical fabrication method for extremely thin cylindrical micropin”, International Journal of Machine Tools & Manufacture, 41, 2001, pp. 2287-2296.
【20】 Y. M. Lim, H. J. Lim, J. R. Liu and S. H. Kim, “Fabrication of cylindrical micropins with various diameters using dc current density control”, Journal of Materials Processing Technology, 141, 2003, pp. 251-255.
【21】 Z. Wang, B. Zhu and G. Cao, “Fabricating microelectrode by electrochemical micromachining”, Proceedings of SPIE, 6041, 2006, pp. 1-5.
【22】 S. H. Choi, S.H. Ryu and C.N. Chu, “Fabrication of WC micro-shaft by using electrochemical etching”, International Journal of Advanced Manufacture Technology, 31, 2007, pp. 682-687.
【23】 E. S. Lee, S. Y. Baek, and C. R. Cho, “A study of The characteristics for electrochemical micromachining with ultrashort voltage pulses”, International Journal of Advanced Manufacture Technology, 31, 2007, pp. 762-769.
【24】 R. Hobara, S. Yoshimoto, and S. Hasegawa, “Dynamic electrochemical etching technique for tungsten tips suitable for multi-tip scanning tunneling microscopes”, Journal of Surface Science and Nanotechnology, 5, 2007, pp. 94-98.
【25】 佐藤敏一, “電解加工と化学加工”, pp.17-167.
【26】 陳裕豐, “高潔淨閥件之流道表面處理—電解拋光技術”, 機械工雜誌, 1999年9月號, pp. 230-240,。
【27】 A. E. Debarr and D. A. Oliver, “Electrochemical machining”, Macdonald, 1968, pp. 59.
【28】 J. F. Kahles, “Melals handbook” 3, edited by T. Lyman, American Society for Metals, 1967, pp. 234
【29】 A. E. Debarr and D. A. Oliver, “Electrochemical machining”, Macdonald, 1968, pp. 112.
【30】 萬其超 編譯, “電化學之原理與應用”, 徐式基金會出版。
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