本論文中，我們將整合與討論利用漸變式波導之設計的環形雷射，我們利用不對稱的漸變式波導耦合器之設計，可讓二個方向的耦合效率不同，因而使得單一方向性的環形雷射可能被達成，這可避免在直條雷射中所造成的空間孔燃燒效應(spatial-hole burning ;SHB)。
在本文的工作中，二種類型的環形雷射將被一一討論與製作:(1)90度全反射鏡(total reflection mirrors ;TIMs);(2)圓形反射鏡 (circular retro-mirrors)。在完成不同類型(1)與(2)的環型雷射後，經由在漸變式波導耦合器灌入電流，可量測得在漸變式波導二個不同方向(順時針與逆時針方向)因自發性放射的能量有著3dB的差異，由此可證明在環型共振腔中因漸變式波導的設計，使得二個方向來回共振的損耗並不相同，也同時證實了製做單一方向性環形雷射的可能性。

In this paper, a ring laser design based on tapered waveguide coupler is fabricated and discussed. Using the asymmetric tapered waveguide coupler, two different directional coupling can be realized. Such that, the spatial-hole burning problem in linear laser cavity can be avoided, leading to the possibility of unidirectional traveling laser.
In the work, two types of ring laser structures are fabricated and analyzed, in which (1) 90 degrees total reflection mirrors (TIMs) and (2) circular retro-mirrors are defined. Through the current injection on the tapered waveguide coupler, the received spontaneous emissions power at different directions (clockwise and counterclockwise directions) shows a 3dB difference for both type (1) and (2). Two oscillations in ring resonator could give different round-trip loss, indicating the possibility to fabricate unidirectional ring laser.

目錄 1
誌謝 3
中文摘要 4
英文摘要 5
第一章 緒論 6
1.1 前言 6
1.2 研究動機 9
1.3 論文架構 17
第二章 理論與模擬 18
2.1 環形雷射 18
2.1.1 材料增益 19
2.2 元件損耗 20
2.2.1 全反射鏡 21
2.2.2 圓形波導 24
2.2.3 單一方向性與漸變式耦合器 29
2.3 總損耗預算 35
第三章 實驗 37
3.1 實驗流程 37
3.2 離子佈植 38
3.3 P 型金屬蒸鍍與P 型接觸層蝕刻 40
3.4 P 型包覆層(P-ridge)蝕刻 41
3.5 主動層(Active Region)底切蝕刻 42
3.6 N 型金屬接觸層/包覆層蝕刻與N 型金屬蒸鍍 44
3.7 被動波導(Passive Waveguide) 蝕刻、Mesa 蝕刻 45
3.8 平坦化製作 46
3.9 共平面波導蒸鍍 46
第四章 量測 48
4.1 矩形環形雷射量測 48
4.1.1 矩形元件的L-I曲線 48
4.1.2 全反射鏡(bending)損耗量測49
4.1.3 矩形元件的L-I曲線54
4.1.4 矩形環形雷射損耗預算59
4.2圓形環形雷射量測60
4.2.1 圓形轉彎量測60
4.2.2 圓形元件的L-I曲線65
4.2.3 圓形環形雷射損耗預算68
參考文獻

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