本論文的研究目的為利用深蝕刻製作環型雷射整合漸變式波導，我們利用深蝕刻製作全反射鏡面，可讓光在波導內達到全反射目的，加上我們利用漸變式波導達到單一方向行進波共振，能避免DFB雷射所造成的空間燃燒效應。
在本文中，二種類型的環型雷射討論與製作:(1)90度全反射鏡面 (2)圓形全反射鏡面
在元件製程方面，利用Self-Alignement濕蝕刻技術將波導製做出平滑的波導及垂直般的鏡面，並且利用深蝕刻製作全反射鏡面和轉彎波導外圍，以減少轉彎損耗和波導損耗。

The goal of the thesis is Ring Laser Integrated Taper-directional Coupler Using Deep Etching to Fabricate Total Internal Reflection Mirrors. In order to total internal reflection, we make deep etching for the total reflection mirror. We use the tapered waveguide coupler, if unidirectional traveling-wave oscillation can be achieved, spatial hole burning effects seen in DFB laser can be avoided.

In this paper, two types of ring laser structures are fabricated and discussed, in which (1) 90 degrees total reflection mirrors and (2) circular retro-mirrors.

In fabrication process, we get smooth waveguide and highly perpendicularity waveguide by Self-Alignement wet etch method. In order to reduce bending loss and waveguide loss, we make deep etching for the total reflection mirror and circular retro-mirrors.

目錄
目錄 1
誌謝 3
中文摘要 4
英文摘要 5
第一章 序論 6
1.1前言 6
1.2研究動機 7
1.3論文目的 10
1.4論文架構 20

第二章 理論與模擬 22
2.1前言 22
2.2雷射基本概述 22
2.3雷射元件的驅動 23
2.4材料增益 24
2.5全反射鏡面損耗 26
2.6圓形波導 31
2.7漸變式波導耦合器 35
2.8元件總損耗預算 41

第三章 實驗 43
3.1前言 43
3.1.1圓形環形雷射實驗流程 43
3.1.2方形環形雷射實驗流程 44
3.2製程過程 45
3.2.1離子佈植 45
3.2.2 P-type金屬蒸鍍 46
3.2.3 P-type contact 蝕刻 47
3.2.4深蝕刻全反射鏡面 48
3.2.5 P-type包覆層(P-ridge)蝕刻 49
3.2.6 i-layer主動層底切蝕刻 51
3.2.7被動波導蝕刻和濺鍍Si3N4 53
3.2.8平坦化製作 54
3.2.9共平面波導蒸鍍 54

第四章 量測結果與討論 56
4.1前言 56
4.2矩形環形雷射量測 56
4.2.1矩形元件的I-V曲線 56
4.2.2矩形元件的光輸出 57
4.2.3矩形元件的轉彎損耗 58
4.3賽馬形環形雷射量測 61
4.3.1賽馬形環型雷射元件的光輸出 61

第五章 結論 63

參考文獻 64

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