在一般的定位控制之中，摩擦力一直是影響定位的精度以及時間最為重要的原因。因此，為了克服摩擦力的影響，完整的模型建立是必須的。在巨觀的模型的建立，採用一般的參數鑑定方式來建立巨觀的模型，其中包含了庫侖摩擦以及黏滯摩擦力。因為動摩擦力為一線性的變化，因此我們直接採用PID控制器的設計來完成我們巨觀階段的定位。而微觀模型我們採用謝成教授所提出的模型，在實驗的過程中我們發現，微觀會有參數變化以及非線性的問題，因此我們使用順滑模式控制器來克服這一些問題，並進而使微觀的定位在0.2秒內完成，達到精度0.1μm。

In position control systems like linear motor, friction is a key factor to influence the control performance when micron or sub-micron meter accuracy is required. To overcome the effect of the friction, besides a general model of the linear motor system, past researches have shown an additional static friction model of the system is necessary for a better control performance when the motor move into the micro region of the system (usually <100μm). Two models, macro and micro model of the system have been well constructed by two different identification methods. After model construction, two different controllers are also designed for each model. A traditional pole-placement PID controller can be easily obtained for the macro model to move into the micro region quickly and stably. Then in micro model design, from the experiments, it is found that system parameter varies and thus degrades the positioning performance of the system. So, a Sliding-Mode Controller is designed to improve these problems. With a two step control strategy, macro and micro step, the linear motor positioning system can achieve a 0.1μm accuracy within 0.2 sec.

總目錄
總目錄 I
圖目錄 II
圖目錄 II
表目錄 IV
中文摘要 V
英文摘要 VI

第一章 緒論 1
1.1 研究動機 1
1.2研究目的 2
第二章 文獻回顧 3
2.1 摩擦力模型回顧 4
2.2線性馬達的定位系統 7
第三章 系統數學模式建立 9
3.1 線性直流馬達的數學模式 9
3.2巨觀模型的參數估測 10
3.3 微觀模型數學模式建立 12
3.4微觀模型的參數估測 14
第四章 微觀控制器設計 21
4.1微觀模型的線性化 21
4.2 順滑模態控制器設計 22
4.3切跳現象的消除 23
第五章 定位控制模擬25
5.1實驗設備架構 25
5.2 定位控制模擬 27
第六章 結論與未來研究33
參考文獻35
附錄39

圖目錄
圖 2-1 摩擦力模型4
圖2-2 Negative viscous +Coulomb +viscous friction 5
圖2-3 靜摩擦力的作用力與位移的關係圖 6
圖3-1 馬達的微觀靜摩擦力模型 12
圖3-2 鋸齒波形的輸入 13
圖3-3 位移與力的關係圖 14
圖3-4 塑性體參數求取位移與力關係圖 15
圖3-5 Step-liked input 16
圖3-6 Step-liked Output 17
圖3-7 非線性彈簧的參數求取示意圖 18
圖3-8 非對稱鋸齒波的輸入 18
圖3-9 阻泥參數的求取 19
圖4-1順滑函數的切跳現象 23
圖4-2飽和函數 24
圖5-1 線性馬達定位設備架構圖 25
圖5-2 線性馬達結構示意圖 26
圖5-3馬達巨觀定位模擬方塊圖 28
圖5-4馬達巨觀定位模擬圖(Xd = 1mm) 28
圖5-5馬達巨觀定位模擬圖(Xd = 3mm) 29
圖5-6馬達巨觀定位模擬圖(Xd = 5mm) 29
圖5-7經過順滑模式控制的微觀階段定位圖 31
圖5-8順滑曲線的收斂情形 32
附圖1：巨觀模型參數鑑定之開路位移響應(input=9volt) 39
附圖2：巨觀模型參數鑑定之開路位移響應(input=9.5volt) 39
附圖3：巨觀模型參數鑑定之開路位移響應(input=10volt) 40
附圖4：巨觀模型參數鑑定之開路位移響應(input=10.5volt) 40
附圖5：巨觀模型參數鑑定之開路位移響應(input=11volt) 41
附圖6：微觀模型塑性體和非線性彈簧參數鑑定之輸入圖 41
附圖7：微觀模型塑性體和非線性彈簧參數鑑定之開路響應圖 42
附圖8：微觀模型塑性體和非線性彈簧參數鑑定之輸入圖 42
附圖9：微觀模型塑性體和非線性彈簧參數鑑定之開路響應圖 43
附圖10：微觀模型塑性體和非線性彈簧參數鑑定之輸入圖 43
附圖11：微觀模型塑性體和非線性彈簧參數鑑定之開路響應圖 44
附圖12：微觀模型塑性體參數鑑定之輸入圖 44
附圖13：微觀模型塑性體參數鑑定之開路響應圖 45
附圖14：微觀模型塑性體參數鑑定之輸入圖 45
附圖15：微觀模型塑性體參數鑑定之開路響應圖 46
附圖16：微觀模型阻泥參數鑑定之輸入圖 46
附圖17：微觀模型阻泥參數鑑定之開路響應圖 47
附圖18：微觀模型阻泥參數鑑定之輸入圖 47
附圖19：微觀模型阻泥參數鑑定之開路響應圖 48
附圖20：微觀模型阻泥參數鑑定之輸入圖 48
附圖21：微觀模型阻泥參數鑑定之開路響應圖 49


表目錄
表 3- 1馬達巨觀參數 11
表 3- 2馬達微觀參數 .20
表 5- 1馬達參數規格表26
表 5- 2巨觀階段的定位控制參數 30

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