自從1990 年，D. M. Eigler 和E. K. Schweizer 成功地利用STM 的探針在鎳
(110)的表面上操控氙原子排列成原子尺寸的結構之後，操控原子/分子的實驗變成
了表面科學領域研究的一個主軸。而一個更高的目標是能夠操控或修改且有奈米尺
寸大小的團簇。在我們的實驗中，先蒸鍍金屬原子到成長在鎳鋁合金上的氧化鋁表
面，而這些鈷原子會因為表面自由能的關係形成原子團簇的形式，再運用操控原子
的技術以及利用STM 來觀看操控原子團簇前後的變化；藉著降低STM 的偏壓，使
得探針更靠近原子團簇，在探針及原子團簇之間產生足以克服原子團簇及氧化層之
間作用的能力，達成移動原子團簇的目的。另外在電子能譜的分析方面，透過電子
能譜曲線的差異，我們能夠分辨出原子團簇及氧化層表面的不同。而我們也統計發
現，金屬原子團簇的尺寸會影響穿隧電流間隙的大小。

Since 1990, D. M. Eigler and E. K. Schweizer manipulated the xenon atoms on the
Ni(110) surface to pattern the atomic scale structure. The researches about
manipulation of atoms/ molecules become a major research in surface science. One of
the ultimate goals of nanotechnology is manipulating or modifying the nanoclusters.
In our experiment, first, deposit metal atoms on the Al2O3/NiAl(100) surface. These Co
atoms will form a cluster structure because of the surface free energy. Second, use the
STM manipulation technique to manipulate the clusters, and observe the differences
by STM images. Closer the tip to Co clusters by reducing the bias voltage of STM. This
action will induce a force to overcome the interaction between Co clusters and Al2O3
to remove the Co clusters. In the analysis of electronic spectroscopy, we can say that
some of the clusters are not the Co clusters, those are formed by oxygen atom or other
molecules by the difference of electronic spectroscopy curves. And we observe that the
relation between Co cluster size and tunneling current gap is a linear relation. In the
analysis of electronic spectroscopy, we can distinguish the cluster from the oxide
surface by the difference of electronic spectroscopy curves. And we observe that the
metal cluster size will be influenced the width of tunneling gap.

摘要 ………………………………………………………………………………………1
Abstract ……………………………………………………………………………………2
Chapter 1:
Introduction: ....................................................................................................................3
Chapter 2: Basic concept:
2.1: Ultrahigh vacuum (UHV) system.............................................................................5
2.2: Localized electron spectroscopy and Coulomb blockade effect……………….....6
2.3: NiAl(100) and Al2O3 .................................................................................................7
2.4: Co nanoclusters deposited on Al2O3/NiAl(100) ....................................................10
2.5: Calculated the coverage of Co nanoclusters .........................................................12
Chapter 3: Experimental procedures
3.1: Ultrahigh vacuum system ......................................................................................13
3.2: Molecular Beam Epitaxy.........................................................................................14
3.3: Vary surface temperature ......................................................................................16
3.4: Scanning tunneling microscopy (STM) .................................................................19
3.4.1: The principle of STM ......................................................................................20
3.4.2: Preparing the STM tips ...................................................................................23
ii
3.5: Preparing the experimental sample .......................................................................25
3.5.1: Ion bombards and anneal sample ...................................................................25
3.5.2: Expose oxygen on clean NiAl(100) surface ....................................................27
3.5.3: Deposited Co clusters on Al2O3/NiAl(100) .....................................................27
3.6: The method of manipulation of Co nanoclusters .................................................28
Chapter 4: Result and discussion:
4.1: Manipulation of nanoclusters ................................................................................29
4.1.1: The threshold bias value ………………………………………………….…29
4.1.2: Move Co clusters with Method 1 and Method 2 …………………………...31
4.1.3: Relocate Co clusters …………………………………………………………34
4.2: Localized electron spectroscopy ............................................................................38
Chapter 5:
Conclusion: ....................................................................................................................48
Reference ………………………………………………………………………………49

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